Light receiving member for use in electrophotography with a surface layer comprising non-single-crystal material containing tetrahedrally bonded boron nitride

ABSTRACT

Improved light receiving members which are characterized by having an special surface layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride or a non-monocrystalline material containing said boron nitride and trihedrally bonded boron nitride in mingled state or by having an especial surface layer constituted with a lower layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride and an upper layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state. The improved light receiving members excel particularly in moisture resistance, repeating use characteristic, electrical voltage withstanding property environmental use characteristic and durability. 
     And the improved light receiving member are particularly advantageous when used as an image-making member in electrophotography since they always exhibit substantially stable electric characteristics without depending upon the working circumstances, maintain a high photosensitivity and a high S/N ratio, do not invite any undesirable influence due to residual voltage even when used repeatedly for a long period of time, cause either defective image nor image flow and have a wealth of cleaning properties.

FIELD OF THE INVENTION

This invention relates to the improvements in the light receiving member comprising a substrate and a light receiving layer having at least a photoconductive layer formed of an amorphous material containing silicon atom as the main layer constituent and a surface layer.

More particularly, it relates to an improved light receiving member suited especially for use in electrophotography which has a light receiving layer having a surface layer formed of an amorphous material containing tetrahedrally bonded boron nitride or both said boron nitride and trihedrally bonded boron nitride being disposed on said photoconductive layer.

BACKGROUND OF THE INVENTION

For the light receiving members for use in electrophotography and the like, the public attention has been focused on such light receiving members that have a photoconductive layer formed of an amorphous material containing silicon atom as the main layer constituent and hydrogen atom or/and halogen atom [hereinafter referred to as "A--Si(H,X)"] as disclosed in Unexamined Japanese Patent Publications Sho. 54(1979)-86341 and Sho. 56(1981)-83746, since said photoconductive layer has a high Vickers hardness in addition to having an excellent matching property in the photosensitive region in comparison with that in other kinds of light receiving member and it is not harmful to living things as well as man upon the use.

By the way, in any case, such light receiving member comprises a substrate and a photoconductive layer formed of A--Si(H,X). In this respect, it is known to provide a surface layer on the photoconductive layer, which functions to prevent the photoconductive layer from being injected by charges from its free surface side when it is engaged in charging process and to improve the moisture resistance, repeating use characteristics, breakdown voltage resistance, use environmental characteristics and durability of the photoconductive layer, and further in order to make it possible to maintain the quality of the images to be obtained for a long period of time.

And there have been made various proposals to form such surface layer using a high resistant and phototransmissive non-monocrystalline material such as amorphous material and polycrystalline material.

Among those proposals, there is a proposal to form such surface layer using a boron-nitrogen series amorphous material as disclosed in Unexamined Japanese Patent Publications Sho. 59(1984)12448 and Sho. 60(1985)-61760.

However, the boron(B)-nitrogen(N) series amorphous materials to form the foregoing surface layer which are disclosed in said publications are: boron atom and nitrogen atom are contained in unevenly distributed state and in addition, in large amount of hydrogen atom is contained; B--H bond, N--H bond and B--B bond are present in abundance; and the presence of B--N bond is slight and three dimensional structure by B--N bond is little present.

Because of this, for the light receiving members disclosed in said publications which has a surface layer formed of said boron-nitrogen series amorphous material, there are still unresolved problems that the surface layer is apt to be easily deteriorated not only with corona discharge in the charging process but also due to various mechanical actions during the contacts with a cleaning blade or other members of the device and as the layer deteriorates, it loses the functions required therefor. In addition to the above problems, the foregoing light receiving member has other problems that it is insufficient in charging efficiency so that it often brings about defective images such as those accompanied with undesired ghosts in the case where it is used in an image-making device.

SUMMARY OF THE INVENTION

This invention is aimed at eliminating the foregoing problems principally relative to the surface layer in the conventional light receiving member and providing an improved light receiving member having a desirable surface layer which can continuously exhibit the original functions required therefor without accompaniment of the foregoing problems even in repeating use for a long period of time.

Another object of this invention is to provide an improved light receiving member for use in electrophotography which always maintains a stable and effective charging efficiency and makes it possible to obtain high quality images even in the case of repeating use for a long period of time.

The present inventors have conducted extensive studies for overcoming the foregoing problems on the conventional light receiving members and attaining the objects as described above and, as a result, have accomplished this invention on the findings as below described.

That is, the present inventors have experimentally confirmed that the composition of the above mentioned surface layer formed of the foregoing boron-nitrogen series amorphous material is the very factor in order to solve the foregoing problems in the conventional light receiving member.

In view of the above, the present inventors have firstly investigated about the situation of influences of various boron nitrides in the cases when they are incorporated into a surface layer of a light receiving member for use in electrophotography.

As a result, the findings as below mentioned were obtained and on the basis of those findings, the present inventors have come to the result of acknowledging that not all but only limited kinds of boron nitride are effectively usable as the constituent of said surface layer.

That is, one finding is that the hexagonal system boron nitride of which cordination number being 3 is of the same structure as graphite, very soft, and 2 for Mohs hardness, and that in the case where the surface layer is formed of such boron nitride, the resultant light receiving member will become such that is weak against the impacts of active substances such as ion, ozone, electron etc. which will be generated by electric corona and that is apt to be easily deteriorated to lose the functions required therefor when it is mechanically damaged due to contacts with cleaning blade or other members of the electrophotographic copying system.

Further, since the hexagonal system boron nitride is of a relatively low electrical resistance, the light receiving member having a surface layer containing such boron nitride is undesirably low for the charging efficiency so that it often bring about defective images as such accompanied with undesired ghosts.

Another finding is that the cubic system boron nitride of which cordination number being 4 is of a large Mohs hardness, sufficiently resistant not only against the impacts of the above mentioned active substances but also against mechanical impacts and large enough for electrical resistance, and that in the case where the surface layer is formed of such cubic system boron nitride, the resultant light receiving member will become such desirable one that has a sufficient discharging efficiency and can make high quality images.

In view of the above, as far as the strength is concerned, it can be said that the surface layer is desirable to be formed of an amorphous material containing the hexagonal system boron nitride.

However, related various factors as below mentioned should be taken into consideration for the preparation of a desirable light receiving member particularly for use in electrophotography.

That is, the image-making process using a light receiving member in electrophotographic copying system comprises, typically, corona charging, image exposing, image developing with toner, image transferring to a paper and light receiving member cleaning. In this respect, the surface of the light receiving member will come to contact with plural members respectively of a different quality of the material in each step.

Therefore, the quality of an image to be transferred to a paper will largely depend upon whether the contact of the light receiving member with the respective members in the respective steps is suitable or not. For instance, in the case of the cleaning step using a blade, when the surface of the light receiving member is excessively hard, the blade will be worn away at an early stage and as a result, cleaning deficiency is apt to occur. And in that case, since the blade will be short-lived, the maintenance expenses of the copying system eventually become costly. On the other hand, in the case where the surface of the light receiving member is excessively soft, it is easily shaved by the blade to result in bringing about undesirable defects on an image to be made and other than this, the blade will be short-lived. Therefore, the maintenance expenses of the copying system eventually become costly also in this case.

In view of the above, it is necessary for the hardness of the surface of the light receiving member to be decided while having due regards on the harmonization thereof with the hardnesses of the respective members with which the light receiving member will contact in the respective steps of the above mentioned image-making process in electrophotographic copying system. Particularly in the case where the surface layer of the light receiving member is tried to form using the foregoing cubic system boron nitride, further appropriate improvements are required in the respective members in the respective steps of the above mentioned image-making process.

As a result of further continued studies on the basis of the above findings, the present inventors have come to obtain an acknowledge that either in the case where the surface layer of the light receiving member is made to be such that is formed of a non-monocrystalline material containing at least tetrahedrally bonded boron nitride or both tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state or in the case where the surface layer is made to be such that is constituted with a lower layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride and an upper layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state, the resultant light receiving member having any of the above surface layers becomes to have a desirable harmonization between the hardness of the surface of the light receiving member and the hardnesses of the respective members of the respective steps of the image-making process in electrophotographic copying system.

This invention has been completed based on the foregoing various findings, and it typically concerns an improved light receiving member comprising a substrate and a light receiving layer having at least a photoconductive layer formed of an amorphous material containing silicon atom as the main constituent atom and at least one kind atom selected from hydrogen atom and halogen atom and a surface layer, which is characterized in that said surface layer is formed of (1) a non-monocrystalline material containing tetrahedrally bonded boron nitride or (2) a non-monocrystalline material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride, or is constituted with a lower layer formed of a non-monocrystalline material containing tetrahedrally bonded boron nitride and an upper layer formed of a non-monocrystalline material containing trihedrally bonded boron nitride in mingled state.

And in a preferred embodiment of the improved light receiving member according to this invention, the above mentioned surface layer may further contain dopants, either p-type or n-type. In that case, there is provided a further desirable light receiving member which can exhibit additional functions to prevent accumulation of charges in the surface layer after image exposure and also to further effectively prevent the occurrence of problems relative to image flow and residual voltage.

That is, in the case of the conventional light receiving member, the accumulation of charges often occurs in the surface layer after image exposure and the charges accumulated move horizontally near the interface between the surface layer and the photoconductive layer to thereby invite the occurrence of image flow on the resultant image. However, according to the light receiving member having of this invention which has such surface layer containing dopants, either p-type or n-type, charges which are moving into the surface layer after image exposure are mobilized to the free surface of the surface layer so that the occurrence of the problems relative to image flow and also to residual voltage which is often found on the conventional light receiving member can be effectively prevented.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1(A) through FIG. 1(I) are schematic views illustrating the typical layer constitution of a representative light receiving member according to this invention;

FIG. 1(A') through FIG. 1(I') are schematic views illustrating modifications of the light receiving members shown in FIG. 1(A) through FIG. 1(I).

FIG. 2 is a schematic explanatory view of a glow discharging fabrication apparatus for preparing the light receiving member of this invention; and

FIG. 3 and FIG. 4 are schematic fragmentary sectional views of a substrate which can be used in the light receiving member of this invention.

DETAILED DESCRIPTION OF THE INVENTION

Representative embodiments of the light receiving member according to this invention will now be explained more specifically referring to the drawings. The description is not intended to limit the scope of this invention.

Representative light receiving members for use in electrophotography according to this invention are as shown in FIG. 1(A) through FIG. 1(I) and also in FIG. 1(A') through FIG. 1(I'), in which are shown substrate 101, photoconductive layer 102, surface layer 103, charge injection inhibition layer 104, long wavelength light absorptive layer (hereinafter referred to as "IR absorptive layer") 105, contact layer 106, free surface 107, intermediate layer 108, lower constituent layer of the surface layer (hereinafter referred to as "lower layer") 103' and upper constituent layer of the surface layer (hereinafter referred to as "upper layer") 103".

FIG. 1(A) and FIG. 1(A') are schematic views illustrating typical representative layer constitutions of this invention, which are shown: (1) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(A)]; and (2) a modification of the light receiving member (1) of which surface layer 103 being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(A')].

FIG. 1(B) and FIG. 1(B') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (3) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the charge injection inhibition layer 104, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(B)]; and (4) a modification of the light receiving member (3) of which surface layer 103 being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(B')].

FIG. 1(C) and FIG. 1(C') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (5) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the IR absorptive layer 105, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(C)]; and (6) a modification of the light receiving member (5) of which surface layer 103 being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(C')].

FIG. 1(D) and 1(D') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (7) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the contact layer 106, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(D)]; and (8) a modification of the light receiving member (7) of which surface layer being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(D')].

FIG. 1(E) and FIG. 1(E') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (9) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the charge injection inhibition layer 104, the contact layer 106, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(E)]; and (10) a modification of the light receiving member (9) of which surface layer being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(E')].

FIG. 1(F) and FIG. 1(F') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (11) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the IR absorptive layer 105, the contact layer 106, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(F)]; and (12) a modification of the light receiving member (11) of which surface layer being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(F')].

FIG. 1(G) and FIG. 1(G') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (13) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the IR absorptive layer 105, the charge injection inhibition layer 104, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(G)]; and (14) a modification of the light receiving member (13) of which surface layer 103 being lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(G')].

FIG. 1(H) and FIG. 1(H') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (15) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the IR absorptive layer 105, the charge injection inhibition layer 104, the contact layer 106, the photoconductive layer 102 and the surface layer 103 having the free surface 107 [FIG. 1(H)]; and (16) a modification of the light receiving member (15) of which surface layer 103 being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(H')].

FIG. 1(I) and FIG. 1(I') are schematic views illustrating another representative layer constitutions of this invention, which are shown: (17) the light receiving member comprising the substrate 101 and the light receiving layer constituted by the charge injection inhibition layer 104, the photoconducting layer 102, the intermediate layer 108 and the surface layer 103 having the free surface 107 [FIG. 1(I)]; and (18) a modification of the light receiving member (17) of which surface layer 103 being constituted by lower layer 103' and upper layer 103" having the free surface 107 [FIG. 1(I')].

SUBSTRATE 101

The substrate 101 for use in this invention may either be electroconductive or insulative. The electroconductive substrate can include, for example, metals such as NiCr, stainless steels, Al, Cr, Mo, Au, Nb, Ta, V, Ti Pt and Pb or the alloys thereof.

The electrically insulative substrate can include, for example, films or sheets of synthetic resins such as polyester, polyethylene, polycarbonate, cellulose acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, and polyamide, glass, ceramic and paper. It is preferred that the electrically insulative substrate is applied with electroconductive treatment to at least one of the surfaces thereof and disposed with a light receiving layer on the thus treated surface.

In the case of glass, for instance, electroconductivity is applied by disposing, at the surface thereof, a thin film made of NiCr, Al, Cr,, Mo, Au, Ir, Nb, Ta, V, Ti, Pt, Pd, In₂ O₃, SnO₂, ITO (In₂ O₃ +SnO₂), etc. In the case of the synthetic resin film such as a polyester film, the electroconductivity is provided to the surface by disposing a thin film of metal such as NiCr, Al, Ag, Pv, Zn, Ni, Au, Cr, Mo, Ir, Nb, Ta, V, Tl and Pt by means of vaccum deposition, electron beam vapor deposition, sputtering, etc., or applying lamination with the metal to the surface. The substrate may be of any configuration such as cylindrical belt-like or plate-like shape, which can be properly determined depending on the application uses.

The thickness of the substrate is properly determined so that the light receiving member as desired can be formed.

In the case where flexibility is required for the light receiving member, it can be made as thin as possible within a range capable of sufficiently providing the function as the substrate. However, the thickness is usually greater than 10 μm in view of the fabrication and handling or mechanical strength of the substrate.

And, it is possible for the surface of the substrate to be uneven in order to eliminate occurrence of defective images caused by a so-called interference fringe pattern being apt to appear in the formed images in the case where the image making process is conducted using coherent monochromatic light such as laser beams.

CHARGE INJECTION INHIBITION LAYER 104

The charge injection inhibition layer is to dispose under the photoconductive layer 102.

The charge injection inhibition layer in the light receiving member is constituted with an A--Si(H,X) material containing group III element as a p-type dopant or group V element as an n-type dopant [hereinafter referred to as "A--Si(III,V):(H,X)"], a poly-Si(H,X) material containing group III element or group V element [hereinafter referred to as "poly-Si(III,V):(H,X)"] or a non-monocrystalline material containing the above two materials [hereinafter referred to as "Non-Si(III,V):(H,X)"].

The charge injection inhibition layer in the light receiving member of this invention functons to maintain an electric charge at the time when the light receiving member is engaged in electrification process and also to contribute to improving the photoelectrographic characteristics of the light receiving member.

In view of the above, to incorporate either the group III element or the group V element into the charge injection inhibition layer is an important factor to efficiently exhibit the foregoing functions.

Specifically, the group III element can include B (boron), Al (aluminum), Ga (gallium), In (indium) and Tl (thallium). The group V element can include, for example, P (phosphor), As (arsenic), Sb (antimony) and Bi (bismuth). Among these elements, B, Ga, P and As are particularly preferred.

And the amount of either the group III element or the group V element to be incorporated into the charge injection inhibition layer is preferably 3 to 5×10⁴ atomic ppm, more preferably 50 to 1×10⁴ atomic ppm, and most preferably 1×10² to 5×10³ atomic ppm.

As for the hydrogen atoms(H) and the halogen atoms(X) to be incorporated into the charge injection inhibition layer, the amount of the hydrogen atoms(H), the amount of the halogen atoms(X) or the sum of the amounts of the hydrogen atoms and the halogen atoms(H+X) is preferably 1×10³ to 7×10⁵ atomic ppm, and most preferably, 1×10³ to 2×10⁵ atomic ppm in the case where the charge injection inhibition layer is constituted with a poly-Si(III,V):(H,X) material and 1×10⁴ to 6×10⁵ atomic ppm in the case where the charge injection inhibition layer is constituted with an A--Si(III,V):(H,X) material.

Further, it is possible to incorporate at least one kind atoms selected from oxygen atoms, nitrogen atoms and carbon atoms into the charge injection inhibition layer aiming at improving the bondability of the charge injection inhibition layer not only with the substrate but also with other layer such as the photoconductive layer and also improving the matching of an optical band gap(Egopt).

In this respect, the amount of at least one kind atoms selected from oxygen atoms, nitrogen atoms and carbon atoms to be incorporated into the charge injection inhibition layer is preferably 1×10⁻³ to 50 atomic %, more preferably 2×10⁻³ to 40 atomic %, and most preferably 3×10⁻³ 30 atomic %.

The thickness of the charge injection inhibition layer in the light receiving member is an important factor also in order to make the layer to efficiently exhibit its functions.

In view of the above, the thickness of the charge injection inhibition layer is preferably 0.03 to 15 μm, more preferably 0.04 to 10 μm, and most preferably 0.05 to 8 μm.

IR ABSORPTIVE LAYER 105

The IR absorptive layer 105 in the light receiving member of this invention is to dispose under the photoconductive layer 102 or the charge injection inhibition layer 104.

The IR absorptive layer in the light receiving member of this invention functions to effectively absorb the long wavelength light remained unabsorbed in the photoconductive layer to thereby prevent the appearance of interference phenomena due to reflection of long wavelength light at the substrate surface.

The IR absorptive layer 105 is constituted with an A--Si(H,X) material containing germanium atoms(Ge) or/and tin atoms(Sn) [hereinafter referred to as "A--si(Ge,Sn) (H,X)"], a poly--Si(H,X) material containing germanium atoms (Ge) or/and tin atoms(Sn) [hereinafter referred to as "poly--Si(Ge,Sn) (H,X)"]or a non-monocrystalline material containing at least one of the above two materials [hereinafter referred to as "Non--Si(Ge,Sn) (H,X)"].

As for the germanium atoms(Ge) and the tin atoms(Sn) to be incorporated into the IR absorptive layer, the amount of the germanium atoms(Ge), the amount of the tin atoms(Sn) or the sum of the amounts of the germanium atoms and the tin atoms(Ge+Sn) is preferably 1 to 1×10⁶ atomic ppm, more preferably 1×10² to 9×10⁵ atomic ppm, and most preferably, 5×10² to 8×10⁵ atomic ppm.

As for the hydrogen atoms(H) and the halogen atoms(X) to be incorporated into the IR absorptive layer, the amount of the hydrogen atoms(H), the amount of the halogen atoms(X) or the sum of the amounts of the hydrogen atoms and the halogen atoms(H+X) is preferably 1×10³ to 3×10⁵ atomic ppm, and most preferably, 1×10³ to 2×10⁵ atomic ppm in the case where it is constituted with a poly--Si(Ge,Sn) (H,X) material and 1×10⁴ to 6×10⁵ atomic ppm in the case where it is constituted with an A--Si(Ge,Sn) (H,X) material.

And, the thickness of the IR absorptive layer 105 is preferably 0.05 to 25 μm, more preferably 0.07 to 20 μm, and most preferably 0.1 to 15 μm.

CONTACT LAYER 106

The contact layer 106 in the light receiving member of this invention is to dispose under the photoconductive layer.

The main object of disposing the contact layer in the light receiving member of this invention is to enhance the bondability between the substrate and the photoconductive layer, between the charge injection inhibition layer and the photoconductive layer or between the IR absorptive layer and the photoconductive layer.

The contact layer 106 is constituted with an A--Si(H,X) material containing at least one kind atom selected from oxygen atom, carbon atom and nitrogen atom [hereinafter referred to as "A--Si(O,C,N) (H,X)"], a poly--Si(H,X) material containing at least one kind atom selected from oxygen atom, carbon atom and nitrogen atom [hereinafter referred to as "poly--Si(O,C,N) (H,X)"] or a Non--Si(H,X) material containing at least one kind atom selected from oxygen atom, carbon atom and nitrogen atom [hereinafter referred to as "Non--Si(O,C,N) (H,X)"].

In the light receiving member of this invention, the amount of nitrogen atoms, oxygen atoms, or carbon atoms to be incorporated in the contact layer is properly determined according to the use purposes.

However, the amount of one or more kind atoms of them to be contained in the contact layer is preferrably 1×10² to 9×10⁵ atomic ppm and more preferrably 1×10² tp 4×10⁵ atomic ppm.

As for the hydrogen atoms(H) and the halogen atoms(X) to be contained in the contact layer, the amount of the hydrogen atoms(H), the amount of the halogen atoms(X) or the sum of the amounts of the hydrogen atoms and the halogen atoms(H+X) is preferably 10 to 7×10⁵ atomic ppm, and most preferably, 10 to 2×10⁵ atomic ppm in the case where it is constituted with a poly--Si(O,C,N) (H,X) material, and 1×10³ to 7×10⁵ atomic ppm in the case where it is constituted with an A--Si(O,C,N) (H,X) material.

And the thickness of the contact layer 106 is preferably 20 Å to 5 μm, more preferably 50 Å to 3 μm, and most preferably, 100 Å to 1 μm.

By the way, in the light receiving member of this invention, it is possible to selectively combine the foregoing charge injection inhibition layer 104, IR absorptive layer 105 and contact layer 106.

Representative embodiments in that case are shown in FIG. 1(E) to 1(H) and FIGS. 1(E') to 1(H').

Further, in the light receiving member of this invention, it is possible to make the foregoing charge injection inhibition layer 104 or IR absorptive layer to be such that can function not only as that layer but also as the contact layer.

In that case, the object can be attained by incorporating at least one kind atom selected from oxygen atom, carbon atom and nitrogen atom into the corresponding layer.

Further in addition, it is also possible to make either the foregoing IR absorptive layer 105 or the foregoing charge injection inhibition layer to be such that can exhibit the functions of the two layers by incorporating the group III element or the group V element into the foregoing IR absorptive layer or by incorporating germanium atom or tin atom into the foregoing charge injection inhibition layer.

Now, for the formation of each of the above mentioned constitutent layers, that is, charge injection inhibition layer 104, IR absorptive layer 105 and contact layer 106 of the light receiving member of this invention, any of the known film forming processes such as thermal induced chemical vapor deposition process, plasma chemical vapor deposition process, reactive sputtering process and light induced chemical vapor deposition process can be selectively employed. And among these processes, the plasma chemical vapor deposition process is the most appropriate.

For instance, in the case of forming such layer constituted with a poly--Si(H,X) series material by means of plasma chemical vapor deposition (commonly abbreviated to "plasma CVD"), the layer forming operation is practiced while maintaining the substrate at a temperature from 400° to 450° C. in a deposition chamber.

In an alternative process, firstly, an amorphous-like film is formed on the substrate being maintained at about 250° C. in a deposition chamber by means of plasma CVD, and secondly the resultant film is annealed by heating the substrate at a temperature of 400° to 450° C. for about 20 minutes or by irradiating laser beam onto the substrate for about 20 minutes to thereby form said layer.

PHOTOCONDUCTIVE LAYER 102

The photoconductive layer in the light receiving member according to this invention is constituted with an A--Si(H,X) material or a germanium(Ge) or tin(Sn) containing A--Si(H,X) material [hereinafter referred to as "A--Si(Ge,Sn) (H,X)"]. The photoconductive layer 102 may contain the group III element or the group V element respectively having a relevant function to control the conductivity of the photoconductive layer, whereby the photosensitivity of the layer can be improved.

As the group III element or the group V element to be incorporated in the photoconductive layer 102, it is possible to use the same element as incorporated into the charge injection inhibition layer 104. It is also possible to use such element having an opposite polarity to that of the element to be incorporated into the charge injection inhibition layer. And, in the case where the element having the same polarity as that of the element to be incorporated into the charge injection inhibition layer is incorporated into the photoconductive layer 102, the amount may be lesser than that to be incorporated into the charge injection inhibition layer.

Specifically, the group III element can include B (boron), Al (aluminum), Ga (gallium), In (indium) and Ti (thallium), B and Ga being particularly preferred. The group V element can include, for example, P (phosphor), As (arsenic), Sb (antimony) and Bi (bismuth), P and Sb being particularly preferred.

The amount of the group III element or the group V element to be incorporated in the photoconductive layer 102 is preferably 1×10⁻³ to 1×10³ atomic ppm, more preferably, 5×10⁻² to 5×10² atomic ppm, and most preferably, 1×10⁻¹ to 2×10² atomic ppm.

The halogen atoms(X) to be incorporated in the layer in case where necessary can include fluorine, chlorine, bromine and iodine. And among these halogen atoms, fluorine and chlorine are particularly preferred. The amount of the hydrogen atoms(H), the amount of the halogen atoms(X) or the sum of the amounts for the hydrogen atoms and the haogen atoms(H+X) to be incorporate in the photoconductive layer is preferably 1 to 4×10 atomic %, more preferably, 5 to 3×10 atomic %.

Further, in order to improve the quality of the photoconductor layer and to increase it dark resistance, at least one kind atom selected from oxygen atom, carbon atom and nitrogen atom can be incorporated in the photoconductive layer. The amount of these atoms to be incorporated in the photoconductive layer is preferably 1×10⁻³ to 50 atomic ppm, more preferably 2×10⁻³ to 40 atomic ppm, and, most preferably, 3×10⁻³ to 30 atomic ppm.

The sensitivity of the photoconductive layer 102 in the light receiving member of this invention against long wavelength light such as laser beam can be further improved by incorporating germanium atom(Ge) or/and tin atom(Sn) thereinto.

The amount of the germanium atom or/and the tin atoms in that case is preferred to be in the range of 1 to 9.5×10⁵ atomic ppm.

The thickness of the photoconductive layer 102 is an important factor in order to effectively attain the object of this invention. The thickness of the photoconductive layer is, therefore, necessary to be carefully determined having due regards so that the resulting light receiving member becomes accompanied with desitred characteristics.

In view of the above, the thickness of the photoconductive layer 102 is preferably 3 to 100 μm, more preferably 5 to 80 μm, and most preferably 7 to 50 μm.

SURFACE LAYER 103

The surface layer 103 in the light receiving member of this invention has a free surface 107 and is disposed on the foregoing photoconductive layer 102.

And, the surface layer 103 in the light receiving member of this invention serves not only to improve various characteristics commonly required for a light receiving member such as the humidity resistance, deterioration resistance upon repeating use, breakdown voltage resistance, use-environmental characteristics and durability of the light receiving member but also to effectively prevent electric charges from being injected into the photoconductive layer 102 from the side of fthe free surface 107 at the time when the light receiving layer is engaged in the charging process.

The surface layer 103 in the light receiving member of this invention is formed of: (1) a non-monocrystalline material or a polycrystalline material respectively containing tetrahedrally bonded boron nitride [the former will be hereinafter referred to as "Non--BN" or "A--BN" and the latter will be hereinafter referred to as "poly--BN"] or (2) a Non--BN material containing trihedrally bonded boron nitride and tetrahedrally bonded boron nitride in mingled state, or (3) is constituted with a lower constituent layer 103' formed of a Non-BN material containing tetrahdedrally bonded boron nitride and an upper constituent layer 103" containing trihedrally bonded boron nitride and tetrahedrally bonded boron nitride in mingled state.

The surface layer 103 in the light receiving member of this invention may contain hydrogen atom(H) or/and halogen atom(X) [hereinafter referred to as "A--BN(H, X)", "poly-BN(H,X)" or "Non--BN(H,X)"].

The surface layer 103 in the light receiving member of this invention may contain dopants, either p-type or n-type. In this case, the surface layer further effectively serves to mobilize charges which are moving thereinto after the image exposure to its free surface to thereby prevent the occurrence of the problems relative to image flow and also to residual voltage which is often found on the conventional light receiving member.

The p-type dopant can include germanium atom(Ge), zinc atom(Zn) and a mixture of them (Ge+Zn). And, the n-type dopant can include silicon atom (Si), tin atom (Sn) or a mixture of them (Si+Sn).

The amount of such dopant to be contained in the surface layer 103 is preferably less than 1×10³ atomic ppm, more preferably less than 7×10² atomic ppm, and most preferably 5×10² atomic ppm.

Now, the foregoing Non--BN(H,X) of which the surface layer 103 is formed can be expressed by th formula: [Bx(N_(1-x))]_(1-y) :(H,X)_(y) and the ratios of the layer constituents are desired to satisfy the following conditions:

(i) In the case of where the surface layer is formed of said Non--BN series material containing tetrahedrally bonded boron nitride; with respect to x;

preferably, 0.25≦x≦0.75, more preferably, 0.3≦x≦0.7, and most preferably, 0.4≦x≦0.6, and with respect to y;

preferably, 0.004≦y≦0.4, more preferably 0.005≦y≦0.3 and most preferably 0.01≦y≦0.2.

(ii) In the case where the surface layer is formed of said Non--BN series material containing trihedrally bonded boron nitride and tetrahedrally bonded boron nitride in mingled state; with respect to x;

preferably, 0.1≦x≦0.9, more preferably, 0.2≦x≦0.8, and most preferably, 0.3≦x≦0.7, and

with respect to y;

preferably 0.004≦y≦0.4, more preferably 0.005≦y≦0.3, and most preferably, 0.01≦y≦0.2.

The thickness of the surface layer 103 in the light receiving member of this invention is appropriately determined depending upon the desired purpose.

It is, however, also necessary that the thickness be determined in view of relative and organic relationship in accordance with the amounts of the constituent atoms to be contained in the layer or the characteristics required in the relationship with the thickness of other layer. Further, it should be determined also in economical viewpoints such as productivity or mass productivity.

In view of the above, the thickness of the surface layer 103 is preferably 3×10⁻³ to 30 μm, more preferably, 4×10⁻³ to 20 μm, and, most preferably, 5×10⁻³ to 10 μm.

INTERMEDIATE LAYER 108

The intermediate layer 108 in the light receiving member of this invention is to dispose between the photoconductive layer 102 and the surface layer 103 and it principally serves to improve breakdown voltage resistance of the light receiving layer.

The intermediate layer 108 is formed of either an A--Si(H,X) material or a poly-Si(H,X) material respectively containing carbon atom in an amount of preferably 20 to 90 atomic %, more preferably 30 to 85 atomic %, and most preferably, 40 to 80 atomic %.

As for the hydrogen atom(H) and halogen atom(X) to be optionally contained in the intermediate layer, the amount of hydrogen atoms or halogen atoms, or the sum of the amount of hydrogen atoms and the amount of halogen atoms is preferably 1 to 7×10 atomic %, more preferably 2 to 65 atomic %, and most preferably, 5 to 60 atomic %.

The thickness of the intermediate layer 108 is preferably 3×10⁻² to 30 μm, more preferably 4×10⁻² to 20 μm, and most preferably, 5×10⁻² to 10 μm.

FORMATION OF LAYERS

The method of forming the light receiving layer of the light receiving member will be now explained.

Each layer to constitute the light receiving layer of the light receiving member of this invention can be properly prepared by vacuum deposition method utilizing the discharge phenomena such as glow discharging, reactive sputtering and ion plating processes wherein relevant raw material gases are selectively used.

These production methods are properly used selectively depending on the factors such as the manufacturing conditions, the installation cost required, production scale and properties required for the light receiving members to be prepared. The glow discharging method or sputtering method is suitable since the control for the condition upon preparing the light receiving members having desired properties are relatively easy, and hydrogen atoms, halogen atoms and other atoms can be introduced easily together with silicon atoms. The glow discharging method and the sputtering method may be used together in one identical system.

FORMATION OF SURFACE LAYER

Basically when a surface layer composed of Non--BH(H,X) is formed by the glow discharging process, a feed gas capable of supplying boron atoms(B), a feed gas capable of supplying nitrogen atoms(N) and an inert gas are introduced, if necessary, together with a feed gas for introducing hydrogen atoms(H) or/and a feed gas for introducing halogen atoms(X) into a deposition chamber the inner pressure of which can be reduced properly, glow discharge is generated in the deposition chamber, and a layer composed of Non--BN (H,X) to be the surface layer is formed on a substrate placed in the deposition chamber.

And in order to form a surface layer composed of a Non--BN(H,X) material containing dopants by the glow discharging process, basically, a feed gas to liberate boron atoms(B), a feed gas to liberate nitrogen atoms(N), either a feed gas to liberate silicon atoms(Si) or/and tin atoms (Sn) or a feed gas to liberate germanium atoms(Ge) or/and zinc atoms(Zn), and an inert gas are introduced, if necessary, together with a feed gas to liberate hydrogen atoms(H) or/and a feed gas to liberate halogen atoms(H) into a deposition chamber the inner pressure of which can be reduced properly, glow discharge is generated in the deposition chamber, and a layer composed of a Non--Bn(H,X) material containing dopants to be the surface layer is formed on a substrate placed in the deposition chamber.

The raw material for supplying B can include gaseous or gasifiable compounds such as B₂ H₆, B₄ H₁₀, B₅ H₉, B₅ H₁₁, B₆ H₁₂, BF₃ and Bcl₃.

The raw material for supplying N can include gaseous or gasifiable compounds such as N₂, NH₃, NF₂ Cl, NFCl₂, NCl₃, N₂ F₂, N₂ F₄, NH₂ Cl, NHF₂ and NH₂ F.

The raw material for supplying Si can include gaseous or gasifiable compounds such as SiH₄, Si₂ H₆, Si₃ H₈, Si₄ H₁₀, SiF₄ and Sicl₄.

The raw material for supplying Sn can include gaseous or gasifiable compounds such as SnH₄, SnF₄ and SnCl₄.

The raw material for supplying Ge can include gaseous or gasificable germanium compounds such as GeH₄, Ge₂ H₆ and GeF₄.

The raw material for supplying Zn can include gaseous or gasifiable zinc compounds such as Zn(CH₃)₂.

The raw material for supplying halogen atoms can include halogen gases such as F₂, Cl₂, I₂, Br₂ and FCl.

The raw material for supplying hydrogen atoms can include gaseous or gasifiable compounds such as HF, HCl, HBr, HI, B₂ H₆, B₄ H₁₀, NH₃, SiH₄, Si₂ H₆, SnH₄, GeH₄ and Ge₂ H₆.

In the case of forming a layer composed of a Non--BN (H,X) material containing tetrahedrally bonded boron nitride by the sputtering process, basically, a BN target is subjected to sputtering with gas plasmas in a gas atmosphere containing a raw material gas for supplying B which is diluted with an inert gas such as Ar gas in an appropriate sputtering deposition chamber the inner pressure of which can be reduced properly to thereby form said layer on a substrate placed in said chamber.

Further, the formation of a layer composed of a dopant containing Non--BN(H,X) material containing tetrahedrally bonded boron nitride may be practiced by using a BN target and by introducing a raw material gas for supplying Si or/and Sn or raw material gas for supplying Ge or/and Zn together with an inert gas such as Ar gas into the above sputtering deposition chamber to form plasma atmosphere and sputtering said BN target with the gas plasmas.

In the above case, it is possible to use a Zn target or a Ge target and to introduce a raw material gas for supplying B and a raw material gas for supplying N together with an inert gas such as Ar gas into the above sputtering deposition chamber.

The formation of a layer composed of a Non--BN(H,X) containing tetrahdedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state by the sputtering process may be practiced by using a BN target and by introducing a raw material gas for supplying N together with an inert gas such as He gas into the foregoing sputtering deposition chamber to form plasma atmosphere and sputtering said BN target. In this case, it is possible to form said layer by using a B target and by introducing a large amount of a raw material gas for supplying N together with said inert gas to form plasma atmosphere and sputtering said B target with gas plasmas.

The formation of a layer composed of a dopant containing Non--BN(H,X) containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state may be practiced by using a BN target and by introducing a raw material gas for supplying N and a raw material gas for supplying dopants together with an inert gas such as He gas into the foregoing sputtering deposition chamber to form plasma atmosphere and sputtering said BN target with gas plasmas. In this case, it is possible to form said layer by using a B target and introducing a large amount of a raw material gas for supplying N and a raw material gas for supplying dopants together with said inert gas into the foregoing sputtering deposition chamber to form plasma atmosphere and sputtering said B target with gas plasmas.

The conditions upon forming the surface layer 103 in the light receiving member of this invention, for example, the temperature of the substrate, the gas pressure in the deposition chamber and the electric discharging power are important factors for obtaining an objective surface layer having desired properties and they are properly selected while considering the functions of the layer to be formed. Further, since these layer forming conditions may be varied depending on the kind and the amount of each of the atoms contained in the layer, the conditions have to be determined also taking the kind or the amount of the atoms to be contained into consideration.

Specifically, in the case of forming a layer composed of a Non--BN(H,X) material containing tetrahedrally bonded boron nitride by plasma CVD method using high frequency of 13.56 MHz, the gas pressure in the deposition chamber is preferably 10⁻² to 10 Torr, more preferably 5×10⁻² to 2 Torr, and most preferably, 1×10⁻¹ to 1 Torr. The temperature of the substrate is preferably 50° to 700° C., and more preferably, 50° to 400° C. in the case of forming a layer composed of a Non--BN(H,X) series material, and 200° to 700° C. in the case of forming a layer compoed of a poly--BN(H,X) series material.

As for the electrical discharging power, it is preferably 0.01 to 5W/cm², and most preferably, 0.02 to 2W/cm².

Further, as for the flow ratios relative to the raw material gas for supplying b, the raw material gas for supplying N and Ar gas, the flow ratio B/N is controlled to be preferably 1/5 to 100/1, and most preferably 1/4 to 80/1, and at the same time, the flow ratio Ar/B+N is controlled to be preferably 1/10 to 100/1 and most preferably 1/7 to 80/1.

And in the case of forming the above mentioned layer by plasma CVD method using microwave of 2.45 GHz, the gas pressure in the deposition chamber is preferably 1×10⁻⁴ to 2 Torr, more preferably 5×10⁻⁴ to 1.0 Torr, and most preferably, 5×10⁻⁴ to 0.7 Torr. The electrical discharging power is preferably 0.1 to 50 W/cm², and most preferably, 0.2 to 30 W/cm².

In this case, the temperature of the substrate and the flow ratios of the gases used are the same as those in the foregoing case using high frequency.

In the case of forming a layer composed of a Non--BN (H,X) material containing tetrahedrally bonded boron nitride by the sputtering process, the gas pressure in the deposition chamber is preferably 1×10⁻⁴ to 1.0 Torr, and most preferably, 5×10⁻⁴ to 0.7 Torr. The electrical charging power is preferably 0.01 to 10 W/cm², and most preferably, 0.05 to 8 W/cm².

In this case, the temperature of the substrate and the flow ratios of the gases used are the same as those in the foregoing case by plasma CVD method using high frequency.

In the case of forming a layer composed of a Non--BN (H,X) material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state by plasma CVD method using high frequency of 13.56 MHz, the gas pressure in the deposition chamber is preferably 1×10⁻² to 10 Torr, more preferably 5×10⁻² to 2 Torr, and most preferably, 0.1 to 1 Torr. The temperature of the substrate is preferably 50° to 700° C., and more preferably, 50° to 400° C. in the case of forming a layer composed of a Non--BN(H,X) material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state, and 200° to 700° C. in the case of forming a layer composed of a poly--BN(H,X) containing the above two kinds of boron nitride in mingled state. As for the electrical discharging power, it is preferably 0.05 to 5 W/cm², and most preferably, 0.02 to 2 W/cm². Further, as for the flow ratios relative to the raw material gas for supplying B, the raw material gas for supplying N and He gas, the ratio B/N is controlled to be preferably 1/100 to 5/1, and most preferably, 1/80 to 4/1, and at the same time, the flow ratio He/B+N is controlled to be 1/10 to 0.

In the case of forming a layer composed of a Non--BN (H,X) material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state by plasma CVD method using microwave of 2.45 GHz, the gas pressure in the deposition chamber is preferably 1×10⁻⁴ to 2 Torr, more preferably 5×10⁻⁴ to 1.0 Torr, and most preferably, 5×10⁻⁴ to 0.7 Torr. The electrical discharging power is preferably 0.1 to 50 W/cm², and most preferably 0.2 to 30 W/cm². And, in this case, the temperature of the substrate and the flow ratios of the gases used are the same as those in the foregoing case using high frequency.

In addition, in the case of forming a layer composed of a Non--BN(H,X) material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state by the sputtering process, the gas pressure in the deposition chamber is preferably 1×10⁻⁴ to 1.0 Torr, and most preferably, 5×10⁻⁴ to 0.7 Torr. As for the electrical discharging power, it is preferably 0.01 to 10 W/cm² and most preferably, 0.05 to 8 W/cm². In this case, the temperature of the substrate and the flow ratios of the gases used are the same as those in the case by plasma CVD method using high frequency.

FORMATION OF OTHER LAYERS

Basically, when a layer constituted with a--Si(H,X) is formed, for example, by the glow discharging process, gaseous starting material capable of supplying silicon atoms(Si) is introduced together with gaseous starting material for introducing hydrogen atoms(H) and/or halogen atoms(X) into a deposition chamber the inside pressure of which can be reduced, glow discharge is generated in the deposition chamber, and a layer composed of a--Si(H,X) is formed on the surface of a predetermined substrate disposed previously at a predetermined position.

The gaseous starting material for supplying Si can include gaseous or gasifiable silicon hydrides (silanes) such as SiH₄, Si₂ H₆, Si₄ H₁₀, etc., SiH₄ and Si₂ H₆ being particularly preferred in view of the easy layer forming work and the good efficiency for the supply of Si.

Further, various halogen compounds can be mentioned as the gaseous starting material for introducing the halogen atoms and gaseous or gasifiable halogen compounds, for example, gaseous halogen, halides, inter-halogen compunds and halogen-substituted silane derivatives are preferred. Specifically, they can include halogen gas such as of fluorine, chlorine, bromine, and iodine; inter-halogen compounds such as BrF, ClF, ClF₃, BrF₂, BrF₃, IF₇, IC1, IBr, etc.; and silicon halides such as SiF₄, Si₂ H₆, SiC₄, and SiBr₄. The use of the gaseous or gasifiable silicon halide as described above is particularly advantageous since the layer constituted with halogen atom-containing a--Si can be formed with no additional use of the gaseous starting material for supplying Si.

The gaseous starting material usable for supplying hydrogen atoms can include those gaseous or gasifiable materials, for example, hydrogen gas halides such as HF, HCl, HBr, and HI, silicon hydrides such as SiH₄, Si₂ H₆, Si₃ H₈, and Si₄ O₁₀, or halogen-substituted silicon hydrides such as SiH₂ F₂, SiH₂ I₂, SiH₂ Cl₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃. The use of these gaseous starting material is advantageous since the content of the hydrogen atoms(H), which are extremely effective in view of the control for the electrical or photoelectronic properties, can be controlled with ease. Then, the use of the hydrogen halide or the halogen-substituted silicon hydride as described above is particularly advantageous since the hydrogen atoms(H) are also introduced together with the introduction of the halogen atoms.

In the case of forming a layer comprising a--Si(H,X) by means of the reactive sputtering process or ion plating process, for example, by the sputtering process, the halogen atoms are introduced by introducing gaseous halogen compounds or halogen atom-containing silicon compounds into a deposition chamber thereby forming a plasma atmosphere with the gas.

Further, in the case of introducing the hydrogen atoms, the gaseous starting material for introducing the hydrogen atoms, for example, H₂ or gaseous silanes are described above are introduced into the sputtering deposition chamber thereby forming a plasma atmosphere with the gas.

For instance, in the case of the reactive sputtering process, a layer comprising a--Si(H,X) is formed on the support by using an Si target and by introducing a halogen atom-introducing gas and H₂ together with an inert gas such as He or Ar as required into a deposition chamber thereby forming a plasma atmosphere and then sputtering the Si target.

To form the layer of a--SiGe(H,X) by the glow discharge process, a feed gas to liberate silicon atoms(Si), a feed gas to liberate germanium atoms, and a feed gas to liberate hydrogen atoms(H) and/or halogen atoms(X) are introduced into an evacuatable deposition chamber, in which the glow discharge is generated so that a layer of a--SiGe(H,X) is formed on the properly positioned support.

The feed gases to supply silicon atoms, halogen atoms, and hydrogen atoms are the same as those used to form the layer of a--Si(H,X) mentioned above.

The feed gas to liberate Ge includes gaseous or gasifiable germanium halides such as GeH₄, Ge₂ H₆, Ge₃ H₈, Ge₄ H₁₀, Ge₅ H₁₂, Ge₆ H₁₄, Ge₇ H₁₆, Ge₈ H₁₈, and Ge₉ H₂₀, with GeH₄, Ge₂ H₆, and Ge₃ H₈, being preferable on account of their ease of handling and the effective liberation of germanium atoms.

To form the layer of a--SiGe(H,X) by the sputtering process, two targets (a silicon target and a germanium target) or a single target composed of silicon and germanium is subjected to sputtering in a desired gas atmosphere.

To form the layer of a--SiGe(H,X) by the ion-plating process, the vapors of silicon and germanium are allowed to pass through a desired gas plasma atmosphere. The silicon vapor is produced by heating polycrystal silicon or single crystal silicon held in a boat, and the germanium vapor is produced by heating polycrystal germanium or single crystal germanium held in a boat. The heating is accomplished by resistance heating or electron beam method (E.B. method).

In either case where the sputtering process or the ion-plating process is employed, the layer may be incorporated with halogen atoms by introducing one of the above-mentioned gaseous halides or halogen-containing silicon compounds into the deposition chamber in which a plasma atmosphere of the gas is produced. In the case where the layer is incorporated with hydrogen atoms, a feed gas to liberate hydrogen is introduced into the deposition chamber in which a plasma atmosphere of the gas is produced. The feed gas may be gaseous hydrogen, silanes, and/or germanium hydrides. The feed gas to liberate halogen atoms includes the above-mentioned halogen-containing silicon compounds. Other examples of the feed gas include hydrogen halides such as HF, HCl, HBr and HI; halogen-substituted silanes such as SiH₂ F₂, SiH₂ I₂, SiH₂ Cl₂, SiHCl₃, SiH₂ Br₂, and SiHBr₃ ; germanium hydride halide such as GeHF₃, GeH₂ F₂, GeH₃ F, GeHCl₃, GeH₂ Cl₂, GeH₃ Cl, GeHBr₃, GeH₂ Br₂, GeH₃ Br, GeHI₃, GeH₂ I₂, and GeH₃ I; and germanium halides such as GeF₄, GeCl₄, GeBr₄, GeI₄, GeF₂, GeCl₂, GeBr₂, and GeI₂. They are in the gaseous form or gasifiable substances.

To form the light receiving layer composed of amorphous silicon containing tin atoms (hereinafter referred to as a--SiSn(H,X)) by the glow-discharge process, sputtering process, or ion-plating process, a starting material (feed gas) to release tin atoms(Sn) is used in place of the starting material to release germanium atoms which is used to form the layer composed of a--SiGe(H,X) as mentioned above. The process is properly controlled so that the layer contains a desired amount of tin atoms.

Examples of the feed gas to release tin atoms(Sn) include tin hydride(SnH₄) and tin halides (such as SnF₂, SnF₄, SnCl₂, SnCl₄, SnBr₂, SnBr₄, SnI₂, and SnI₄) which are in the gaseous form or gasifiable. Tin halides are preferable because they form on the substrate a layer of a--Si containing halogen atoms. Among tin halides, SnCl₄, is particularly preferable because of its ease of handling and its efficient tin supply.

In the case where solid SnCl₄ is used as a starting material to supply tin atoms(Sn), it should preferably be gasified by blowing (bubbling) an inert gas (e.g., Ar and He) into it while heating. The gas thus generated is introduced, at a desired pressure, into the evacuated deposition chamber.

The layer may be formed from an amorphous material a--Si(H,X) or a--Si(Ge,Sn)(H,X) which further contains the group III atoms or group V atoms, nitrogen atoms, oxygen atoms, or carbon atoms, by the glow-discharge process, sputtering process, or ion-plating process. In this case, the above-mentioned starting material for a--Si(H,X) or a--Si(Ge,Sn)(H,X) is used in combination with the starting materials to introduce the group III atoms or group V atoms, nitrogen atoms, oxygen atoms, or carbon atoms. The supply of the starting materials should be properly controlled so that the layer contains a desired amount of the necessary atoms.

If, for example, the layer is to be formed by the glow-discharge process from a--Si(H,X) containing atoms (O,C,N) or from a--Si(Ge,Sn)(H,X) containing atoms (O,C,N), the starting material to form the layer of a--Si(H,X) or a--Si(Ge,Sn)(H,X) should be combined with the starting material used to introduce atoms (O,C,N). The supply of these starting materials should be properly controlled so that the layer contains a desired amount of the necessary atoms.

The starting material to introduce the atoms(O,C,N) may be any gaseous substance or gasifiable substance composed of any of oxygen, carbon, and nitrogen. Examples of the starting materials used to introduce oxygen atoms(O) include oxygen(O₂), ozone(O₃), nitrogen dioxide(NO₂), nitrous oxide(N₂ O), dinitrogen trioxide(N₂ O₃), dinitrogen tetroxide(N₂ O₄), dinitrogen pentoxide(N₂ O₅), and nitrogen trioxide(NO₃). Additional examples include lower siloxanes such as disiloxane(H₃ SiOSiH₃) and trisiloxane(H₃ SiOSiH₂ OSiH₃) which are composed of silicon atoms(Si), oxygen atoms(O), and hydrogen atoms(H). Examples of the starting materials used to introduce carbon atoms include saturated hydrocarbons having 1 to 5 carbon atoms such as methane(CH₄), ethane (C₂ H₆), propane(C₃ H₈), n-butane(n--C₄ H₁₀), and pentane(C₅ H₁₂); ethylenic hydrocarbons having 2 to 5 carbon atoms such as ethylene(C₂ H₄), propylene(C₃ H₆), butene--1(C₄ H₈), butene-2 (C₄ H₈), isobutylene(C₄ H₈), and pentene(C₅ H₁₀); and acetylenic hydrocarbons having 2 to 4 carbon atoms such as acetylene (C₂ H₂), methyl acetylene(C₃ H₄), and butine(C₄ H₆). Examples of the starting materials used to introduce nitrogen atoms include nitrogen(N₂), ammonia(NH₃), hydrazine(H₂ NNH₂), hydrogen azide(HN₃), ammonium azide(NH₄ N₃), nitrogen trifluoride(F₃ N), and nitrogen tetrafluoride(F₄ N).

In the case of using the glow discharging process for forming the layer or layer region containing oxygen atoms, starting material for introducing the oxygen atoms is added to those selected from the starting materials as desired for forming the light receiving layer. As the starting material for introducing the oxygen atoms, most of those gaseous or gasifiable materials can be used that comprise at least oxygen atoms as the constituent atoms.

For instance, it is possible to use a mixture of gaseous starting material comprising silicon atoms(Si) as the constituent atoms, gaseous starting material comprising oxygen atoms(O) as the constituent atom and, as required, gaseous starting material comprising hydrogen atoms(H) and/or halogen atoms(X) as the constituent atoms in a desired mixing ratio, a mixture of gaseous starting material comprising silicon atoms(Si) as the constituent atoms and gaseous starting material comprising oxygen atoms(O) and hydrogen atoms(H) as the constituent atoms in a desired mixing ratio, or a mixture of gaseous starting material comprising silicon atoms(Si) as the constituent atoms and gaseous starting material comprising silicon atoms(Si), oxygen atoms(O) and hydrogen atoms(H) as the constituent atoms.

Further, it is also possible to use a mixture of gaseous starting material comprising silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms and gaseous starting material comprising oxygen atoms (O) as the constituent atoms.

Specifically, there can be mentioned, for example, oxygen (O₂), ozone (O₂), nitrogen monoxide (NO), nitrogen dioxide (NO₂), dinitrogen oxide (N₂ O), dinitrogen trioxide (N₂ O₃), dinitrogen tetraoxide (N₂ O₄), dinitrogen pentoxide (N₂ O₅), nitrogen trioxide (NO₃), lower siloxanes comprising silicon atoms (Si), oxygen atoms (O) and hydrogen atoms (H) as the constituent atoms, for example, disiloxane (H₃ SiOSiH₃) and trisiloxane (H₃ SiOSiH₂ OSiH₃), etc.

In the case of forming the layer or layer region containing oxygen atoms by way of the sputtering process, it may be carried out by sputtering a single crystal or polycrystalline Si wafer or SiO₂ wafer, or a wafer containing Si and SiO₂ in admixture is used as a target and sputtered in various gas atmospheres.

For instance, in the case of using the Si wafer as the target, a gaseous starting material for introducing oxygen atoms and, optionally, hydrogen atoms and/or halogen atoms is diluted as required with a dilution gas, introduced into a sputtering deposition chamber, gas plasmas with these gases are formed and the Si wafter is sputtered.

Alternatively, sputtering may be carried out in the atmosphere of a dilution gas or in a gas atmosphere containing at least hydrogen atoms (H) and/or halogen atoms (X) as constituent atoms as a sputtering gas by using individually Si and SiO₂ targets or a single Si and SiO₂ mixed target. As the gaseous starting material for introducing the oxygen atoms, the gaseous starting material for introducing the oxygen atoms shown in the examples for the glow discharging process as described above can be used as the effective gas also in the sputtering.

The light receiving layer containing carbon atoms, for example, may be formed through the glow discharging process, by using a mixture of gaseous starting material comprising silicon atoms (Si) as the constituent atoms, gaseous starting material comprising carbon atoms (C) as the constituent atoms and, optionally, gaseous starting material comprising hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms in a desired mixing ratio, a mixture of gaseous starting material comprising silicon atoms (Si) as the constituent atoms and gaseous starting material comprising carbon atoms (C) and hydrogen atoms (H) as the constituent atoms also in a desired mixing ratio, a mixture of gaseous starting material comprising silicon atoms (Si) as the constituent atoms and gaseous starting material comprising silicon atoms (Si), carbon atoms (C) and hydrogen atoms (H) as the constituent atoms, or a mixture of gaseous starting material comprising silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms and gaseous starting material comprising carbon atoms (C) as constituent atoms.

Those gaseous starting materials that are effectively usable herein can include gaseous silicon hydrides comprising C and H as the constituent atoms, such as silanes, for example, SiH₄, Si₂ H₆, Si₃ H₈ and Si₄ H₁₀, as well as those comprising C and H as the constituent atoms, for example, saturated hydrocarbons of 1 to 4 carbon atoms, ethylenic hydrocarbons of 2 to 4 carbon atoms and acetylenic hydrocarbons of 2 to 3 carbon atoms.

Specifically, the saturated hydrocarbons can include methane (CH₄), ethane (C₂ H₆), propane (C₃ H₈), n-butane (n--C₄ H₁₀) and pentane (C₅ H₁₂), the ethylenic hydrocarbons can include ethylene (C₂ H₄), propylene (C₃ H₆), butene-1 (C₄ H₈), butene-2 (C₄ H₈), isobutylene (C₄ H₈) and pentene (C₅ H₁₀) and the acetylenic hydrocarbons can include acetylene (C₂ H₂), methylacetylene (C₃ H₄) and butine (C₄ H₆).

The gaseous starting material comprising Si, C and H as the constituent atoms can include silicided alkyls, for example, Si(CH₃)₄ and Si(C₂ H₅)₄. In addition to these gaseous starting materials, H₂ can of course be used as the gaseous starting material for introducing H.

The layer or layer region constituted with a--SiC(H,X) may be formed through the sputtering process by using a single crystal or polycrystalline Si wafer, a C (graphite) wafer or a wafer containing a mixture of Si and C as a target and sputtering them in a desired gas atmosphere.

In the case of using, for example a Si wafer as a target, gaseous starting material for introducing carbon atoms, and hydrogen atoms and/or halogen atoms is introduced while being optionally diluted with a dilution gas such as Ar and He into a sputtering deposition chamber thereby forming gas plasmas with these gases and sputtering the Si wafer.

Alternatively, in the case of using Si and C as individual targets or as a single target comprising Si and C in admixture, gaseous starting material for introducing hydrogen atoms and/or halogen atoms as the sputtering gas is optionally diluted with a dilution gas, introduced into a sputtering deposition chamber thereby forming gas plasmas and sputtering is carried out. As the gaseous starting material for introducing each of the atoms used in the sputtering process, those gaseous starting materials used in the glow discharging process as described above may be used as they are.

In the case of using the glow discharging process for forming the layer or the layer region containing the nitrogen atoms, starting material for introducing nitrogen atoms is added to the material selected as required from the starting materials for forming the light receiving layer as described above. As the starting material for introducing the nitrogen atoms, most of gaseous or gasifiable materials can be used that comprise at least nitrogen atoms as the constituent atoms.

For instance, it is possible to use a mixture of gaseous starting material comprising silicon atoms (Si) as the constituent atoms, gaseous starting material comprising nitrogen atoms (N) as the constituent atoms and, optionally, gaseous starting material comprising hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms mixed in a desired mixing ratio, or a mixture of starting gaseous material comprising silicon atoms (Si) as the constituent atoms and gaseous starting material comprising nitrogen atoms (N) and hydrogen atoms (H) as the constituent atoms also in a desired mixing ratio.

Alternatively, it is also possible to use a mixture of gaseous starting material comprising nitrogen atoms (N) as the constituent atoms gaseous starting material comprising silicon atoms (Si) and hydrogen atoms (H) as the constituent atoms.

The starting material that can be used effectively as the gaseous starting material for introducing the nitrogen atoms (N) used upon forming the layer or layer region containing nitrogen atoms can include gaseous or gasifiable nitrogen, nitrides and nitrogen compounds such as azide compounds comprising N as the constituent atoms or N and H as the constituent atoms, for example, nitrogen (N₂), ammonia (NH₃), hydrazine (H₂ NNH₂), hydrogen azide (HN₃) and ammonium azide (NH₄ N₃). In addition, nitrogen halide compounds such as nitrogen trifluoride (F₃ N) and nitrogen tetrafluoride (F₄ N₂) can also be mentioned in that they can also introduce halogen atoms (X) in addition to the introduction of nitrogen atoms (N).

The layer or layer region containing the nitrogen atoms may be formed through the sputtering process by using a single crystal or polycrystalline Si wafer or Si₃ N₄ wafer or a wafer containing Si and Si₃ N₄ in admixture as a target and sputtering them in various gas atmospheres.

In the case of using a Si wafer as a target, for instance, gaseous starting material for introducing nitrogen atoms and, as required, hydrogen atoms and/or halogen atoms is diluted optionally with a dilution gas, introduced into a sputtering deposition chamber to form gas plasmas with these gases and the Si wafer is sputtered.

Alternatively, Si and Si₃ N₄ may be used as individual targets or as a single target comprising Si and Si₃ N₄ in admixture and then sputtered in the atmosphere of a dilution gas or in a gaseous atmosphere containing at least hydrogen atoms (H) and/or halogen atoms (X) as the constituent atoms as for the sputtering gas. As the gaseous starting material for introducing nitrogen atoms, those gaseous starting materials for introducing the nitrogen atoms described previously shown in the example of the glow discharging can be used as the effective gas also in the case of the sputtering.

In addition, in the case of forming a layer or layer region constituted with a--Si(H,X) containing the group III or group V atoms by using the glow discharging, sputtering or ion plating process, the starting material for introducing the group III or group V atoms are used together with the starting material for forming a--Si(H,X) upon forming the layer constituted with a--Si(H,X) as described above and they are incorporated while controlling the amount of them into the layer to be formed.

Referring specifically to the boron atom introducing materials as the starting material for introducing the group III atoms, they can include boron hydrides such as B₂ H₆, B₄ H₁₀, B₅ H₉, B₅ H₁₁, B₆ H₁₀, B₆ H₁₂ and B₆ H₁₄ and boron halides such as BF₃, BCl₃ and BBr₃. In addition, AlCl₃, CaCl₃, Ga(CH₃)₂, InCl₃, TlCl₃ and the like can also be mentioned.

Referring to the starting material for introducing the group V atoms and, specifically to, the phosphor atom introducing materials, they can include, for example, phosphor hydrides such as PH₃ and P₂ H₆ and phosphor halide such as PH₄ I, PF₃, PF₅, PCl₃, PCl₅, PBr₃, PBr₅ and PI₃. In addition, AsH₃, AsF₅, AsCl₃, AsBr₃, AsF₃, SbH₃, SbF₃, SbF₅, SbCl₃, SbCl₅, BiH₃, SiCl₃ and BiBr₃ can also be mentioned to as the effective starting material for introducing the group V atoms.

In the case of forming the respective constituent layers other than the surface layer of the light receiving layer in the light receiving member of this invention by means of the glow discharging, reactive sputtering or ion plating process, the amount of each of the layer constituent atoms to be contained in a layer to be formed is controlled by appropriately regulating the flow rate of each of the raw material gases and the flow ratio among the raw material gases to be introduced into the deposition chamber.

The conditions upon forming each of such layers, for example, the temperature of the substrate, the gas pressure in the deposition chamber and the electrical discharging power are important factors for obtaining a light receiving member having desired properties and they are properly selected while considering the functions of the layer to be formed. Further, since these layer forming conditions may be varied depending on the kind and the amount of each of the atoms contained in the layer, the conditions have to be determined also taking the kind or the amount of the atoms to be contained into consideration.

Specifically, in the case of forming a layer composed of an A--Si(H,X) material containing nitrogen atom, oxygen atom, carbon atom, etc., the temperature of the substrate is preferably 50° to 350° C., and more preferably, 50° to 250° C. The gas pressure in the deposition chamber is preferably 0.01 to 1 Torr, and most preferably, 0.1 to 0.5 Torr. And, the electrical discharging power is preferably 0.005 to 50 W/cm², more preferably 0.01 to 30 W/cm², and most preferably, 0.01 to 20 W/cm².

And in the case of forming a layer composed of either an A--SiGe(H,X) material or an A--SiGe(M,X) containing the group III atom or the group V atom, the temperature of the substrate is preferably 50° to 350° C., more preferably, 50° to 300° C., and most preferably, 100° to 300° C. The gas pressure in the deposition chamber is preferably 0.01 to 5 Torr, more preferably 0.01 to 3 Torr, and most preferably, 0.01 to 1 Torr. And, the electrical discharging power is preferably 0.005 to 50 W/cm², more preferably 0.01 to 30 W/cm², and most preferably, 0.01 to 20 W/cm².

However, the actual conditions for forming the layer such as temperature of the substrate, discharging power and the gas pressure in the deposition chamber can not usually the determined with ease independent of each other. Accordingly, the conditions optimal to the layer formation are desirably determined based on relative and organic relationships for forming the amorphous material layer having desired properties.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be described more specifically while referring to Examples 1 through 312, but the invention is not intended to limit the scope only to these Examples.

In each of the Examples, the light receiving layer was formed using the fabrication apparatus shown in FIG. 2 in accordance with the glow discharging process.

In the apparatus shown in FIG. 2, gas reservoirs 202, 203, 204, 205, 206, 241 and 247 are charged with raw material gases for forming the respective layers of the light receiving member of this invention, that is, for instance, SiH₄ gas (99.999% purity) in the reservoir 203, B₂ H₆ gas diluted with H₂ gas (99.999% purity, hereinafter referred to as "B₂ H₆ /H₂ gas" in the reservoir 203, NO gas (99.5% purity) in the reservoir 204, B₂ H₆ gas diluted with Ar gas (99.999% purity, hereinafter referred to as "B₂ H₆ /Ar gas") in the reservoir 205, B₂ H₆ gas diluted with He gas (99.999% purity, hereinafter referred to as "B₂ H₆ /He gas") in the reservoir 206, SiH₄ gas diluted with He gas (99.999% purity, hereinafter referred to as "SiH₄ /He gas") in the reservoir 241 and NH₃ gas (99.999% purity) in the reservoir 247.

In the case for introducing halogen atoms (X) into a layer, the reservoir for SiH₄ is replaced by another reservoir for SiF₄ gas for instance.

Prior to the entrance of these gases into a deposition chamber 201, it is confirmed that valves for the reservoirs 202 through 206, 241 and 247 and a leak valve 235 are closed and that exit valves 217 through 221, 244 and 250, and sub-valves 232 and 233 are opened. Then, a main valve 234 is at first opened to evacuate the inside of the deposition chamber 201 and gas pipings.

Then, upon observing that the reading on the vacuum gauge 236 became about 5×10⁻⁶ Torr, the sub-valves 232 and 233 and the exit valves 217 through 221, 244 and 250.

Now, reference is made to an example in the case of forming a light receiving layer on an Al cylinder as a substrate 237.

SiH₄ gas from the reservoir 202, B₂ H₆ /H₂ gas from the reservoir 203 and NO gas from the reservoir 204 are caused to flow into the mass flow controllers 207, 208 and 209 respectively by opening the valves 222, 223 and 224, controlling the pressure of each of the exit pressure gauges 227, 228 and 229 to 1 kg/cm². Subsequently, the exit valves 217, 218 and 219, and the sub-valve are gradually opened to enter the raw material gases into the deposition chamber 201. In this case, the exit valves 217, 218 and 219 are adjusted so as to a desired value for the ratio among the SiH₄ gas, B₂ H₆ /H₂ gas and the NO gas.

The SiH₄ gas flow rate, the B₂ H₆ /H₂ gas flow rate and the NO gas flow rate, and the opening of the main valve 234 is adjusted while observing the reading on the vacuum gauge 236 so as to obtain a desired value for the pressure inside the deposition chamber 201. Then, after confirming that the temperature of the Al cylinder 237' on the substrate holder 237 has been set by a heater 238 within a range from 50° to 350° C., a power source 240 is set to a predetermined electrical power to cause glow discharging in the deposition chamber 201 while controlling the above gas flow rates to thereby form a layer to be the first layer on the Al cylinder 237'.

In the above case, it is possible to further improve the film forming speed by using appropriately selected raw material gases. For instance, in the case where Si₂ F₆ gas is used in stead of the SiH₄ gas, the film forming speed will be raised by some holds in comparison with the above case.

In order to form a layer to be the second layer on the already formed first layer, closing the exit valves 217 through 221, 244 and 247 opening the subvalves 232 and 233 and entirely opening the main valve 234 to evacuate the inside of the deposition chamber 201 and the gas pipings to be a high vacuum, B₂ H₆ /Ar gas, B₂ H₆ /He gas, NH₃ gas, an appropriate dopant imparting raw material gas and SiH₄ /He gas are fed into the deposition chamber 201 by operating the related valves in the same was as in the case of forming the first layer and the power source 240 is set to a predetermined electric power to cause glow discharging in the deposition chamber while controlling the flow rates of the raw material gases to thereby form the second layer.

In the case where the amount of hydrogen atom to be contained in the second layer is desired to be changed, it can be carried out by purposely adding H₂ gas to an appropiate raw material gas and by varying its flow rate as desired.

Further, in the case where hydrogen atom is desired to be introduced into the second layer, it can be carried out by feeding NF₃ gas together with an appropiate raw material gas into the deposition chamber 201.

All of the exit valves other than those required for upon forming the respective layers are of course closed. Further, upon forming the respective layers, the inside of the system is once evacuated to a high vacuum degree as required by closing the exit valves 217 through 221, 244 and 250 while opening the sub-valves 232 and 233 and fully opening the main valve 234 for avoiding that the gases having been used for forming the previous layer are left in the deposition chamber 201 and in the gas pipeways from the exit valves 217 through 221, 244 and 250 to the inside of the reaction chamber 201.

Further, during the film formation process for the respective layers, the substrate 237' is rotated at a predetermined rotation speed by operating motor 239 in order to attain the uniformness fo the layer to be formed.

EXAMPLE 1

A light receiving member for use in electrophotography having a light receiving layer disposed on an Al cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 1 using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer on an aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, deterioration on photosensitivity and increase of defective images after 1,500 thousand times repeated shots were respectively examined.

Further, the situation of an image flow on the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further, in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 2. As Table 2 illustrates, superiorities in every evaluation item of the initial electrification efficiency (initial charging efficiency), defective image, surface abrasion, breakdown voltage and abrasion resistance for the drum were acknowledged.

As for the samples, the cordination number of boron nitride contained therein was examined in accordance with EXAFS (extended X-ray absorption fine structure ). As a result, it was found that tetrahedrally bonded boron nitrides were contained therein.

EXAMPLE 2

The procedures of Example 1 were repeated under the conditions shown in Table 3 wherein H₂ gas is additionally used in the formation of a surface layer to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 1.

The results obtained were as shown in Table 4.

And as a result of examining a cordination number of boron nitride contained in the samples, it was aknowledged that tetrahedrally bonded boron nitrides were contained therein.

EXAMPLE 3

The procedures of Example 1 were repeated under the same conditions as shown in the foregoing Table 1, except that the vias voltage of the aluminum cylinder was controlled to -150V, to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 1.

The results obtained were as shown in Table 5. As Table 5 illustrates, desirable results as those in Example 1 were acknowledged. As for the boron nitrides contained in the surface layer, it was acknowledged that they were tetrahedrally bonded boron nitrides.

EXAMPLE 4

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an aluminum cylinder was prepared under the conditions shown in Table 6 and following the procedures of Example 1.

The resultant drum was evaluated by the same manners as in Example 1.

The results obtained were as shown in Table 7. As Table 7 illustrates, superiorities in respective evaluation items were acknowledged for the drum.

EXAMPLE 5

An aluminum cylinder was subjected to anodic oxidation to form an aluminum oxide (Al₂ O₃ ) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 8 following the procedures of Example 1

The resultant drum was evaluated by the same manners as in Example 1. The results obtained were as shown in Table 9.

As Table 9 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 6

A drum having an IR absorptive layer, a photoconductive layer and a surface laywr was prepared under the conditions shown in Table 10 and following the procedures of Example 1. The resultant drum was evoluted by the same manners as in Example 1.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelengths as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 11. As Table 11 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that any infringe pattern did not appear on an image to be made.

EXAMPLE 7

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 12 and following the procedures of Example 1.

The resultant drum was evaluated by the same manners as in Example 1. The results obtained were as shown in Table 13.

As Table 13 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 8

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 14 and following the procedures of Example 1. The resultant drum was evaluated in the same way as in Example 6. The results obtained were as shown in Table 15. As Table 15 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 9

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 16 and following the procedures of Example 1. The resultant drum was evaluated in the same way as in Example 1. The results obtained were as shown in Table 17.

As Table 17 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 10

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 18 and following the procedures of Example 1. The resultant drum was evaluated in the same way as in Example 6. The results obtained were as shown in Table 19. As Table 19 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 11

The procedures of Example 1 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 20, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 12

The procedures of Example 2 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 21,to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 13

The procedures of Example 3 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 22, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 14

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 23, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 15

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 26.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 16

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 28, to thereby prepare multiple drums as shown in Table 29.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 17

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 30, to thereby prepare multiple drums as shown in Table 31.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 18

The procedures of Example 5 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 19

The procedures of Example 5 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 28, to thereby prepare multiple drums as shown in Table 33.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 20

The procedures of Example 5 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 30, to thereby prepare multiple drums as shown in Table 34.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 21

The procedures of Example 6 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 37.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 22

The procedures of Example 6 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 39.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 23

The procedures of Example 6 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 28, to thereby prepare multiple drums as shown in Table 40.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 24

The procedures of Example 6 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 30, to thereby prepare multiple drums as shown in Table 41.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 25

The procedures of Example 7 were repeated, except that the contact layer forming conditions were changed as shown in Table 42, to thereby prepare multiple drums as shown in Table 43.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 26

The procedures of Example 7 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 45.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 27

The procedures of Example 7 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 28, to thereby prepare multiple drums as shown in Table 46.

The resultant drums were evluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 28

The procedures of Example 4 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 30, to thereby prepare multiple drums as shown in Table 29.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 29

The procedures of Example 8 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 48.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 30

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown respectively in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 50.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 31

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 28, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 52.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 32

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 30, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 53.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 33

The procedures of Example 9 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 55.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 34

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 58.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 35

The procedures of Example 9 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 28, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 59.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 36

The procedures of Example 9 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 30, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 60.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 37

The procedures of Example 10 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 62.

The resultant drums wre evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 38

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 65.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 39

The procedures of Example 10 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 28, to thereby prepare multiple drums as shown in Table 67.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 40

The procedures of Example 10 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 30, to thereby prepare multiple drums as shown in Table 68.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 41

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 70, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 71.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 42

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 70, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 73.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 43

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 28, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 74.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 44

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 28, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 75.

The resultant drums wre evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 45

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 30, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 76.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 46

The procedures of Example 8 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 30, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 77.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 47

The procedures of Example 4 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 79, to thereby prepare multiple drums as shown in Table 79.

The resultant drums were evaluated in the same way as in Example 1. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 48

The procedures of Example 8 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 81, to thereby prepare multiple drums as shown in Table 81.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 49

The procedures of Example 10 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions wre changed as shown in Table 83, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 6. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 50

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 84 and following the procedures of Example 1.

The resultant drum was evaluated in the same way as in Example 1, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 51

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 1. The resulting drums were evaluated with the same procedures as in Example 1.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 52

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and of a cross section pattern of Table 86 were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 1. The resulting drums were evaluated with the same procedures of Example 1.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 53

A light receiving member for use in electrophotography having a light receiving layer disposed on Al cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 87 using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer on an aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, the situation of surface abrasion and increase of defective image after 1,500 thousand times repeated shots were respecting examined.

Then, the situation of an image flow on the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

Further, the situation of superiority or inferiority in the cleaning property of the drum in accordance with the degree of background fogginess appearing on a blank image was examined by purposely replacing the original cleaning blade by another cleaning blade having a worn edge.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 88.

As Table 88 illustrates, superiorities in the respective evaluation items, particularly of the items relative to defective image, image flow and cleaning property for the drum were acknowledged.

As for the samples, the cordination number of boron nitride contained therein was examined in accordance with EXAFS(extended X-ray absorption fine structure). As a result, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state.

Then, as for the sample on the Si-monocrystal wafer, the residual stress was observed by making stripes of □/mm in checker form on its surface and by peeling off the adhesive tape adhered thereon. As a result, it was found that the sample excels in the residual stress.

EXAMPLE 54

The procedures of Example 53 were repeated under the conditions shown in Table 89 wherein H₂ gas is additionally used in the formation of a surface layer to therby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 53.

The results obtained were as shown in Table 90. As Table 90 illustrates, superiorities in the respective evaluation items were acknowleged.

And, as a result of examining a cordination number of boron nitride contained in the samples, it was found that there are contained tetrahedrally bonded boron nitride and trihedrelly bonded boron nitridde in mingled state.

EXAMPLE 55

The procedures of Example 53 were repeated under the same conditions as shown in the foregoing Table 87, except that the vias voltage of the aluminum cylinder was controlled to +100 V, to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 53.

The results obtained were shown in Table 91. As Table 91 illustrates, desirable results as those in Example 53 were acknowledged. As for the situations of tetrahedrally bonded boron nitride and trihedrally bonded boron nitride and trihedrally bonded boron nitride in the samples, it was found that both of them are contained in mingled state.

EXAMPLE 56

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an alminum cylinder was prepared under the conditions shown in Table 92 and following the procedures of Example 53.

The resultant drum was evaluated by the same manners as in Example 53.

The results obtained were as shown in Table 93. As Table 93 illustrates, superiorities in respective evaluation items were acknowledged for the drum.

EXAMPLE 57

An alminum cylinder was subjected to anodic oxidation to form an aluminum oxide (Al₂ O₃) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 44 following the procedures of Example 53.

The resultant drum was evaluated by the same manners as in Example 53. The results obtained were as shown in Table 95.

As Table 95 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 58

A drum having an IR absorptive layer, a photoconductive layer and a surface layer was prepared under the condition shown in Table 96 and following the procedures of Example 53.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelength as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 97. As Table 97 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that any infringe pattern did not appear on an image to be made.

EXAMPLE 59

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 98 and following the procedures of Example 53.

The resultant drum was evaluated by the same manners as in Example 53. The results obtained were as shown in Table 99.

As Table 99 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 60

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 100 and following the procedures of Example 53.

The resultant drum was evaluated in the same way as in Example 58. The results obtained were as shown in Table 101. As Table 101 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 61

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 102 and following the procedures of Example 53. The resultant drum was evaluated in the same way as in Example 53. The results obtained were as shown in Table 103.

As Table 103 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 62

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 104 and following the procedures of Example 53. The resultant drum was evaluated in the same way as in Example 58. The results obtained were as shown in Table 105. As Table 105 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 63

The procedures of Example 53 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 20, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 64

The procedures of Example 54 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 21, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 65

The procedures of Example 55 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 22, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 66

The procedures of Example 56 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 23, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 67

The procedures of Example 56 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 106.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 68

The procedures of Example 56 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 107, to thereby prepare multiple drums as shown in Table 108.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 69

The procedures of Example 56 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 109, to thereby prepare multiple drums as shown in Table 110.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 70

The procedures of Example 57 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 111, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 71

The procedures of Example 5 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 107, to thereby prepare multiple drums as shown in Table 112.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 72

The procedures of Example 57 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 109, to thereby prepare multiple drums as shown in Table 113.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 73

The procedures of Example 58 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 114.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 74

The procedures of Example 58 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 115.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 75

The procedures of Example 58 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 107, to thereby prepare multiple drums as shown in Table 116.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 76

The procedures of Example 6 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 109, to thereby prepare multiple drums as shown in Table 117.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 77

The procedures of Example 59 were repeated, except that the contact layer forming conditions were changed as shown in Table 42, to thereby prepare multiple drums as shown in Table 118.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 78

The procedures of Example 59 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 119.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 79

The procedures of Example 59 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 107, to thereby prepare multiple drums as shown in Table 120.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 80

The procedures of Example 59 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 109, to thereby prepare multiple drums as shown in Table 121.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 81

The procedures of Example 60 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 122.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 82

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 153.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 83

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 107, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 124.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 84

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 125, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 125.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 85

The procedures of Example 61 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 126.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 86

The procedures of Example 61 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 127.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 87

The procedures of Example 61 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 107, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 128.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 88

The procedures of Example 61 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 109, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 129.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 89

The procedures of Example 62 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 130.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 90

The procedures of Example 62 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 131.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 91

The procedures of Example 62 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 107, to thereby prepare multiple drums as shown in Table 132.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 92

The procedures of Example 62 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 109, to thereby prepare multiple drums as shown in Table 133.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 93

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 134, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 135.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 94

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 134, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 136.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 95

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 107, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 137.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 96

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 107, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 138.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 97

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 109, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 139.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 98

The procedures of Example 60 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 109, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 140.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 99

The procedures of Example 56 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 109, to thereby prepare multiple drums as shown in Table 141.

The resultant drums were evaluated in the same way as in Example 53. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 100

The procedures of Example 60 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 107, to thereby prepare multiple drums as shown in Table 142.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 101

The procedures of Example 62 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions were changed as shown in Table 109, to thereby prepare multiple drums, as shown in Table 143.

The resultant drums were evaluated in the same way as in Example 58. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 102

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 144 and following the procedures of Example 53.

The resultant drum was evaluated in the same way as in Example 53. As a result, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 103

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 53. The resulting drums were evaluated with the same procedures as in Example 53.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 104

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and of a cross section pattern of Table 86 were provided These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 53. The resulting drums were evaluated with the same procedures of Example 53.

As a result, it was found that every drum is provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 105

A light receiving member for use in electrophotography having a light receiving layer disposed on an Al cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 145 using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer comprising an upper layer and a lower layer on an aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, the situation of surface abrasion and increase of defective images after 1,500 thousand times repeated shots were respectively examined.

Then, the situation of an image flow of the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

Further, the situation of superiority or inferiority in the cleaning property of the drum in accordance with the degree of background fogginess appearity on a blank image was examined by purposely replacing the original cleaning blade by another cleaning blade having a worn edge.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 146. As Table 146 illustrates, superiorities in the respective evaluation items, particularly of the items relative to defective image, image flow and cleaning property for the drum were acknowledged.

As for each of the samples, the cordination number of boron nitride contained in each of the upper and the lower layer was examined in accordance with EXAFS (extended X-ray absorption fine structure). As a result, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 106

The procedures of Example 105 were repeated under the conditions shown in Table 147 wherein H₂ gas is additionally used in the formation of a surface layer to therby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 105.

The results obtained were as shown in Table 148. As Table 148 illustrates, superiorities in the respective evaluation items were acknowledged.

And as a result of examining the cordination number of boron nitride contained in each of the samples, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 107

The procedures of Example 105 were repeated, except that the vias voltage of the cylinder in the case of forming a lower layer and the vias voltage in the case of forming an upper layer were controlled to be -150 V and +100 V respectively at the time of forming a surface layer, to thereby prepare a drum and samples.

The resultant drum and samples were evaluated by the same manners as in Example 105.

The results obtained were as shown in Table 149. As Table 149 illustrates, desirable results as those in Example 105 were acknowledged.

As for the situations of tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in each of the samples, it was found that there were contained trihedrally bonded boron nitride and tetrahedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 108

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an alminum cylinder was prepared under the conditions shown in Table 150 and following the procedures of Example 105.

The resultant drum was evaluated by the same manners as in Example 105.

The results obtained were as shown in Table 151. As Table 151 illustrates, superiorities in respective evaluation items were acknowledged for the drum.

EXAMPLE 109

An alminum cylinder was subjected to anodic oxidation to form an aluminum oxide (Al₂ O₃) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 152 following the procedures of Example 105.

The resultant drum was evaluated by the same manners as in Example105. The results obtained were as shown in Table 153.

As Table 153 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 110

A drum having an IR absorptive layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 154 and following the procedures of Example 105.

The resultant drum was evaluated by the same manners as in Example 105.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelength as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 155. As Table 155 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that any infringe pattern did not appear on an image to be made.

EXAMPLE 111

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 156 and following the procedures of Example 105.

The resultant drum was evaluated by the same manners as in Example 105. The results obtained were as shown in Table 157.

As Table 157 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 112

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 158 and following the procedures of Example 105. The resultant drum was evaluated in the same way as in Example 110. The results obtained were as shown in Table 159. As Table 159 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 113

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 160 and following the procedures of Example 105. The resultant drum was evaluated in the same way as in Example 105. The results obtained were as shown in Table 161.

As Table 161 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 114

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 162 and following the procedures of Example 105. The resultant drum was evaluated in the same way as in Example 110. The results obtained were as shown in Table 163. As Table 163 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 115

The procedures of Example 105 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 20, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 116

The procedures of Example 106 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 21, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 117

The procedures of Example 107 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 22, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 118

The procedures of Example 108 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 23, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 119

The procedures of Example 108 were repeated, except that the charge injection inhibiton layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 164.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 120

The procedures of Example 108 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 165, to thereby prepare multiple drums as shown in Table 166.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 121

The procedures of Example 108 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 167, to thereby prepare multiple drums as shown in Table 168.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 122

The procedures of Example 109 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 169.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 123

The procedure of Example 109 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 165, to thereby prepare multiple drums as shown in Table 170.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 124

The procedures of Example 109 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 167, to thereby prepare multiple drums as shown in Table 171.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 125

The procedures of Example 110 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 172.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 126

The procedures of Example 110 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 173.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 127

The procedures of Example 110 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 165, to thereby prepare multiple drums as shown in Table 174.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 128

The procedures of Example 110 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 167, to thereby prepare multiple drums as shown in Table 175.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 129

The procedures of Example 111 were repeated, except that the contact layer forming conditions were changed as shown in Table 42, to thereby prepare multiple drums as shown in Table 176.

The resulant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 130

The procedures of Example 111 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 177.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 131

The procedures of Example 111 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 165, to thereby prepare multiple drums as shown in Table 178.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 132

The procedures of Example 111 were repeated, except that the contact layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 167, to thereby prepare multiple drums as shown in Table 179.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 133

The procedures of Example 112 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 180.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 134

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 181.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 135

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 165, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 182.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 136

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 167, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 183.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 137

The procedures of Example 113 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 184.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 138

The procedures of Example 113 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 185.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 139

The procedures of Example 113 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 165, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 186.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 140

The procedures of Example 113 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 167, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 187.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 141

The procedures of Example 114 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 188. The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 142

The procedures of Example 114 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 189.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 143

The procedures of Example 114 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 165, to thereby prepare multiple drums as shown in Table 190.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 144

The procedures of Example 114 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 167, to thereby prepare multiple drums as shown in Table 191.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 145

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51. Table 69 and Table 192, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 193.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 146

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 192, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 194.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 147

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 165, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 195.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 148

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 165, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 196.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 149

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 167, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 197.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 150

The procedures of Example 112 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 167, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 198.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 151

The procedures of Example 108 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 167, to thereby prepare multiple drums as shown in Table 199.

The resultant drums were evaluated in the same way as in Example 105. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 152

The procedures of Example 112 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 167, to thereby prepare multiple drums as shown in Table 200.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 153

The procedures of Example 114 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions were changed as shown in Table 167, to thereby prepare multiple drums as shown in Table 201.

The resultant drums were evaluated in the same way as in Example 110. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 154

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 202 and following the procedures of Example 105.

The resultant drum was evaluated in the same way as in Example 105. As a result, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 155

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 105. The resulting drums were evaluated with the same procedures as in Example 105.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 156

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and of a cross section pattern of Table 86 were provided These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 105. The resulting drums were evaluated with the same procedures of Example 105.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 157

A light receiving member for use in electrophotography having a light receiving layer disposed on an A1 cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 203(a) and Table 203(b) using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer on an aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, the situation of surface abrasion and increase of defective images after 1,500 thousand times repeated shots were respectively examined.

Then, the situation of an image flow on the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

Further, the situation of superiority or inferiority in the cleaning property of the drum in accordance with the degree of background fogginess appearing on a blank image was examined by purposely replacing the original cleaning blade by another cleaning blade having a worn edge.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 204. As Table 204 illustrates, extreme superiorities in every evaluation item of the initial electrification efficiency (initial charging efficiency), defective image, surface abrasion, breakdown voltage and abrasion resistance for the drum were acknowledged.

As for each of the samples, the cordination number of boron nitride contained therein was examined in accordance with EXAFS (extended X-ray absorption fine structure). As a result, it was found that every sample contained tetrahedrally bonded boron nitride.

EXAMPLE 158

The procedures of Example 157 were repeated under the conditions shown in Table 205(a) and Table 205(b) wherein H₂ gas is additionally used in the formation of a surface layer to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 157.

The results obtained were as shown in Table 206. As Table 206 illustrates, superiorities in the respective evaluation items were acknowledged for the drum.

And, as for each of the samples, it was found that every sample contained tetrahedrally bonded boron nitride.

EXAMPLE 159

The procedures of Example 157 were repeated under the same conditions as shown in the foregoing Table 203(a) and Table 203(b), except that the vias voltage of the aluminum cylinder was controlled to -150 V, to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 157.

The results obtained were shown in Table 207. As Table 207 illustrated, desirable results as those in Example 157 were acknowledged. As for the boron nitrides contained in the surface layer, it was acknowledged that every sample contained tetrahedrally bonded boron nitride.

EXAMPLE 160

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an aluminum cylinder was prepared under the conditions shown in Table 208(a) and Table 208(b) and following the procedures of Example 157.

The resultant drum was evaluated by the same manners a s in Example 157. The results obtained were as shown in Table 7. As Table 7 illustrates, superiorities in the respective evaluation items were acknowledged for the drum.

EXAMPLE 161

An aluminum cylinder was subjected to anodic oxidation to form an aluminum oxide (Al₂ O₃) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 210(a) and Table 210(b) following the procedures of Example 157.

The resultant drum was evaluated by the same manners as in Example 157. The results obtained were as shown in Table 211.

As Table 211 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 162

A drum having an IR absorptive layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 212(a) and Table 212(b) and following the procedures of Example 157.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelength as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 213. As Table 213 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that any infringe pattern did not appear on an image to be made.

EXAMPLE 163

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 214(a) and Table 214(b) and following the procedures of Example 157.

The resultant drum was evaluated by the same manners as in Example 157. The results obtained were as shown in Table 215.

As Table 215 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 164

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 216(a) and Table 216(b) and following the procedures of Example 157. The resultant drum was evaluated in the same way as in Example 162. The results obtained were as shown in Table 217. As Table 217 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 165

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 218(a) and Table 218(b) and following the procedures of Example 157. The resultant drum was evaluated in the same way as in Example 157. The results obtained were as shown in Table 219.

As Table 219 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 166

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 220(a) and Table 220(b) and following the procedures of Example 157. The resultant drum was evaluated in the same way as in Example 162. The results obtained were as shown in Table 221. As Table 221 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 167

The procedures of Example 157 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 222, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 168

The procedures of Example 158 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 223, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 169

The procedures of Example 159 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 224, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 170

The procedures of Example 160 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 225, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 171

The procedures of Example 160 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 226.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 172

The procedures of Example 160 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 227, to thereby prepare multiple drums as shown in Table 228.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 173

The procedures of Example 160 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 229, to thereby prepare multiple drums as shown in Table 230.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 174

The procedures of Example 161 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 231.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 175

The procedures of Example 161 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 227, to thereby prepare multiple drums as shown in Table 232.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 176

The procedures of Example 161 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 229, to thereby prepare multiple drums as shown in Table 233.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 177

The procedures of Example 162 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 234.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 178

The procedures of Example 162 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 235.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 179

The procedures of Example 162 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 227, to thereby prepare multiple drums as shown in Table 236.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 180

The procedures of Example 162 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 229, to thereby prepare multiple drums as shown in Table 237.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 181

The procedures of Example 163 were repeated, except that the contact layer forming conditions were changed as shown in Table 163, to thereby prepare multiple drums as shown in Table 238.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 182

The procedures of Example 163 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 239.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 183

The procedures of Example 163 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44. Table 27 and Table 277, to thereby prepare multiple drums as shown in Table 240.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 184

The procedures of Example 163 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 279, to thereby prepare multiple drums as shown in Table 241.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 185

The procedures of Example 164 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 242.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 186

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 243.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 187

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 227, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 244.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 188

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 229, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 245.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 189

The procedures of Example 165 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 246.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 190

The procedures of Example 165 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 247.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 191

The procedures of Example 165 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 227, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 248.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 192

The procedures of Example 165 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 229, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 249.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 193

The procedures of Example 166 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 250.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 194

The procedures of Example 166 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 251.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 195

The procedures of Example 166 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 227, to thereby prepare multiple drums as shown in Table 252.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 196

The procedures of Example 166 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 229, to thereby prepare multiple drums as shown in Table 253.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 197

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 254, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 255.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 198

The procedure of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 254, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 256.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 199

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 227, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 257.

The resultant drums were evauated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 200

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 227, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 258.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 201

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 229, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 259.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 202

The procedures of Example 164 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 229, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 260.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 203

The procedures of Example 160 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 227, to thereby prepare multiple drums as shown in Table 261.

The resultant drums were evaluated in the same way as in Example 157. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 204

The procedures of Example 164 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 229, to thereby prepare multiple drums as shown in Table 262.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 205

The procedures of Example 166 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions were changed as shown in Table 229, to thereby prepare multiple drums as shown in Table 263.

The resultant drums were evaluated in the same way as in Example 162. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 206

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 264 and following the procedures of Example 157.

The resultant drum was evaluated in the same way as in Example 157, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 207

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 157. The resulting drums were evaluated with the same procedures as in Example 157.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 208

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and a cross section pattern of Table 86 were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 157. The resulting drums were evaluated with the same procedures of Example 157.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 209

A light receiving member for use in electrophotography having a light receiving layer disposed on an Al cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 265(a) and Table 265(b) using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer on an aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, the situation of surface abrasion and increase of defective images after 1,500 thousand times repeated shots were respectively examined.

Then, the situation of an image flow on the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

Further, the situation of superiority or inferiority in the cleaning property of the drum in accordance with the degree of background fogginess appearing on a blank image was examined by purposely replacing the original cleaning blade by another cleaning blade having a worm edge.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 266. As Table 266 illustrates, superiorities in the respective evaluation items, particularly of the items relative to defective image, image flow and cleaning property for the drum were acknowledged.

As for the samples, the cordination number of boron nitride contained therein was examined in accordance with EXAFS (extended X-ray absorption fine structure). As a result, it was found that there were contained tetrahedrally bonded boron nitrides and trihedrally bonded boron nitride in mingled state.

Then, as for the sample on the si-monocrystal wafer, the residual stress was observed by making stripes of □/mm in checker from on its surface and by peeling off the adhesive tape adhered thereon. As a result, it was found that the sample exceled in the residual stress.

EXAMPLE 210

The procedures of Example 209 were repeated under the conditions shown in Table 267(a) and Table 276(b) wherein H₂ gas is additionally used in the formation of a surface layer, to therby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 209.

The results obtained were as shown in Table 268. As Table 268 illustrates, superiorities in the respective evaluation items were acknowledged.

And as a result of examining the cordination number of boron nitride contained in each of the samples, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state.

EXAMPLE 211

The procedures of Example 209 were repeated under the same conditions as shown in the foregoing Table 265(a) and Table 265(b), except that the vias voltage of the aluminum cylinder was controlled to +100 V, to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 209.

The results obtained were as shown in Table 269. As Table 269 illustrates, desirable results as those in Example 209 were acknowledged. As for the situations of tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in each of the samples. It was found that both of them were contained in mingled state.

EXAMPLE 212

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an aluminum cylinder was prepared under the conditions shown in Table 270(a) and Table 270(b) and following the procedures of Example 209.

The resultant drum was evaluated by the same manners as in Example 209.

The results obtained were as shown in Table 271. As Table 271 illustrates, superiorities in respective evaluation items were acknowledged for the drum.

EXAMPLE 213

An aluminum cylinder was subjected to anodic oxidation to form an aluminium oxide (Al₂ O₃) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 272(a) and Table 272(b) following the procedures of Example 209.

The resultant drum was evaluated by the same manners as in Example 209. The results obtained were as shown in Table 273.

As Table 273 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 214

A drum having an IR absorptive layer, a photoconductive layer and a surface layer was prepared under the condition shown in Table 274(a) and Table 274(b) and following the procedures of Example 209.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelength as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 275. As Table 275 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that many infringe pattern did not appear on an image to be made.

EXAMPLE 215

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 276(a) and Table 276(b) and following the procedures of Example 209.

The resultant drum was evaluated by the same manners as in Example 209. The results obtained were as shown in Table 277.

As Table 277 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 216

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 278(a) and Table 278(b) and following the procedures of Example 209. The resultant drum was evaluated in the same way as in Example 214. The results obtained were as shown in Table 279. As Table 279 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 217

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 280(a) and Table 280(b) and following the procedures of Example 209. The resultant drum was evaluated in the same way as in Example 209. The results obtained were as shown in Table 281.

As Table 281 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 218

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 282(a) and Table 282(b) and following the procedures of Example 209. The resultant drum was evaluated in the same way as in Example 214. The results obtained were as shown in Table 283. As Table 283 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 219

The procedures of Example 209 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 284, to thereby prepare multiple drum.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 220

The procedures of Example 210 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 285, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 221

The procedures of Example 211 was repeated, except that the photoconductive layer forming conditions were changed as shown in Table 286, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotograhic characteristics.

EXAMPLE 222

The procedures of Example 212 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 287, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 223

The procedures of Example 212 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 288.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 224

The procedures of Example 212 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 289, to thereby prepare multiple drums as shown in Table 290.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 225

The procedures of Example 212 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 291, to thereby prepare multiple drums as shown in Table 292.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 226

The procedures of Example 213 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 293.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 227

The procedures of Example 213 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 289, to thereby prepare multiple drums as shown in Table 294.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 228

The procedures of Example 213 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 291, to thereby prepare multiple drums as shown in Table 295.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 229

The procedures of Example 214 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 296.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 230

The procedures of Example 214 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 297.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 231

The procedures of Example 214 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 289, to thereby prepare multiple drums as shown in Table 298.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 232

The procedures of Example 214 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 291. to thereby prepare multiple drums as shown in Table 299.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 233

The procedures of Example 215 were repeated, except that the contact layer forming conditions were changed as shown in Table 42, to thereby prepare multiple drums as shown in Table 300.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 234

The procedures of Example 215 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 301.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 235

The procedures of Example 215 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 289, to thereby prepare multiple drums as shown in Table 302.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electophotographic characteristics.

EXAMPLE 236

The procedures of Example 215 were repeated except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 291, to thereby prepare multiple drums as shown in Table 303.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 237

The procedures of Example 216 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 304.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 238

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 305.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 239

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 289, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 306.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 240

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 291, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 307.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 241

The procedures of Example 217 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 308.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 242

The procedures of Example 217 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 309.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 243

The procedures of Example 217 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 289, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 310.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 244

The procedures of Example 217 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 30, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 311.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 245

The procedures of Example 218 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 312.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 246

The procedures of Example 218 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 313.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 247

The procedures of Example 218 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 281, to thereby prepare multiple drums as shown in Table 314. The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 248

The procedures of Example 218 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 291, to thereby prepare multiple drums as shown in Table 315. The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 249

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 316, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 317.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 250

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 316, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 318.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 251

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 289, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 319.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 252

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 289, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 320.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 253

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 291, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 321.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 254

The procedures of Example 216 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 291, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 322.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 255

The procedures of Example 212 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 291, to thereby prepare multiple drums as shown in Table 323.

The resultant drums were evaluated in the same way as in Example 209. As a result, it was found that every drum was provided with practically applicable desired electophotographic characteristics.

EXAMPLE 256

The procedures of Example 216 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 291, to thereby prepare multiple drums as shown in Table 324.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 257

The procedures of Example 218 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions were changed as shown in Table 291, to thereby prepare multiple drums as shown in Table 325.

The resultant drums were evaluated in the same way as in Example 214. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 258

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 326 and following the procedures of Example 209.

The resultant drum was evaluated in the same way as in Example 209, As a result superiorities in the respective evaluation items were acknowledged.

EXAMPLE 259

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 209. The resulting drums were evaluated with the same procedures as in Example 209.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 260

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and of a cross section pattern of Table 86 were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 209. The resulting drums were evaluated with the same procedures of Example 209.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 261

A light receiving member for use in electrophotography having a light receiving layer disposed on an A1 cylinder having a mirror grinded surface was prepared under the layer forming conditions shown in Table 327(a) and Table 327(b) using the fabrication apparatus shown in FIG. 2.

And samples were provided by forming only a surface layer comprising an upper layer and a lower layer on the aluminum plate and on a Si-monocrystal wafer respectively placed on the substrate holder in the same manner for forming the surface layer in the above case using the same kind fabrication apparatus as shown in FIG. 2.

For the resulting light receiving member (hereinafter this kind light receiving member is referred to as "drum"), it was set with the conventional electrophotographic copying machine, and electrophotographic characteristics such as initial electrification efficiency (initial charging efficiency), residual voltage and appearance of a ghost were examined, then decrease in the electrification efficiency, the situation of surface abration and increase of defective images after 1,500 thousand times repeated shots were respectively examined.

Then, the situation of an image flow on the drum under high temperature and high humidity atmosphere at 35° C. and 85% humidity was also examined.

Further, the situation of superiority or inferiority in the cleaning property of the drum in accordance with the degree of background fogginess appearing on a blank image was examined by purposely replacing the original cleaning blade by another cleaning blade having a worn edge.

In addition, the situation of breakdown voltage for the drum was observed by applying a high direct current voltage onto the drum.

Further in addition, the abrasion resistance of the drum was examined by wearing its surface using a metallic needle having a round top while applying a predetermined load thereon.

The results obtained were as shown in Table 328. As Table 328 illustrates, superiorities in the respective evaluation items, particularly of the items relative to defective image, image flow abrasion registance, breakdown voltage and cleaning property for the drum were acknowledged.

As for each of the samples, the cordination number of boron nitride contained in each of the upper layer and the lower layer was examined in accordance with EXAFS (extended X-ray absorption fine structure). As a result, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 262

The procedures of Example 261 were repeated under the conditions shown in Table 329(a) and Table 329(b) wherein H₂ gas is additionally used in the formation of a surface layer to thereby obtain a drum and samples. The resultant drum and samples were evaluated by the same manners as in Example 261.

The results obtained were as shown in Table 330. As Table 330 illustrates, superiorities in the respective evaluation items were acknowledged.

And as a result of examining a cordination number of boron nitride contained in each of the samples, it was found that there were contained tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 263

The procedures of Example 261 were repeated, except that the vias voltage of the cylinder in the case of forming a lower layer and the vias voltage in the case of forming an upper layer were controlled to be -150 V and +100 V respectively at the time of forming a surface layer, to thereby prepare a drum and samples.

The resultant drum and samples were evaluated by the same manners as in Example 261.

The results obtained were shown in Table 331. As Table 331 illustrates, desirable results as those in Example 261 were acknowledged. As for the situation of tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in each of the samples, it was found that there were contained trihedrally bonded boron nitride and tetrahedrally bonded boron nitride in mingled state in the upper layer and there was contained tetrahedrally bonded boron nitride in the lower layer.

EXAMPLE 264

A drum having a charge injection inhibition layer, a photoconductive layer and a surface layer on an aluminum cylinder was prepared under the conditions shown in Table 332(a) and Table 332(b) and following the procedures of Example 261.

The resultant drum was evaluated by the same manners as in Example 261.

The results obtained were as shown in Table 333. As Table 333 illustrates, superiorities in respective evaluation items were acknowledged for the drum.

EXAMPLE 265

An aluminum cylinder was subjected to anodic oxidation to form an aluminum oxide (Al₂ O₃) layer to be a charge injection inhibition layer thereon, and a photoconductive layer then a surface layer were continuously formed on the previously formed charge injection inhibition layer under the conditions shown in Table 334(a) and Table 334(b) following the procedure of Example 261.

The resultant drum was evaluated by the same manners as in Example 261. The results obtained were as shown in Table 335.

As Table 335 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 266

A drum having an IR absorptive layer, a photoconductive layer and a surface layer was prepared under the condition shown in Table 336(a) and Table (b) and following the procedures of Example 261.

The resultant drum was evaluated by the same manners as in Example 261.

In addition, the drum was set with the conventional electrophotographic copying machine using a semiconductor laser beam of 785 nm in wavelength as the light source for image exposure in order to examine whether an infringe pattern appears or not on an image to be made.

The results obtained were as shown in Table 337. As Table 337 illustrates, superiorities in the respective evaluation items were acknowledged, and it was found that any infringe pattern did not appear on an image to be made.

EXAMPLE 267

A drum having a contact layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 338(a) and Table 338(b) and following the procedures of Example 261.

The resultant drum was evaluated by the same manners as in Example 261. The results obtained were as shown in Table 339.

As Table 339 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 268

A drum having an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 340(a) and Table 340(b) and following the procedures of Example 261. The resultant drum was evaluated in the same way as in Example 266. The results obtained were as shown in Table 341. As Table 341 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 269

A drum having a contact layer, a charge injection inhibition layer, a photoconductive layer and a surface layer were prepared under the conditions shown in Table 342(a) and Table 342(b) and following the procedures of Example 261. The resultant drum was evaluated in the same way as in Example 261. The results obtained were as shown in Table 343.

As Table 343 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 270

A drum having a contact layer, an IR absorptive layer, a charge injection inhibition layer, a photoconductive layer and a surface layer was prepared under the conditions shown in Table 344(a) and Table 344(b) and following the procedures of Example 261. The resultant drum was evaluated in the same way as in Example 266. The results obtained were as shown in Table 345. As Table 345 illustrates, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 271

The procedures of Example 261 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 346, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 272

The procedures of Example 262 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 347, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 273

The procedures of Example 263 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 348, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 274

The procedures of Example 264 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 349, to thereby prepare multiple drums.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 275

The procedures of Example 264 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 24 and Table 25, to thereby prepare multiple drums as shown in Table 350.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 276

The procedures of Example 264 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24. Table 27 and Table 351, to thereby prepare multiple drums as shown in Table 352.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 277

The procedures of Example 264 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24, Table 27 and Table 353, to thereby prepare multiple drums as shown in Table 354.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 278

The procedures of Example 265 were repeated, except that the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 354.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 279

The procedures of Example 265 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 351, to thereby prepare multiple drums as shown in Table 356.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 280

The procedures of Example 265 were repeated, except that the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 353, to thereby prepare multiple drums as shown in Table 357.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 281

The procedures of Example 266 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 358.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 282

The procedures of Example 266 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38 and the photoconductive layer forming conditions were changed as shown in Table 25, to thereby prepare multiple drums as shown in Table 359.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 283

The procedures of Example 266 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 351, to thereby prepare multiple drums as shown in Table 360.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 284

The procedures of Example 266 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, and the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 27 and Table 353, to thereby prepare multiple drums as shown in Table 361.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 285

The procedures of Example 267 were repeated, except that the contact layer forming conditions were changed as shown in Table 42, to thereby prepare multiple drums as shown in Table 362.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 286

The procedures of Example 267 were repeated, except that the contact layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 44 and Table 25, to thereby prepare multiple drums as shown in Table 363.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 287

The procedures of Example 267 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44. Table 27 and Table 351, to thereby prepare multiple drums as shown in Table 364.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 288

The procedures of Example 267 were repeated, except that the contact layer forming conditions, photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 44, Table 27 and Table 353, to thereby prepare multiple drums as shown in Table 365.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 289

The procedures of Example 268 were repeated, except that the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 36, to thereby prepare multiple drums as shown in Table 366.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 290

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 49 and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 367.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 291

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 351, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 368.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 292

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51 and Table 353, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 369.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 293

The procedures of Example 269 were repeated, except that the contact layer forming conditions were changed as shown in Table 44 and Table 54, to thereby prepare multiple drums as shown in Table 370.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 294

The procedures of Example 269 were repeated, except that the change injection inhibition layer forming conditions were changed as shown in Table 56, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 371.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 295

The procedures of Example 269 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 351, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 372.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 296

The procedures of Example 269 were repeated, except that the charge injection inhibition layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 24 and Table 353, and the contact layer forming conditions were changed as shown in Table 44 and Table 57, to thereby prepare multiple drums as shown in Table 373.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 297

The procedures of Example 270 were repeated, except that the charge injection inhibition layer forming conditions were changed as shown in Table 61, to thereby prepare multiple drums as shown in Table 374. The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 298

The procedures of Example 270 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed respectively as shown in Table 64 and Table 63, to thereby prepare multiple drums as shown in Table 375.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 299

The procedures of Example 270 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 351, to thereby prepare multiple drums as shown in Table 376.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 300

The procedures of Example 270 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 64, Table 66 and Table 353, to thereby prepare multiple drums as shown in Table 377.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 301

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51. Table 69 and Table 378, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 379.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 302

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 378, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 380.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 303

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 351, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 381.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 304

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 351, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 382.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 305

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 69 and Table 353,and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 383.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 306

The procedures of Example 268 were repeated, except that the charge injection inhibition layer forming conditions, the photoconductive layer forming conditions and the surface layer forming conditions were changed respectively as shown in Table 51, Table 72 and Table 353, and the IR absorptive layer forming conditions were changed as shown in Table 35 and Table 38, to thereby prepare multiple drums as shown in Table 384.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 307

The procedures of Example 264 were repeated, except that the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 78 and the surface layer forming conditions were changed as shown in Table 353, to thereby prepare multiple drums as shown in Table 385.

The resultant drums were evaluated in the same way as in Example 261. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 308

The procedures of Example 268 were repeated, except that the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 80 and the surface layer forming conditions were changed as shown in Table 353, to thereby prepare multiple drums as shown in Table 386.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 309

The procedures of Example 270 were repeated, except that the contact layer forming conditions, the IR absorptive layer forming conditions, the charge injection inhibition layer forming conditions and the photoconductive layer forming conditions were changed as shown in Table 82 and the surface layer forming conditions were changed as shown in Table 353, to thereby prepare multiple drums as shown in Table 387.

The resultant drums were evaluated in the same way as in Example 266. As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 310

A drum having a charge injection inhibition layer, a photoconductive layer, an intermediate layer and a surface layer was prepared under the conditions shown in Table 388 and following the procedures of Example 261.

The resultant drum was evaluated in the same way as in Example 261, superiorities in the respective evaluation items were acknowledged.

EXAMPLE 311

The mirror grinded cylinders were supplied for grinding process with cutting tool having various degrees. With the patterns of FIG. 3 and various cross section patterns as described in Table 85, multiple cylinders were provided. These cylinders were set to the fabrication apparatus of FIG. 2 accordingly, and used to prepare multiple drums under the same layer forming conditions of Example 261. The resulting drums were evaluated with the same procedures as in Example 261.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

EXAMPLE 312

The surface of mirror grinded cylinder was treated by dropping lots of bearing balls thereto to thereby form uneven shape composed of a plurality of fine dimples at the surface, and multiple cylinders having a cross section form of FIG. 4 and of a cross section pattern of Table 86 were provided These cylinders were set to the fabrication apparatus of FIG. 2 accordingly and used for the preparation of multiple drums under the same layer forming conditions of Example 261. The resulting drums were evaluated with the same procedures of Example 261.

As a result, it was found that every drum was provided with practically applicable desired electrophotographic characteristics.

                                      TABLE 1                                      __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer NO        4                                                              Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 2                                      __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 3                                      __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer NO        4                                                              Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.40 0.5                                    layer H.sub.2   100                                                                  NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 4                                      __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 5                                      __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practicle use                                         X: Poor                                                                  

                                      TABLE 6                                      __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35  3                                     injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 7                                      __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ⊚                                                                    ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 8                                      __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.5                                         layer NH.sub.3                                                                               100                                                              __________________________________________________________________________

                                      TABLE 9                                      __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ⊚                                                                    ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 10                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35  1                                     absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 11                                     __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                                                            Interference                        efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                                                                          fringe                              __________________________________________________________________________     ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                                                                    ○                            __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X Poor                                                                   

                                      TABLE 12                                     __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Contact                                                                              SiH.sub.4                                                                               20                                                                               250    100   0.25 0.5                                         layer N.sub.2 100                                                              Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.5                                         layer NH.sub.3                                                                               100                                                              __________________________________________________________________________

                                      TABLE 13                                     __________________________________________________________________________     Initial                 Increase                                               electri-                of        Break                                        fication                                                                            Residual Defective                                                                            Image                                                                              defective                                                                           Surface                                                                             down                                                                               Abrasion                                 efficiency                                                                          voltage                                                                             Ghost                                                                              image flow                                                                               image                                                                               abrasion                                                                            voltage                                                                            resistance                               __________________________________________________________________________     ⊚                                                                    ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                           ○                                                                            ⊚                                                                    ⊚                                                                   ⊚                         __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 14                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 15                                     __________________________________________________________________________     Initial electri-                                                                         Residual Defective                                                                            Image                                                                               Increase of                                                                            Surface                                                                             Break down                                                                            Abrasion                                                                             Interference           fication efficiency                                                                      voltage                                                                             Ghost                                                                              image flow defective image                                                                        abrasion                                                                            voltage                                                                               resistance                                                                           fringe                 __________________________________________________________________________     ⊚                                                                         ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                            ○                                                                               ⊚                                                                    ⊚                                                                      ⊚                                                                     ○               __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 16                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 17                                     __________________________________________________________________________     Initial electri-                                                                        Residual Defective                                                                            Image                                                                              Increase of                                                                            Surface                                                                             Break  Abrasion                       fication efficiency                                                                     voltage                                                                             Ghost                                                                              image flow                                                                               defective image                                                                        abrasion                                                                            down voltage                                                                          resistance                     __________________________________________________________________________     ⊚                                                                        ○                                                                            ⊚                                                                   ⊚                                                                     ⊚                                                                   ○                                                                               ○                                                                            ⊚                                                                      ⊚               __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 18                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 19                                     __________________________________________________________________________     Intial electri-                                                                          Residual Defective                                                                            Image                                                                               Increase of                                                                            Surface                                                                             Break down                                                                            Abrasion                                                                             Interference           fication efficiency                                                                      voltage                                                                             Ghost                                                                              image flow defective image                                                                        abrasion                                                                            voltage                                                                               resistance                                                                           fringe                 __________________________________________________________________________     ⊚                                                                         ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                            ○                                                                               ⊚                                                                    ⊚                                                                      ⊚                                                                     ○               __________________________________________________________________________      ⊚ : Excellent                                                    ○  : Good                                                              Δ : Applicable for practical use                                         X: Poor                                                                  

                                      TABLE 20                                     __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     1101                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                1102                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                1103                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              1104                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              1105                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________

                                      TABLE 21                                     __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     1201                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                1202                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                1203                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              1204                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              1205                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________

                                      TABLE 22                                     __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     1301                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                1302                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                1303                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              1304                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              1305                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________

                                      TABLE 23                                     __________________________________________________________________________         Gas used and its   Substrate    Inner                                                                               Layer                                 Drum                                                                               flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                             No. (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                               __________________________________________________________________________     1401                                                                               SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            GeH.sub.4 10                                                                   NO        10                                                               1402                                                                               SiH.sub.4 80       250    170   0.25 3                                         SiF.sub.4 20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            SnH.sub.4 5                                                                    NO        5                                                                1403                                                                               SiH.sub.4 100      250    130   0.25 3                                         B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800   ppm                                                            NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                                1404                                                                               SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                        1405                                                                               SiH.sub.4 100      250    130   0.25 3                                         PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            GeH.sub.4 10                                                                   NO        10                                                               1406                                                                               SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            NO*       10                                                                   NO**      10→ 0 ***                                                 __________________________________________________________________________      *Substrate side 2 μm                                                        **Surface layer side 1 μm                                                   ***Constantly changed                                                    

                                      TABLE 24                                     __________________________________________________________________________          Gas used and its   Substrate    Inner                                                                               Layer                                Name of                                                                             flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                            layer                                                                               (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                              __________________________________________________________________________     Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 1                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 2                                                                             GeH.sub.4 10                                                                   NO        10                                                              Charge                                                                              SiH.sub.4 80       250    170   0.25 3                                    injection                                                                           SiF.sub.4 20                                                              inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 3                                                                             SnH.sub.4 5                                                                    NO        5                                                               Charge                                                                              SiH.sub.4 100      250    130   0.25 3                                    injection                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800   ppm                                                       inhibition                                                                          NO        4                                                               layer 4                                                                             N.sub.2   4                                                                    CH.sub.4  6                                                               Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                       layer 5                                                                        Charge                                                                              SiH.sub. 4                                                                               100      250    130   0.25 3                                    injection                                                                           PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                       inhibition                                                                          GeH.sub.4 10                                                              layer 6                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 7                                                                             NO*       10                                                                   NO**      10→ 0***                                                 __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                                      TABLE 25                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer 1                                                                              NO        4                                                              Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           He        200                                                            layer 2                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                              Photo-                                                                               SiH.sub.4 150   250    350   0.40 20                                     conductive                                                                           SiF.sub.4 50                                                             layer 3                                                                              H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                              Photo-                                                                               SiH.sub.4 200   250    250   0.40 20                                     conductive                                                                           Ar        200                                                            layer 5                                                                        Photo-                                                                               SiH.sub.4 150   250    350   0.40 20                                     conductive                                                                           SiF.sub.4 50                                                             layer 6                                                                              H.sub.2   200                                                            __________________________________________________________________________

                                      TABLE 26                                     __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               1501 1506 1511 1516 1521 1526 1531                                       conductive                                                                     layer 1                                                                        Photo-                                                                               1502 1507 1512 1517 1522 1527 1532                                       conductive                                                                     layer 2                                                                        Photo-                                                                               1503 1508 1513 1518 1523 1528 1533                                       conductive                                                                     layer 3                                                                        Photo-                                                                               1504 1509 1514 1519 1524 1529 1534                                       conductive                                                                     layer 5                                                                        Photo-                                                                               1505 1510 1515 1520 1525 1530 1535                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 27                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer 1                                                                              NO        4                                                              Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           He        200                                                            layer 2                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                              Photo-                                                                               SiH.sub.4 150   250    350   0.40 20                                     conductive                                                                           SiF.sub.4 50                                                             layer 3                                                                              H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                              Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer 4                                                                        Photo-                                                                               SiH.sub.4 200   250    250   0.40 20                                     conductive                                                                           Ar        200                                                            layer 5                                                                        Photo-                                                                               SiH.sub.4 150   250    350   0.40 20                                     conductive                                                                           SiF.sub.4 50                                                             layer 6                                                                              H.sub.2   200                                                            __________________________________________________________________________

                                      TABLE 28                                     __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.40 0.5                                          layer                                                                               H.sub.2 100                                                                    NH.sub.3                                                                               100                                                               __________________________________________________________________________

                                      TABLE 29                                     __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               1601 1607 1613 1619 1625 1631 1637                                       conductive                                                                     layer 1                                                                        Photo-                                                                               1602 1608 1614 1620 1626 1632 1638                                       conductive                                                                     layer 2                                                                        Photo-                                                                               1603 1609 1615 1621 1627 1633 1639                                       conductive                                                                     layer 3                                                                        Photo-                                                                               1604 1610 1616 1622 1628 1634 1640                                       conductive                                                                     layer 4                                                                        Photo-                                                                               1605 1611 1617 1623 1629 1635 1641                                       conductive                                                                     layer 5                                                                        Photo-                                                                               1606 1612 1618 1624 1630 1636 1642                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 30                                     __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.5                                          layer                                                                               NH.sub.3                                                                               100                                                               Bias voltage of                                                                the cyclinder-150 V                                                            __________________________________________________________________________

                                      TABLE 31                                     __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               1701 1707 1713 1719 1725 1731 1737                                       conductive                                                                     layer 1                                                                        Photo-                                                                               1702 1708 1714 1720 1726 1732 1738                                       conductive                                                                     layer 2                                                                        Photo-                                                                               1703 1709 1715 1721 1727 1733 1739                                       conductive                                                                     layer 3                                                                        Photo-                                                                               1704 1710 1716 1722 1728 1734 1740                                       conductive                                                                     layer 4                                                                        Photo-                                                                               1705 1711 1717 1723 1729 1735 1741                                       conductive                                                                     layer 5                                                                        Photo-                                                                               1706 1712 1718 1724 1730 1736 1742                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                  TABLE 32                                                         ______________________________________                                                               Photo-   Photo- Photo-                                   Photo-      Photo-    conduc-  conduc-                                                                               conduc-                                  conductive  conductive                                                                               tive     tive   tive                                     Layer 1     Layer 2   Layer 3  Layer 5                                                                               Layer 6                                  ______________________________________                                         Drum  1801      1802      1803   1804   1805                                   No.                                                                            ______________________________________                                    

                                      TABLE 33                                     __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   Layer 1   Layer 2                                                                              Layer 3                                                                              Layer 4                                                                              Layer 5                                                                              Layer 6                                      __________________________________________________________________________     Drum                                                                               1901  1902  1903  1904  1905  1906                                         No.                                                                            __________________________________________________________________________

                                      TABLE 34                                     __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   Layer 1   Layer 2                                                                              Layer 3                                                                              Layer 4                                                                              Layer 5                                                                              Layer 6                                      __________________________________________________________________________     Drum                                                                               2001  2002  2003  2004  2005  2006                                         No.                                                                            __________________________________________________________________________

                                      TABLE 35                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 1                                                                              H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 2                                                                              NO        10                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           SnH.sub.4 50                                                             layer 3                                                                              NO        10                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 4                                                                              N.sub.2   4                                                                    NO        4                                                                    CH.sub.4  6                                                              IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           SnH.sub.4 50                                                             layer 5                                                                              N.sub.2   4                                                                    NO        4                                                                    CH.sub.4  6                                                              IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 6                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 7                                                                              B.sub. 2 H.sub.6 (against SiH.sub.4)                                                     1000                                                                              ppm                                                               NO        10                                                                   CH.sub.4  100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 8                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               CH.sub.4  20                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           SnH.sub.4 50                                                             layer 9                                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               H.sub.2   100                                                            IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           GeH.sub.4 50                                                             layer 10                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                              __________________________________________________________________________

                                      TABLE 36                                     __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 11                                                                             SiF.sub.4 10                                                                   PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                      IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 12                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        10                                                             IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 13                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            N.sub.2   10                                                             IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           SnH.sub.4 50                                                             layer 14                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        10                                                             IR    SiH.sub.4 100      250    170   0.35 1                                   absorptive                                                                           SnH.sub.4 50                                                             layer 15                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                              IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           SnH.sub. 4                                                                               50                                                             layer 17                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                      IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 18                                                                             SnH.sub.4 50                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 19                                                                             SnH.sub.4 50                                                                   NO        4                                                                    H.sub.2   100                                                            IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4*                                                                               50                                                             layer 20                                                                             GeH.sub.4**                                                                              50 → 0***                                                     H.sub.2   100                                                            __________________________________________________________________________      *substrate side 0.7 μm                                                      **surface layer side 0.3 μm                                                 ***constantly decreased                                                  

                  TABLE 37                                                         ______________________________________                                                       Drum                                                                           No.                                                              ______________________________________                                         IR Absorptive   2101                                                           Layer 1                                                                        IR Absorptive   2102                                                           Layer 2                                                                        IR Absorptive   2103                                                           Layer 3                                                                        IR Absorptive   2104                                                           Layer 4                                                                        IR Absorptive   2105                                                           Layer 5                                                                        IR Absorptive   2106                                                           Layer 6                                                                        Ir Absorptive   2107                                                           Layer 7                                                                        IR Absorptive   2108                                                           Layer 8                                                                        IR Absorptive   2109                                                           Layer 9                                                                        IR Absorptive   2110                                                           Layer 10                                                                       IR Absorptive   2111                                                           Layer 11                                                                       IR Absorptive   2112                                                           Layer 12                                                                       IR Absorptive   2113                                                           Layer 13                                                                       IR Absorptive   2114                                                           Layer 14                                                                       IR Absorptive   2115                                                           Layer 15                                                                       IR Absorptive   2116                                                           Layer 17                                                                       IR Absorptive   2117                                                           Layer 18                                                                       IR Absorptive   2118                                                           Layer 19                                                                       IR Absorptive   2119                                                           Layer 20                                                                       ______________________________________                                    

                                      TABLE 38                                     __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 11                                                                             SiF.sub.4 10                                                                   PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                      IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 12                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        10                                                             IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 13                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            N.sub.2   10                                                             IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           SnH.sub.4 50                                                             layer 14                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        10                                                             IR    SiH.sub.4 100      250    170   0.35 1                                   absorptive                                                                           SnH.sub.4 50                                                             layer 15                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                              IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 16                                                                             B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            NO        10                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           SnH.sub.4 50                                                             layer 17                                                                             PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                      IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 18                                                                             SnH.sub.4 50                                                                   H.sub.2   100                                                            IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4 50                                                             layer 19                                                                             SnH.sub.4 50                                                                   NO        4                                                                    H.sub.2   100                                                            IR    SiH.sub.4 100      250    150   0.35 1                                   absorptive                                                                           GeH.sub.4*                                                                               50                                                             layer 20                                                                             GeH.sub.4**                                                                              50 → 0***                                                     H.sub.2   100                                                            __________________________________________________________________________      *substrate side 0.7 μm                                                      **surface layer side 0.3 μm                                                 ***constantly decreased                                                  

                  TABLE 39                                                         ______________________________________                                                   Photo-   Photo-  Photo- Photo-                                                                               Photo-                                           con-     con-    con-   con-  con-                                   Drum      ductive  ductive ductive                                                                               ductive                                                                              ductive                                No.       layer 1  layer 2 layer 3                                                                               layer 5                                                                              layer 6                                ______________________________________                                         IR absorptive                                                                            2201     2221    2241   2261  2281                                   layer 1                                                                        IR absorptive                                                                            2202     2222    2242   2262  2282                                   layer 2                                                                        IR absorptive                                                                            2203     2223    2243   2263  2283                                   layer 3                                                                        IR absorptive                                                                            2204     2224    2244   2264  2284                                   layer 4                                                                        IR absorptive                                                                            2205     2225    2245   2265  2285                                   layer 5                                                                        IR absorptive                                                                            2206     2226    2246   2266  2286                                   layer 6                                                                        IR absorptive                                                                            2207     2227    2247   2267  2287                                   layer 7                                                                        IR absorptive                                                                            2208     2228    2248   2268  2288                                   layer 8                                                                        IR absorptive                                                                            2209     2229    2249   2269  2289                                   layer 9                                                                        IR absorptive                                                                            2210     2230    2250   2270  2290                                   layer 10                                                                       IR absorptive                                                                            2211     2231    2251   2271  2291                                   layer 11                                                                       IR absorptive                                                                            2212     2232    2252   2272  2292                                   layer 12                                                                       IR absorptive                                                                            2213     2233    2253   2273  2293                                   layer 13                                                                       IR absorptive                                                                            2214     2234    2254   2274  2294                                   layer 14                                                                       IR absorptive                                                                            2215     2235    2255   2275  2295                                   layer 15                                                                       IR absorptive                                                                            2216     2236    2256   2276  2296                                   layer 16                                                                       IR absorptive                                                                            2217     2237    2257   2277  2297                                   layer 17                                                                       IR absorptive                                                                            2218     2238    2258   2278  2298                                   layer 18                                                                       IR absorptive                                                                            2219     2239    2259   2279  2299                                   layer 19                                                                       IR absorptive                                                                            2220     2240    2260   2280  22100                                  layer 20                                                                       ______________________________________                                    

                                      TABLE 40                                     __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         2301  2321  2341  2361  2381  23101                                     layer 1                                                                        IR absorptive                                                                         2302  2322  2342  2362  2382  23102                                     layer 2                                                                        IR absorptive                                                                         2303  2323  2343  2363  2383  23103                                     layer 3                                                                        IR absorptive                                                                         2304  2324  2344  2364  2384  23104                                     layer 4                                                                        IR absorptive                                                                         2305  2325  2345  2365  2385  23105                                     layer 5                                                                        IR absorptive                                                                         2306  2326  2346  2366  2386  23106                                     layer 6                                                                        IR absorptive                                                                         2307  2327  2347  2367  2387  23107                                     layer 7                                                                        IR absorptive                                                                         2308  2328  2348  2368  2388  23108                                     layer 8                                                                        IR absorptive                                                                         2309  2329  2349  2369  2389  23109                                     layer 9                                                                        IR absorptive                                                                         2310  2330  2350  2370  2390  23110                                     layer 10                                                                       IR absorptive                                                                         2311  2331  2351  2371  2391  23111                                     layer 11                                                                       IR absorptive                                                                         2312  2332  2352  2372  2392  23112                                     layer 12                                                                       IR absorptive                                                                         2313  2333  2353  2373  2393  23113                                     layer 13                                                                       IR absorptive                                                                         2314  2334  2354  2374  2394  23114                                     layer 14                                                                       IR absorptive                                                                         2315  2335  2355  2375  2395  23115                                     layer 15                                                                       IR absorptive                                                                         2316  2336  2356  2376  2396  23116                                     layer 16                                                                       IR absorptive                                                                         2317  2337  2357  2377  2397  23117                                     layer 17                                                                       IR absorptive                                                                         2318  2338  2358  2378  2398  23118                                     layer 18                                                                       IR absorptive                                                                         2319  2339  2359  2379  2399  23119                                     layer 19                                                                       IR absorptive                                                                         2320  2340  2360  2380  23100 23120                                     layer 20                                                                       __________________________________________________________________________

                                      TABLE 41                                     __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         2401  2421  2441  2461  2481  24101                                     layer 1                                                                        IR absorptive                                                                         2402  2422  2442  2462  2482  24102                                     layer 2                                                                        IR absorptive                                                                         2403  2423  2443  2463  2483  24103                                     layer 3                                                                        IR absorptive                                                                         2404  2424  2444  2464  2484  24104                                     layer 4                                                                        IR absorptive                                                                         2405  2425  2445  2465  2485  24105                                     layer 5                                                                        IR absorptive                                                                         2406  2426  2446  2466  2486  24106                                     layer 6                                                                        IR absorptive                                                                         2407  2427  2447  2467  2487  24107                                     layer 7                                                                        IR absorptive                                                                         2408  2428  2448  2468  2488  24108                                     layer 8                                                                        IR absorptive                                                                         2409  2429  2449  2469  2489  24109                                     layer 9                                                                        IR absorptive                                                                         2410  2430  2450  2470  2490  24110                                     layer 10                                                                       Ir absorptive                                                                         2411  2431  2451  2471  2491  24111                                     layer 11                                                                       IR absorptive                                                                         2412  2432  2452  2472  2492  24112                                     layer 12                                                                       IR absorptive                                                                         2413  2433  2453  2473  2493  24113                                     layer 13                                                                       IR absorptive                                                                         2414  2434  2454  2474  2494  24114                                     layer 14                                                                       IR absorptive                                                                         2415  2435  2455  2475  2495  24115                                     layer 15                                                                       IR absorptive                                                                         2416  2436  2456  2476  2496  24116                                     layer 16                                                                       IR absorptive                                                                         2417  2437  2457  2477  2497  24117                                     layer 17                                                                       IR absorptive                                                                         2418  2438  2458  2478  2498  24118                                     layer 18                                                                       IR absorptive                                                                         2419  2439  2459  2479  2499  24119                                     layer 19                                                                       IR absorptive                                                                         2420  2440  2460  2480  21400 24120                                     layer 20                                                                       __________________________________________________________________________

                                      TABLE 42                                     __________________________________________________________________________          Gas used and its                                                                       Substrate    Inner Layer                                          Name of                                                                             flow rate                                                                              temperature                                                                           RF power                                                                             pressure                                                                             thickness                                      layer                                                                               (SCCM)  (°C.)                                                                          (W)   (Torr)                                                                               (μm)                                        __________________________________________________________________________     Contact                                                                             SiH.sub.4                                                                           20 250    100   0.25  0.5                                            layer 2                                                                             No   20                                                                   Contact                                                                             SiH.sub.4                                                                           20 250    150   0.25  0.5                                            layer 3                                                                             CH.sub.4                                                                           400                                                                        H.sub.2                                                                            100                                                                   Contact                                                                             SiH.sub.4                                                                           10 250    100   0.25  0.5                                            layer 4                                                                             SiF.sub.4                                                                           10                                                                        NO   10                                                                        N.sub.2                                                                             50                                                                        CH.sub.4                                                                           200                                                                   __________________________________________________________________________

                  TABLE 43                                                         ______________________________________                                         Contact           Contact  Contact                                             Layer 2           Layer 3  Layer 4                                             ______________________________________                                         Drum    2501          2502     2503                                            No.                                                                            ______________________________________                                    

                                      TABLE 44                                     __________________________________________________________________________          Gas used and its                                                                       Substrate    Inner Layer                                          Name of                                                                             flow rate                                                                              temperature                                                                           RF power                                                                             pressure                                                                             thickness                                      layer                                                                               (SCCM)  (°C.)                                                                          (W)   (Torr)                                                                               (μm)                                        __________________________________________________________________________     Contact                                                                             SiH.sub.4                                                                           20 250    100   0.25  0.5                                            layer 1                                                                             N.sub.2                                                                            100                                                                   Contact                                                                             SiH.sub.4                                                                           20 250    100   0.25  0.5                                            layer 2                                                                             NO   10                                                                   Contact                                                                             SiH.sub.4                                                                           20 250    150   0.25  0.5                                            layer 3                                                                             CH.sub.4                                                                           400                                                                        H.sub.2                                                                            100                                                                   Contact                                                                             SiH.sub.4                                                                           10 250    100   0.25  0.5                                            layer 4                                                                             SiF.sub.4                                                                           10                                                                        NO   10                                                                        N.sub.2                                                                             50                                                                        CH.sub.4                                                                           200                                                                   __________________________________________________________________________

                  TABLE 45                                                         ______________________________________                                         Drum     Contact  Contact    Contact                                                                               Contact                                    No.      layer 1  layer 2    layer 3                                                                               layer 4                                    ______________________________________                                         Photo-   2601     2607       2613   2619                                       conductive                                                                     layer 1                                                                        Photo-   2602     2608       2614   2620                                       conductive                                                                     layer 2                                                                        Photo-   2603     2609       2615   2621                                       conductive                                                                     layer 3                                                                        Photo-   2604     2610       2616   2622                                       conductive                                                                     layer 4                                                                        Photo-   2605     2611       2617   2623                                       conductive                                                                     layer 5                                                                        Photo-   2606     2612       2618   2624                                       conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 46                                                         ______________________________________                                         Drum     Contact  Contact    Contact                                                                               Contact                                    No.      layer 1  layer 2    layer 3                                                                               layer 4                                    ______________________________________                                         Photo-   2701     2707       2713   2719                                       conductive                                                                     layer 1                                                                        Photo-   2702     2708       2714   2720                                       conductive                                                                     layer 2                                                                        Photo-   2703     2709       2715   2721                                       conductive                                                                     layer 3                                                                        Photo-   2704     2710       2716   2722                                       conductive                                                                     layer 4                                                                        Photo-   2705     2711       2717   2723                                       conductive                                                                     layer 5                                                                        Photo-   2706     2712       2718   2724                                       conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 47                                                         ______________________________________                                         Drum     Contact  Contact    Contact                                                                               Contact                                    No.      layer 1  layer 2    layer 3                                                                               layer 4                                    ______________________________________                                         Photo-   2801     2807       2813   2819                                       conductive                                                                     layer 1                                                                        Photo-   2802     2808       2814   2820                                       conductive                                                                     layer 2                                                                        Photo-   2803     2809       2815   2821                                       conductive                                                                     layer 3                                                                        Photo-   2804     2810       2816   2822                                       conductive                                                                     layer 4                                                                        Photo-   2805     2811       2817   2823                                       conductive                                                                     layer 5                                                                        Photo-   2806     2812       2818   2824                                       conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 48                                                         ______________________________________                                                  Drum                Drum                                                       No.                 No.                                               ______________________________________                                         IR absorptive                                                                             2901       IR absorptive                                                                             2911                                          layer 1               layer 11                                                 IR absorptive                                                                             2902       IR absorptive                                                                             2912                                          layer 2               layer 12                                                 IR absorptive                                                                             2903       IR absorptive                                                                             2913                                          layer 3               layer 13                                                 IR absorptive                                                                             2904       IR absorptive                                                                             2914                                          layer 4               layer 14                                                 IR absorptive                                                                             2905       IR absorptive                                                                             2915                                          layer 5               layer 15                                                 IR absorptive                                                                             2906       IR absorptive                                                                             2917                                          layer 6               layer 17                                                 IR absorptive                                                                             2907       IR absorptive                                                                             2918                                          layer 7               layer 18                                                 IR absorptive                                                                             2908       IR absorptive                                                                             2919                                          layer 8               layer 19                                                 IR absorptive                                                                             2909       IR absorptive                                                                             2920                                          layer 9               layer 20                                                 IR absorptive                                                                             2910                                                                layer 10                                                                       ______________________________________                                    

                                      TABLE 49                                     __________________________________________________________________________          Gas used and its   Substrate    Inner                                                                               Layer                                Name of                                                                             flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                            layer                                                                               (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                              __________________________________________________________________________     Charge                                                                              SiH.sub.4 100      250    130   0.25 3                                    injection                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800   ppm                                                       inhibition                                                                          NO        4                                                               layer 4                                                                             N.sub.2   4                                                                    CH.sub.4  6                                                               Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                       layer 5                                                                        Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 7                                                                             NO*       10                                                                   NO**      10 → 0***                                                __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                  TABLE 50                                                         ______________________________________                                                   Photo-       Photo-    Photo-                                        Drum      conductive   conductive                                                                               conductive                                    No.       layer 4      layer 5   layer 7                                       ______________________________________                                         IR absorptive                                                                            3001         3021      3041                                          layer 1                                                                        IR absorptive                                                                            3002         3022      3042                                          layer 2                                                                        IR absorptive                                                                            3003         3023      3043                                          layer 3                                                                        IR absorptive                                                                            3004         3024      3044                                          layer 4                                                                        IR absorptive                                                                            3005         3025      3045                                          layer 5                                                                        IR absorptive                                                                            3006         3026      3046                                          layer 6                                                                        IR absorptive                                                                            3007         3027      3047                                          layer 7                                                                        IR absorptive                                                                            3008         3028      3048                                          layer 8                                                                        IR absorptive                                                                            3009         3029      3049                                          layer 9                                                                        IR absorptive                                                                            3010         3030      3050                                          layer 10                                                                       IR absorptive                                                                            3011         3031      3051                                          layer 11                                                                       IR absorptive                                                                            3012         3032      3052                                          layer 12                                                                       IR absorptive                                                                            3013         3033      3053                                          layer 13                                                                       IR absorptive                                                                            3014         3034      3054                                          layer 14                                                                       IR absorptive                                                                            3015         3035      3055                                          layer 15                                                                       IR absorptive                                                                            3016         3036      3056                                          layer 16                                                                       IR absorptive                                                                            3017         3037      3057                                          layer 17                                                                       IR absorptive                                                                            3018         3038      3058                                          layer 18                                                                       IR absorptive                                                                            3019         3039      3059                                          layer 19                                                                       IR absorptive                                                                            3020         3040      3060                                          layer 20                                                                       ______________________________________                                    

                                      TABLE 51                                     __________________________________________________________________________          Gas used and its   Substrate    Inner                                                                               Layer                                Name of                                                                             flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                            layer                                                                               (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                              __________________________________________________________________________     Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 1                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100      250    130   0.25 3                                    injection                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800   ppm                                                       inhibition                                                                          NO        4                                                               layer 4                                                                             N.sub.2   4                                                                    CH.sub.4  6                                                               Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                       layer 5                                                                        Charge                                                                              SiH.sub.4 100      250    150   0.35 3                                    injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                       layer 7                                                                             NO*       10                                                                   NO**      10 → 0***                                                __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                  TABLE 52                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           3101      3121      3141    3161                                      layer 1                                                                        IR absorptive                                                                           3102      3122      3142    3162                                      layer 2                                                                        IR absorptive                                                                           3103      3123      3143    3163                                      layer 3                                                                        IR absorptive                                                                           3104      3124      3144    3164                                      layer 4                                                                        IR absorptive                                                                           3105      3125      3145    3165                                      layer 5                                                                        IR absorptive                                                                           3106      3126      3146    3166                                      layer 6                                                                        IR absorptive                                                                           3107      3127      3147    3167                                      layer 7                                                                        IR absorptive                                                                           3108      3128      3148    3168                                      layer 8                                                                        IR absorptive                                                                           3109      3129      3149    3169                                      layer 9                                                                        IR absorptive                                                                           3110      3130      3150    3170                                      layer 10                                                                       IR absorptive                                                                           3111      3131      3151    3171                                      layer 11                                                                       IR absorptive                                                                           3112      3132      3152    3172                                      layer 12                                                                       IR absorptive                                                                           3113      3133      3153    3173                                      layer 13                                                                       IR absorptive                                                                           3114      3134      3154    3174                                      layer 14                                                                       IR absorptive                                                                           3115      3135      3155    3175                                      layer 15                                                                       IR absorptive                                                                           3116      3136      3156    3176                                      layer 16                                                                       IR absorptive                                                                           3117      3137      3157    3177                                      layer 17                                                                       IR absorptive                                                                           3118      3138      3158    3178                                      layer 18                                                                       IR absorptive                                                                           3119      3139      3159    3179                                      layer 19                                                                       IR absorptive                                                                           3120      3140      3160    3180                                      layer 20                                                                       ______________________________________                                    

                  TABLE 53                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           3201      3221      3241    3261                                      layer 1                                                                        IR absorptive                                                                           3202      3222      3242    3262                                      layer 2                                                                        IR absorptive                                                                           3203      3223      3243    3263                                      layer 3                                                                        IR absorptive                                                                           3204      3224      3244    3264                                      layer 4                                                                        IR absorptive                                                                           3205      3225      3245    3265                                      layer 5                                                                        IR absorptive                                                                           3206      3226      3246    3266                                      layer 6                                                                        IR absorptive                                                                           3207      3227      3247    3267                                      layer 7                                                                        IR absorptive                                                                           3208      3228      3248    3268                                      layer 8                                                                        IR absorptive                                                                           3209      3229      3249    3269                                      layer 9                                                                        IR absorptive                                                                           3210      3230      3250    3270                                      layer 10                                                                       IR absorptive                                                                           3211      3231      3251    3271                                      layer 11                                                                       IR absorptive                                                                           3212      3232      3252    3272                                      layer 12                                                                       IR absorptive                                                                           3213      3233      3253    3273                                      layer 13                                                                       IR absorptive                                                                           3214      3234      3254    3274                                      layer 14                                                                       IR absorptive                                                                           3215      3235      3255    3275                                      layer 15                                                                       IR absorptive                                                                           3216      3236      3256    3276                                      layer 16                                                                       IR absorptive                                                                           3217      3237      3257    3277                                      layer 17                                                                       IR absorptive                                                                           3218      3238      3258    3278                                      layer 18                                                                       IR absorptive                                                                           3219      3239      3259    3279                                      layer 19                                                                       IR absorptive                                                                           3220      3240      3260    3280                                      layer 20                                                                       ______________________________________                                    

                  TABLE 54                                                         ______________________________________                                                            Substrate             Layer                                        Gas used and its                                                                           temper-  RF    Inner  thick-                                Name of                                                                               flow rate   ature    power pressure                                                                              ness                                  layer  (SCCM)      (°C.)                                                                            (W)   (Torr) (μm)                               ______________________________________                                         Contact                                                                               SiH.sub.4                                                                              20      250    50    0.05   0.5                                 layer 6                                                                               NO       2                                                              Contact                                                                               SiH.sub.4                                                                              20      250    50    0.05   0.5                                 layer 7                                                                               CH.sub.4                                                                               40                                                                     H.sub.2 50                                                              Contact                                                                               SiH.sub.4                                                                              10      250    50    0.05   0.5                                 layer 8                                                                               SiF.sub.4                                                                              10                                                                     NO       4                                                                     N.sub.2  4                                                                     CH.sub.4                                                                                6                                                              ______________________________________                                    

                                      TABLE 55                                     __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               3301 3302 3303 3304 3305 3306 3307                                         No.                                                                            __________________________________________________________________________

                                      TABLE 56                                     __________________________________________________________________________                          Substrate    Inner                                                                               Layer                                   Name of                                                                             Gas used and its                                                                               temperature                                                                           RF power                                                                             pressure                                                                            thickness                               layer                                                                               flow rate (SCCM)                                                                               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     Charge                                                                              SiH.sub.4 100   250    150   0.35 3                                       injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 2                                                                             GeH.sub.4 10                                                                   NO        10                                                              Charge                                                                              SiH.sub.4 80 250                                                                               170    0.25  3                                            injection                                                                           SiF.sub.4 20                                                              inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 3                                                                             SnH.sub.4 5                                                                    NO        5                                                               Charge                                                                              SiH.sub.4 100                                                                               250                                                                               150    0.35  3                                            injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 7                                                                             NO*       10                                                              NO**           10 → 0***                                                __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                  TABLE 57                                                         ______________________________________                                                            Substrate             Layer                                        Gas used and its                                                                           temper-  RF    Inner  thick-                                Name of                                                                               flow rate   ature    power pressure                                                                              ness                                  layer  (SCCM)      (°C.)                                                                            (W)   (Torr) (μm)                               ______________________________________                                         Contact                                                                               SiH.sub.4                                                                              20      250    50    0.05   0.5                                 layer 5                                                                               N.sub.2 10                                                              Contact                                                                               SiH.sub.4                                                                              20      250    50    0.05   0.5                                 layer 6                                                                               NO       2                                                              Contact                                                                               SiH.sub.4                                                                              20      250    50    0.05   0.5                                 layer 7                                                                               CH.sub.4                                                                               40                                                                     H.sub.2 50                                                              Contact                                                                               SiH.sub.4                                                                              10      250    50    0.05   0.5                                 layer 8                                                                               SiF.sub.4                                                                              10                                                                     NO       4                                                                     N.sub.2  4                                                                     CH.sub.4                                                                                6                                                              ______________________________________                                    

                                      TABLE 58                                     __________________________________________________________________________             Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                             inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                    Drum No.                                                                               layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                       __________________________________________________________________________     Contact layer 1                                                                        3401 3409 3417 3425 3433 3441                                          Contact layer 2                                                                        3402 3410 3418 3426 3434 3442                                          Contact layer 3                                                                        3403 3411 3419 3427 3435 3443                                          Contact layer 4                                                                        3404 3412 3420 3428 3436 3444                                          Contact layer 5                                                                        3405 3413 3421 3429 3437 3445                                          Contact layer 6                                                                        3406 3414 3422 3430 3438 3446                                          Contact layer 7                                                                        3407 3415 3423 3431 3439 3447                                          Contact layer 8                                                                        3408 3416 3424 3432 3440 3448                                          __________________________________________________________________________

                                      TABLE 59                                     __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                       No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             3501 3509 3517 3525 3533 3541 3549                                        layer 1                                                                        Contact                                                                             3502 3510 3518 3526 3534 3542 3550                                        layer 2                                                                        Contact                                                                             3503 3511 3519 3527 3535 3543 3551                                        layer 3                                                                        Contact                                                                             3504 3512 3520 3528 3536 3544 3552                                        layer 4                                                                        Contact                                                                             3505 3513 3521 3529 3537 3545 3553                                        layer 5                                                                        Contact                                                                             3506 3514 3522 3530 3538 3546 3554                                        layer 6                                                                        Contact                                                                             3507 3515 3523 3531 3539 3547 3555                                        layer 7                                                                        Contact                                                                             3508 3516 3524 3532 3540 3548 3556                                        layer 8                                                                        __________________________________________________________________________

                                      TABLE 60                                     __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             3601 3609 3617 3625 3633 3641 3649                                        layer 1                                                                        Contact                                                                             3602 3610 3618 3626 3634 3642 3650                                        layer 2                                                                        Contact                                                                             3603 3611 3619 3627 3635 3643 3651                                        layer 3                                                                        Contact                                                                             3604 3612 3620 3628 3636 3644 3652                                        layer 4                                                                        Contact                                                                             3605 3613 3621 3629 3637 3645 3653                                        layer 5                                                                        Contact                                                                             3606 3614 3622 3630 3638 3646 3654                                        layer 6                                                                        Contact                                                                             3607 3615 3623 3631 3639 3647 3655                                        layer 7                                                                        Contact                                                                             3608 3616 3624 3632 3640 3648 3656                                        layer 8                                                                        __________________________________________________________________________

                                      TABLE 61                                     __________________________________________________________________________                          Substrate    Inner                                                                               Layer                                   Name of                                                                             Gas used and its                                                                               temperature                                                                           RF power                                                                             pressure                                                                            thickness                               layer                                                                               flow rate (SCCM)                                                                               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     Charge                                                                              SiH.sub.4 100   250    130   0.25 3                                       injection                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                          inhibition                                                                          NO        4                                                               layer 4                                                                             N.sub.2   4                                                                    CH.sub.4  6                                                               Charge                                                                              SiH.sub.4 100                                                                               250                                                                               130    0.25  3                                            injection                                                                           PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                          inhibition                                                                          GeH.sub.4 10                                                              layer 6                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100                                                                               250                                                                               150    0.35  3                                            injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 7                                                                             NO*       10                                                              NO**           10 → 0***                                                __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                  TABLE 62                                                         ______________________________________                                         Charge injection                                                                              Charge injection                                                                            Charge injection                                   inhibition layer 4                                                                            inhibition layer 6                                                                          inhibition layer 7                                 ______________________________________                                         Drum  3701         3702         3703                                           No.                                                                            ______________________________________                                    

                  TABLE 63                                                         ______________________________________                                                            Substrate             Layer                                         Gas used and                                                                              temper-  RF    Inner  thick-                                Name of its flow rate                                                                             ature    power pressure                                                                              ness                                  layer   (SCCM)     (°C.)                                                                            (W)   (Torr) (μm)                               ______________________________________                                         Photo-  SiH.sub.4                                                                              200    250    250   0.40   20                                  conductive                                                                             Ar      200                                                            layer 5                                                                        Photo-  SiH.sub.4                                                                              150    250    350   0.40   20                                  conductive                                                                             SiF.sub.4                                                                               50                                                            layer 6 H.sub.2 200                                                            ______________________________________                                    

                                      TABLE 64                                     __________________________________________________________________________                          Substrate    Inner                                                                               Layer                                   Name of                                                                             Gas used and its                                                                               temperature                                                                           RF power                                                                             pressure                                                                            thickness                               layer                                                                               flow rate (SCCM)                                                                               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     Charge                                                                              SiH.sub.4 100   250    150   0.35 3                                       injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 1                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100                                                                               250                                                                               130    0.25  3                                            injection                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                          inhibition                                                                          NO        4                                                               layer 4                                                                             N.sub.2   4                                                                    CH.sub.4  6                                                               Charge                                                                              SiH.sub.4 100                                                                               250                                                                               130    0.25  3                                            injection                                                                           PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                          inhibition                                                                          GeH.sub.4 10                                                              layer 6                                                                             NO        10                                                              Charge                                                                              SiH.sub.4 100                                                                               250                                                                               150    0.35  3                                            injection                                                                           H.sub.2   100                                                             inhibition                                                                          B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                          layer 7                                                                             NO*       10                                                              NO**           10 → 0***                                                __________________________________________________________________________      *substrate side 2 μm                                                        **surface layer side 2 μm                                                   ***constantly changed                                                    

                  TABLE 65                                                         ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   3801      3803      3805    3807                                      conductive                                                                     layer 5                                                                        Photo-   3802      3804      3806    3808                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 66                                                         ______________________________________                                                            Substrate             Layer                                         Gas used and                                                                              temper-  RF    Inner  thick-                                Name of its flow rate                                                                             ature    power pressure                                                                              ness                                  layer   (SCCM)     (°C.)                                                                            (W)   (Torr) (μm)                               ______________________________________                                         Photo-  SiH.sub.4                                                                              200    250    300   0.40   20                                  conductive                                                                             H.sub.2 200                                                            layer 4                                                                        Photo-  SiH.sub.4                                                                              200    250    250   0.40   20                                  conductive                                                                             Ar      200                                                            layer 5                                                                        Photo-  SiH.sub.4                                                                              150    250    350   0.40   20                                  conductive                                                                             SiF.sub.4                                                                               50                                                            layer 6 H.sub.2 200                                                            ______________________________________                                    

                  TABLE 67                                                         ______________________________________                                                  Charge   Charge     Charge Charge                                              injection                                                                               injection  injection                                                                             injection                                  Drum     inhibition                                                                              inhibition inhibition                                                                            inhibition                                 No.      layer 1  layer 4    layer 6                                                                               layer 7                                    ______________________________________                                         Photo-   3901     3904       3907   3910                                       conductive                                                                     layer 4                                                                        Photo-   3902     3905       3908   3911                                       conductive                                                                     layer 5                                                                        Photo-   3903     3906       3909   3912                                       conductive                                                                     layer 6                                                                        ______________________________________                                    

    ______________________________________                                                  Charge   Charge     Charge Charge                                              injection                                                                               injection  injection                                                                             injection                                  Drum     inhibition                                                                              inhibition inhibition                                                                            inhibition                                 No.      layer 1  layer 4    layer 6                                                                               layer 7                                    ______________________________________                                         Photo-   4001     4004       4007   4010                                       conductive                                                                     layer 4                                                                        Photo-   4002     4005       4008   4011                                       conductive                                                                     layer 5                                                                        Photo-   4003     4006       4009   4012                                       conductive                                                                     layer 6                                                                        ______________________________________                                    

                                      TABLE 70                                     __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.5                                          layer 1                                                                             NH.sub.3                                                                               100                                                               __________________________________________________________________________

                                      TABLE 69                                     __________________________________________________________________________           Gas used and its                                                                       Substrate    Inner                                                                               Layer                                          Name of                                                                              flow rate                                                                              temperature                                                                           RF power                                                                             pressure                                                                            thickness                                      layer (SCCM)  (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                        __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                          200 250    250   0.40 20                                             conductive                                                                           Ar  200                                                                  layer                                                                          __________________________________________________________________________

                  TABLE 71                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4101      4121      4141    4161                                      layer 1                                                                        IR absorptive                                                                           4102      4122      4142    4162                                      layer 2                                                                        IR absorptive                                                                           4103      4123      4143    4163                                      layer 3                                                                        IR absorptive                                                                           4104      4124      4144    4164                                      layer 4                                                                        IR absorptive                                                                           4105      4125      4145    4165                                      layer 5                                                                        IR absorptive                                                                           4106      4126      4146    4166                                      layer 6                                                                        IR absorptive                                                                           4107      4127      4147    4167                                      layer 7                                                                        IR absorptive                                                                           4108      4128      4148    4168                                      layer 8                                                                        IR absorptive                                                                           4109      4129      4149    4169                                      layer 9                                                                        IR absorptive                                                                           4110      4130      4150    4170                                      layer 10                                                                       IR absorptive                                                                           4111      4131      4151    4171                                      layer 11                                                                       IR absorptive                                                                           4112      4132      4152    4172                                      layer 12                                                                       IR absorptive                                                                           4113      4133      4153    4173                                      layer 13                                                                       IR absorptive                                                                           4114      4134      4154    4174                                      layer 14                                                                       IR absorptive                                                                           4115      4135      4155    4175                                      layer 15                                                                       IR absorptive                                                                           4116      4136      4156    4176                                      layer 16                                                                       IR absorptive                                                                           4117      4137      4157    4177                                      layer 17                                                                       IR absorptive                                                                           4118      4138      4158    4178                                      layer 18                                                                       IR absorptive                                                                           4119      4139      4159    4179                                      layer 19                                                                       IR absorptive                                                                           4120      4140      4160    4180                                      layer 20                                                                       ______________________________________                                    

                                      TABLE 72                                     __________________________________________________________________________           Gas used and its                                                                       Substrate    Inner                                                                               Layer                                          Name of                                                                              flow rate                                                                              temperature                                                                           RF power                                                                             pressure                                                                            thickness                                      layer (SCCM)  (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                        __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                          150 250    350   0.40 20                                             conductive                                                                           SiF.sub.4                                                                           50                                                                  layer H.sub.2                                                                            200                                                                  __________________________________________________________________________

                  TABLE 73                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4201      4221      4241    4261                                      layer 1                                                                        IR absorptive                                                                           4202      4222      4242    4262                                      layer 2                                                                        IR absorptive                                                                           4203      4223      4243    4263                                      layer 3                                                                        IR absorptive                                                                           4204      4224      4244    4264                                      layer 4                                                                        IR absorptive                                                                           4205      4225      4245    4265                                      layer 5                                                                        IR absorptive                                                                           4206      4226      4246    4266                                      layer 6                                                                        IR absorptive                                                                           4207      4227      4247    4267                                      layer 7                                                                        IR absorptive                                                                           4208      4228      4248    4268                                      layer 8                                                                        IR absorptive                                                                           4209      4229      4249    4269                                      layer 9                                                                        IR absorptive                                                                           4210      4230      4250    4270                                      layer 10                                                                       IR absorptive                                                                           4211      4231      4251    4271                                      layer 11                                                                       IR absorptive                                                                           4212      4232      4252    4272                                      layer 12                                                                       IR absorptive                                                                           4213      4233      4253    4273                                      layer 13                                                                       IR absorptive                                                                           4214      4234      4254    4274                                      layer 14                                                                       IR absorptive                                                                           4215      4235      4255    4275                                      layer 15                                                                       IR absorptive                                                                           4216      4236      4256    4276                                      layer 16                                                                       IR absorptive                                                                           4217      4237      4257    4277                                      layer 17                                                                       IR absorptive                                                                           4218      4238      4258    4278                                      layer 18                                                                       IR absorptive                                                                           4219      4239      4259    4279                                      layer 19                                                                       IR absorptive                                                                           4220      4240      4260    4280                                      layer 20                                                                       ______________________________________                                    

                  TABLE 74                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4301      4321      4341    4361                                      layer 1                                                                        IR absorptive                                                                           4302      4322      4342    4362                                      layer 2                                                                        IR absorptive                                                                           4303      4323      4343    4363                                      layer 3                                                                        IR absorptive                                                                           4304      4324      4344    4364                                      layer 4                                                                        IR absorptive                                                                           4305      4325      4345    4365                                      layer 5                                                                        IR absorptive                                                                           4306      4326      4346    4366                                      layer 6                                                                        IR absorptive                                                                           4307      4327      4347    4367                                      layer 7                                                                        IR absorptive                                                                           4308      4328      4348    4368                                      layer 8                                                                        IR absorptive                                                                           4309      4329      4349    4369                                      layer 9                                                                        IR absorptive                                                                           4310      4330      4350    4370                                      layer 10                                                                       IR absorptive                                                                           4311      4331      4351    4371                                      layer 11                                                                       IR absorptive                                                                           4312      4332      4352    4372                                      layer 12                                                                       IR absorptive                                                                           4313      4333      4353    4373                                      layer 13                                                                       IR absorptive                                                                           4314      4334      4354    4374                                      layer 14                                                                       IR absorptive                                                                           4315      4335      4355    4375                                      layer 15                                                                       IR absorptive                                                                           4316      4336      4356    4376                                      layer 16                                                                       IR absorptive                                                                           4317      4337      4357    4377                                      layer 17                                                                       IR absorptive                                                                           4318      4338      4358    4378                                      layer 18                                                                       IR absorptive                                                                           4319      4339      4359    4379                                      layer 19                                                                       IR absorptive                                                                           4320      4340      4360    4380                                      layer 20                                                                       ______________________________________                                    

                  TABLE 75                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4401      4421      4441    4461                                      layer 1                                                                        IR absorptive                                                                           4402      4422      4442    4462                                      layer 2                                                                        IR absorptive                                                                           4403      4423      4443    4463                                      layer 3                                                                        IR absorptive                                                                           4404      4424      4444    4464                                      layer 4                                                                        IR absorptive                                                                           4405      4425      4445    4465                                      layer 5                                                                        IR absorptive                                                                           4406      4426      4446    4466                                      layer 6                                                                        IR absorptive                                                                           4407      4427      4447    4467                                      layer 7                                                                        IR absorptive                                                                           4408      4428      4448    4468                                      layer 8                                                                        IR absorptive                                                                           4409      4429      4449    4469                                      layer 9                                                                        IR absorptive                                                                           4410      4430      4450    4470                                      layer 10                                                                       IR absorptive                                                                           4411      4431      4451    4471                                      layer 11                                                                       IR absorptive                                                                           4412      4432      4452    4472                                      layer 12                                                                       IR absorptive                                                                           4413      4433      4453    4473                                      layer 13                                                                       IR absorptive                                                                           4414      4434      4454    4474                                      layer 14                                                                       IR absorptive                                                                           4415      4435      4455    4475                                      layer 15                                                                       IR absorptive                                                                           4416      4436      4456    4476                                      layer 16                                                                       IR absorptive                                                                           4417      4437      4457    4477                                      layer 17                                                                       IR absorptive                                                                           4418      4438      4458    4478                                      layer 18                                                                       IR absorptive                                                                           4419      4439      4459    4479                                      layer 19                                                                       IR absorptive                                                                           4420      4440      4460    4480                                      layer 20                                                                       ______________________________________                                    

                  TABLE 76                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4501      4521      4541    4561                                      layer 1                                                                        IR absorptive                                                                           4502      4522      4542    4562                                      layer 2                                                                        IR absorptive                                                                           4503      4523      4543    4563                                      layer 3                                                                        IR absorptive                                                                           4504      4524      4544    4564                                      layer 4                                                                        IR absorptive                                                                           4505      4525      4545    4565                                      layer 5                                                                        IR absorptive                                                                           4506      4526      4546    4566                                      layer 6                                                                        IR absorptive                                                                           4507      4527      4547    4567                                      layer 7                                                                        IR absorptive                                                                           4508      4528      4548    4568                                      layer 8                                                                        IR absorptive                                                                           4509      4529      4549    4569                                      layer 9                                                                        IR absorptive                                                                           4510      4530      4550    4570                                      layer 10                                                                       IR absorptive                                                                           4511      4531      4551    4571                                      layer 11                                                                       IR absorptive                                                                           4512      4532      4552    4572                                      layer 12                                                                       IR absorptive                                                                           4513      4533      4553    4573                                      layer 13                                                                       IR absorptive                                                                           4514      4534      4554    4574                                      layer 14                                                                       IR absorptive                                                                           4515      4535      4555    4575                                      layer 15                                                                       IR absorptive                                                                           4516      4536      4556    4576                                      layer 16                                                                       IR absorptive                                                                           4517      4537      4557    4577                                      layer 17                                                                       IR absorptive                                                                           4518      4538      4558    4578                                      layer 18                                                                       IR absorptive                                                                           4519      4539      4559    4579                                      layer 19                                                                       IR absorptive                                                                           4520      4540      4560    4580                                      layer 20                                                                       ______________________________________                                    

                  TABLE 77                                                         ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           4601      4621      4641    4661                                      layer 1                                                                        IR absorptive                                                                           4602      4622      4642    4662                                      layer 2                                                                        IR absorptive                                                                           4603      4623      4643    4663                                      layer 3                                                                        IR absorptive                                                                           4604      4624      4644    4664                                      layer 4                                                                        IR absorptive                                                                           4605      4625      4645    4665                                      layer 5                                                                        IR absorptive                                                                           4606      4626      4646    4666                                      layer 6                                                                        IR absorptive                                                                           4607      4627      4647    4667                                      layer 7                                                                        IR absorptive                                                                           4608      4628      4648    4668                                      layer 8                                                                        IR absorptive                                                                           4609      4629      4649    4669                                      layer 9                                                                        IR absorptive                                                                           4610      4630      4650    4670                                      layer 10                                                                       IR absorptive                                                                           4611      4631      4651    4671                                      layer 11                                                                       IR absorptive                                                                           4612      4632      4652    4672                                      layer 12                                                                       IR absorptive                                                                           4613      4633      4653    4673                                      layer 13                                                                       IR absorptive                                                                           4614      4634      4654    4674                                      layer 14                                                                       IR absorptive                                                                           4615      4635      4655    4675                                      layer 15                                                                       IR absorptive                                                                           4616      4636      4656    4676                                      layer 16                                                                       IR absorptive                                                                           4617      4637      4657    4677                                      layer 17                                                                       IR absorptive                                                                           4618      4638      4658    4678                                      layer 18                                                                       IR absorptive                                                                           4619      4639      4659    4679                                      layer 19                                                                       IR absorptive                                                                           4620      4640      4660    4680                                      layer 20                                                                       ______________________________________                                    

                                      TABLE 78                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35  3                                     injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    350   0.35 20                                     conductive                                                                           He        200                                                            layer                                                                          __________________________________________________________________________

                                      TABLE 79                                     __________________________________________________________________________         Gas used and its                                                                            Substrate    Inner                                                                               Layer                                       Drum                                                                               flow rate    temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   No. (SCCM)       (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     4701                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500  250    200   0.35 0.5                                             NH.sub.3                                                                               100                                                                4702                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500  250    200   0.40 0.5                                             H.sub.2 100                                                                    NH.sub.3                                                                               100                                                                4703                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500  250    200   0.35 0.5                                             NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        150                                                                               V                                                                   the cylinder                                                               __________________________________________________________________________

                                      TABLE 80                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    350   0.35 20                                     conductive                                                                           He        200                                                            layer                                                                          __________________________________________________________________________

                                      TABLE 81                                     __________________________________________________________________________         Gas used and its                                                                             Substrate    Inner                                                                               Layer                                      Drum                                                                               flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                                  No. (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                    __________________________________________________________________________     4801                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.5                                            NH.sub.3                                                                               100                                                                4802                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.40 0.5                                            H.sub.2 100                                                                    NH.sub.3                                                                               100                                                                4803                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.5                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        -150                                                                               V                                                                  the cylinder                                                               __________________________________________________________________________

                                      TABLE 82                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    350   0.35 20                                     conductive                                                                           He        200                                                            layer                                                                          __________________________________________________________________________

                                      TABLE 83                                     __________________________________________________________________________         Gas used and its                                                                             Substrate    Inner                                                                               Layer                                      Drum                                                                               flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                                  No. (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                    __________________________________________________________________________     4901                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.5                                            NH.sub.3                                                                               100                                                                4902                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.40 0.5                                            H.sub.2 100                                                                    NH.sub.3                                                                               100                                                                4903                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.5                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        -150                                                                               V                                                                  the cylinder                                                               __________________________________________________________________________

                                      TABLE 84                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Inter-                                                                               SiH.sub.4 10    250    150   0.35 0.3                                    mediate                                                                              CH.sub.4  400                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 85                                                         ______________________________________                                         Drum No.  5101      5102   5103    5104 5105                                   ______________________________________                                         a (μm) 25        50     50      12   12                                     b (μm) 0.8       2.5    0.8     1.5  0.3                                    ______________________________________                                    

                  TABLE 86                                                         ______________________________________                                         Drum No.  5201      5202   5203    5204 5205                                   ______________________________________                                         c (μm) 50        100    100     30   30                                     d (μm) 1.2       5      0.9     2.5  0.4                                    ______________________________________                                    

                                      TALBE 87                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer NO        4                                                              Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 88                                                         ______________________________________                                         Intial                                  Increase                               electri-                                                                       fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage   Ghost   image   flow   image                                  ______________________________________                                         ○                                                                              ○  ○                                                                               ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                                     Degree of                                                                               Degree of                                 Surface                                                                               Break down  Abrasion background                                                                              residual                                  abrasion                                                                              voltage     resistance                                                                              fogginess                                                                               stress                                    ______________________________________                                         ○                                                                              ○    ○ ⊚                                                                        ⊚                          ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 89                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Photo-                                                                               SiH.sub.4 200   250    250   0.35 20                                     conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                         layer NO        4                                                              Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.40 0.5                                    layer H.sub.2   100                                                                  NH.sub.3  300                                                            __________________________________________________________________________

                  TABLE 90                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ○                                                                               ○                                                                               ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                  TABLE 91                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage   Ghost   image   flow   image                                  ______________________________________                                         ○                                                                              ○  ○                                                                               ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 92                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 93                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ⊚                                                                      ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 94                                     __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                         layer NH.sub.3                                                                               100                                                              __________________________________________________________________________

                  TABLE 95                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ⊚                                                                      ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 96                                     __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 97                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ○                                                                              ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                Break            Inter- Degree of                                                                              Degree of                               Surface                                                                               down    Abrasion ference                                                                               background                                                                             residual                                abrasion                                                                              voltage resistance                                                                              fringe fogginess                                                                              stress                                  ______________________________________                                         ○                                                                              ○                                                                               ○ ○                                                                              ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 98                                     __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Contact                                                                              SiH.sub.4                                                                               20                                                                               250    100   0.25 0.5                                         layer N.sub.2 100                                                              Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                         layer NH.sub.3                                                                               100                                                              __________________________________________________________________________

                  TABLE 99                                                         ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ⊚                                                                      ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ○                                   ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 100                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 101                                                        ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ⊚                                                                      ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                Break            Inter- Degree of                                                                              Degree of                               Surface                                                                               down    Abrasion ference                                                                               background                                                                             residual                                abrasion                                                                              voltage resistance                                                                              fringe fogginess                                                                              stress                                  ______________________________________                                         ○                                                                              ○                                                                               ○  ○                                                                             ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 102                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                  TABLE 103                                                        ______________________________________                                         Initial                                 Increase                               electri-                                of                                     fication                                                                              Residual          Defective                                                                              Image  defective                              efficiency                                                                            voltage  Ghost    image   flow   image                                  ______________________________________                                         ⊚                                                                      ○ ○ ⊚                                                                       ⊚                                                                      ○                               ______________________________________                                                 Break              Degree of                                                                               Degree of                                  Surface down     Abrasion  background                                                                              residual                                   abrasion                                                                               voltage  resistance                                                                               fogginess                                                                               stress                                     ______________________________________                                         ○                                                                               ○ ○  ⊚                                                                        ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 104                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250    50    0.05 0.5                                    layer N.sub.2   10                                                             IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.3 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.5                                    layer NH.sub.3  100                                                            __________________________________________________________________________

                                      TABLE 105                                    __________________________________________________________________________     Initial electrification                                                                   Residual   Defective                                                                             Image                                                                               Increase of                                  efficiency voltage                                                                              Ghost                                                                               image  flow defective image                              __________________________________________________________________________     ⊚                                                                          ○                                                                             ○                                                                            ⊚                                                                      ⊚                                                                    ○                                     __________________________________________________________________________     Surface                                                                             Breakdown                                                                             Abrasion                                                                            Interference                                                                          Degree of background                                                                      Degree of                                   abrasion                                                                            voltage                                                                               resistance                                                                          fringe fogginess  residual stress                             __________________________________________________________________________     ○                                                                            ○                                                                              ○                                                                            ○                                                                              ⊚                                                                          ⊚                            __________________________________________________________________________      ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 106                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               6701 6706 6711 6716 6721 6726 6731                                       conductive                                                                     layer 1                                                                        Photo-                                                                               6702 6707 6712 6717 6722 6727 6732                                       conductive                                                                     layer 2                                                                        Photo-                                                                               6703 6708 6713 6718 6723 6728 6733                                       conductive                                                                     layer 3                                                                        Photo-                                                                               6704 6709 6714 6719 6724 6729 6734                                       conductive                                                                     layer 5                                                                        Photo-                                                                               6705 6710 6715 6720 6725 6730 6735                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 107                                    __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.5                                          layer                                                                               H.sub.2 100                                                                    NH.sub.3                                                                               300                                                               __________________________________________________________________________

                                      TABLE 108                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               6801 6807 6813 6819 6825 6831 6837                                       conductive                                                                     layer 1                                                                        Photo-                                                                               6802 6808 6814 6820 6826 6832 6838                                       conductive                                                                     layer 2                                                                        Photo-                                                                               6803 6809 6815 6821 6827 6833 6839                                       conductive                                                                     layer 3                                                                        Photo-                                                                               6804 6810 6816 6822 6828 6834 6840                                       conductive                                                                     layer 4                                                                        Photo-                                                                               6805 6811 6817 6823 6829 6835 6841                                       conductive                                                                     layer 5                                                                        Photo-                                                                               6806 6812 6818 6824 6830 6836 6842                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 109                                    __________________________________________________________________________          Gas used and its                                                                             Substrate    Inner                                                                               Layer                                     Name of                                                                             flow rate     temperature                                                                           Rf power                                                                             pressure                                                                            thickness                                 layer                                                                               (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                   __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.5                                       layer                                                                               NH.sub.3                                                                               100                                                                    Bias voltage of                                                                the cylinder                                                                           +150                                                                               V                                                             __________________________________________________________________________

                                      TABLE 110                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               6901 6907 6913 6919 6925 6931 6937                                       conductive                                                                     layer 1                                                                        Photo-                                                                               6902 6908 6914 6920 6926 6932 6938                                       conductive                                                                     layer 2                                                                        Photo-                                                                               6903 6909 6915 6921 6927 6933 6939                                       conductive                                                                     layer 3                                                                        Photo-                                                                               6904 6910 6916 6922 6928 6934 6940                                       conductive                                                                     layer 4                                                                        Photo-                                                                               6905 6911 6917 6923 6929 6935 6941                                       conducitve                                                                     layer 5                                                                        Photo-                                                                               6906 6912 6918 6924 6930 6936 6942                                       conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 111                                    __________________________________________________________________________     Photo-   Photo-                                                                               Photo-                                                                              Photo-                                                                               Photo-                                               conduc-  conduc-                                                                              conduc-                                                                             conduc-                                                                              conduc-                                              tive     tive  tive tive  tive                                                 Layer 1  Layer 2                                                                              Layer 3                                                                             Layer 5                                                                              Layer 6                                              __________________________________________________________________________     Drum                                                                               7001 7002  7003 7004  7005                                                 No.                                                                            __________________________________________________________________________

                                      TABLE 112                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               7101  7102  7103  7104  7105  7106                                         No.                                                                            __________________________________________________________________________

                                      TABLE 113                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               7201  7202  7203  7204  7205  7206                                         No.                                                                            __________________________________________________________________________

                  TABLE 114                                                        ______________________________________                                                       Drum                                                                           No.                                                              ______________________________________                                         IR Absorptive   7301                                                           Layer 1                                                                        IR Absorptive   7302                                                           Layer 2                                                                        IR Absorptive   7303                                                           Layer 3                                                                        IR Absorptive   7304                                                           Layer 4                                                                        IR Absorptive   7305                                                           Layer 5                                                                        IR Absorptive   7306                                                           Layer 6                                                                        IR Absorptive   7307                                                           Layer 7                                                                        IR Absorptive   7308                                                           Layer 8                                                                        IR Absorptive   7309                                                           Layer 9                                                                        IR Absorptive   7310                                                           Layer 10                                                                       IR Absorptive   7311                                                           Layer 11                                                                       IR Absorptive   7312                                                           Layer 12                                                                       IR Absorptive   7313                                                           Layer 13                                                                       IR Absorptive   7314                                                           Layer 14                                                                       IR Absorptive   7315                                                           Layer 15                                                                       IR Absorptive   7316                                                           Layer 17                                                                       IR Absorptive   7317                                                           Layer 18                                                                       IR Absorptive   7318                                                           Layer 19                                                                       IR Absorptive   7319                                                           Layer 20                                                                       ______________________________________                                    

                                      TABLE 115                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                          Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                      No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 5                                                                              layer 6                                         __________________________________________________________________________     IR absorptive                                                                         7401  7421  7441  7461  7481                                            layer 1                                                                        IR absorptive                                                                         7402  7422  7442  7462  7482                                            layer 2                                                                        IR absorptive                                                                         7403  7423  7443  7463  7483                                            layer 3                                                                        IR absorptive                                                                         7404  7424  7444  7464  7484                                            layer 4                                                                        IR absorptive                                                                         7405  7425  7445  7465  7485                                            layer 5                                                                        IR absorptive                                                                         7406  7426  7446  7466  7486                                            layer 6                                                                        IR absorptive                                                                         7407  7427  7477  7467  7487                                            layer 7                                                                        IR absorptive                                                                         7408  7428  7448  7468  7488                                            layer 8                                                                        IR absorptive                                                                         7409  7429  7449  7469  7489                                            layer 9                                                                        IR absorptive                                                                         7410  7430  7450  7470  7490                                            layer 10                                                                       IR absorptive                                                                         7411  7431  7451  7471  7491                                            layer 11                                                                       IR absorptive                                                                         7412  7432  7452  7472  7492                                            layer 12                                                                       IR absorptive                                                                         7413  7433  7453  7473  7493                                            layer 13                                                                       IR absorptive                                                                         7414  7434  7454  7474  7494                                            layer 14                                                                       IR absorptive                                                                         7415  7435  7455  7475  7495                                            layer 15                                                                       IR absorptive                                                                         7416  7436  7456  7476  7496                                            layer 16                                                                       IR absorptive                                                                         7417  7437  7457  7477  7497                                            layer 17                                                                       IR absorptive                                                                         7418  7438  7458  7478  7498                                            layer 18                                                                       IR absorptive                                                                         7419  7439  7459  7479  7499                                            layer 19                                                                       IR absorptive                                                                         7420  7440  7460  7480  74100                                           layer 20                                                                       __________________________________________________________________________

                                      TABLE 116                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         7501  7521  7541  7561  7581  75101                                     layer 1                                                                        IR absorptive                                                                         7502  7522  7542  7562  7582  75102                                     layer 2                                                                        IR absorptive                                                                         7503  7523  7543  7563  7583  75103                                     layer 3                                                                        IR absorptive                                                                         7504  7524  7544  7564  7584  75104                                     layer 4                                                                        IR absorptive                                                                         7505  7525  7545  7565  7585  75105                                     layer 5                                                                        IR absorptive                                                                         7506  7526  7546  7566  7586  75106                                     layer 6                                                                        IR absorptive                                                                         7507  7527  7547  7567  7587  75107                                     layer 7                                                                        IR absorptive                                                                         7508  7528  7548  7568  7588  75108                                     layer 8                                                                        IR absorptive                                                                         7509  7529  7549  7569  7589  75109                                     layer 9                                                                        IR absorptive                                                                         7510  7530  7550  7570  7590  75110                                     layer 10                                                                       IR absorptive                                                                         7511  7531  7551  7571  7591  75111                                     layer 11                                                                       IR absorptive                                                                         7512  7532  7552  7572  7592  75112                                     layer 12                                                                       IR absorptive                                                                         7513  7533  7553  7573  7593  75113                                     layer 13                                                                       IR absorptive                                                                         7514  7534  7554  7574  7594  75114                                     layer 14                                                                       IR absorptive                                                                         7515  7535  7555  7575  7595  75115                                     layer 15                                                                       IR absorptive                                                                         7516  7536  7556  7576  7596  75116                                     layer 16                                                                       IR absorptive                                                                         7517  7537  7557  7577  7597  75117                                     layer 17                                                                       IR absorptive                                                                         7518  7538  7558  7578  7598  75118                                     layer 18                                                                       IR absorptive                                                                         7519  7539  7559  7579  7599  75119                                     layer 19                                                                       IR absorptive                                                                         7520  7540  7560  7580  75100 75120                                     layer 20                                                                       __________________________________________________________________________

                                      TABLE 117                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         7601  7621  7641  7661  7681  76101                                     layer 1                                                                        IR absorptive                                                                         7602  7622  7642  7662  7682  76102                                     layer 2                                                                        IR absorptive                                                                         7603  7623  7643  7663  7683  76103                                     layer 3                                                                        IR absorptive                                                                         7604  7624  7644  7664  7684  76104                                     layer 4                                                                        IR absorptive                                                                         7605  7625  7645  7665  7685  76105                                     layer 5                                                                        IR absorptive                                                                         7606  7626  7646  7666  7686  76106                                     layer 6                                                                        IR absorptive                                                                         7607  7627  7647  7667  7687  76107                                     layer 7                                                                        IR absorptive                                                                         7608  7628  7648  7668  7688  76108                                     layer 8                                                                        IR absorptive                                                                         7609  7629  7649  7669  7689  76109                                     layer 9                                                                        IR absorptive                                                                         7610  7630  7650  7670  7690  76110                                     layer 10                                                                       IR absorptive                                                                         7611  7631  7651  7671  7691  76111                                     layer 11                                                                       IR absorptive                                                                         7612  7632  7652  7672  7692  76112                                     layer 12                                                                       IR absorptive                                                                         7613  7633  7653  7673  7693  76113                                     layer 13                                                                       IR absorptive                                                                         7614  7634  7654  7674  7694  76114                                     layer 14                                                                       IR absorptive                                                                         7615  7635  7655  7675  7695  76115                                     layer 15                                                                       IR absorptive                                                                         7616  7636  7656  7676  7696  76116                                     layer 16                                                                       IR absorptive                                                                         7617  7637  7657  7677  7697  76117                                     layer 17                                                                       IR absorptive                                                                         7618  7638  7658  7678  7698  76118                                     layer 18                                                                       IR absorptive                                                                         7619  7639  7659  7679  7699  76119                                     layer 19                                                                       IR absorptive                                                                         7620  7640  7660  7680  76100 76120                                     layer 20                                                                       __________________________________________________________________________

                  TABLE 118                                                        ______________________________________                                                Contact    Contact  Contact                                                    Layer 2    Layer 3  Layer 4                                             ______________________________________                                         Drum     7701         7702     7703                                            No.                                                                            ______________________________________                                    

                  TABLE 119                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   7801      7807      7813    7819                                      conductive                                                                     layer 1                                                                        Photo-   7802      7808      7814    7820                                      conductive                                                                     layer 2                                                                        Photo-   7803      7809      7815    7821                                      conductive                                                                     layer 3                                                                        Photo-   7804      7810      7816    7822                                      conductive                                                                     layer 4                                                                        Photo-   7805      7811      7817    7823                                      conductive                                                                     layer 5                                                                        Photo-   7806      7812      7818    7824                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 120                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   7901      7907      7913    7919                                      conductive                                                                     layer 1                                                                        Photo-   7902      7908      7914    7920                                      conductive                                                                     layer 2                                                                        Photo-   7903      7909      7915    7921                                      conductive                                                                     layer 3                                                                        Photo-   7904      7910      7916    7922                                      conductive                                                                     layer 4                                                                        Photo-   7905      7911      7917    7923                                      conductive                                                                     layer 5                                                                        Photo-   7906      7912      7918    7924                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 121                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   8001      8007      8013    8019                                      conductive                                                                     layer 1                                                                        Photo-   8002      8008      8014    8020                                      conductive                                                                     layer 2                                                                        Photo-   8003      8009      8015    8021                                      conductive                                                                     layer 3                                                                        Photo-   8004      8010      8016    8022                                      conductive                                                                     layer 4                                                                        Photo-   8005      8011      8017    8023                                      conductive                                                                     layer 5                                                                        Photo-   8006      8012      8018    8024                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 122                                                        ______________________________________                                                       Drum                                                                           No.                                                              ______________________________________                                                IR absorptive                                                                           8101                                                                  layer 1                                                                        IR absorptive                                                                           8102                                                                  layer 2                                                                        IR absorptive                                                                           8103                                                                  layer 3                                                                        IR absorptive                                                                           8104                                                                  layer 4                                                                        IR absorptive                                                                           8105                                                                  layer 5                                                                        IR absorptive                                                                           8106                                                                  layer 6                                                                        IR absorptive                                                                           8107                                                                  layer 7                                                                        IR absorptive                                                                           8108                                                                  layer 8                                                                        IR absorptive                                                                           8109                                                                  layer 9                                                                        IR absorptive                                                                           8110                                                                  layer 10                                                                       IR absorptive                                                                           8111                                                                  layer 11                                                                       IR absorptive                                                                           8112                                                                  layer 12                                                                       IR absorptive                                                                           8113                                                                  layer 13                                                                       IR absorptive                                                                           8114                                                                  layer 14                                                                       IR absorptive                                                                           8115                                                                  layer 15                                                                       IR absorptive                                                                           8117                                                                  layer 17                                                                       IR absorptive                                                                           8118                                                                  layer 18                                                                       IR absorptive                                                                           8119                                                                  layer 19                                                                       IR absorptive                                                                           8120                                                                  layer 20                                                                ______________________________________                                    

                  TABLE 123                                                        ______________________________________                                                    Photo-      Photo-    Photo-                                        Drum       conductive  conductive                                                                               conductive                                    No.        layer 4     layer 5   layer 7                                       ______________________________________                                         IR absorptive                                                                             8201        8221      8241                                          layer 1                                                                        IR absorptive                                                                             8202        8222      8242                                          layer 2                                                                        IR absorptive                                                                             8203        8223      8243                                          layer 3                                                                        IR absorptive                                                                             8204        8224      8244                                          layer 4                                                                        IR absorptive                                                                             8205        8225      8245                                          layer 5                                                                        IR absorptive                                                                             8206        8226      8246                                          layer 6                                                                        IR absorptive                                                                             8207        8227      8247                                          layer 7                                                                        IR absorptive                                                                             8208        8228      8248                                          layer 8                                                                        IR absorptive                                                                             8209        8229      8249                                          layer 9                                                                        IR absorptive                                                                             8210        8230      8250                                          layer 10                                                                       IR absorptive                                                                             8211        8231      8251                                          layer 11                                                                       IR absorptive                                                                             8212        8232      8252                                          layer 12                                                                       IR absorptive                                                                             8213        8233      8253                                          layer 13                                                                       IR absorptive                                                                             8214        8234      8254                                          layer 14                                                                       IR absorptive                                                                             8215        8235      8255                                          layer 15                                                                       IR absorptive                                                                             8216        8236      8256                                          layer 16                                                                       IR absorptive                                                                             8217        8237      8257                                          layer 17                                                                       IR absorptive                                                                             8218        8238      8258                                          layer 18                                                                       IR absorptive                                                                             8219        8239      8259                                          layer 19                                                                       IR absorptive                                                                             8220        8240      8260                                          layer 20                                                                       ______________________________________                                    

                  TABLE 124                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           8301      8321      8341    8361                                      layer 1                                                                        IR absorptive                                                                           8302      8322      8342    8362                                      layer 2                                                                        IR absorptive                                                                           8303      8323      8343    8363                                      layer 3                                                                        IR absorptive                                                                           8304      8324      8344    8364                                      layer 4                                                                        IR absorptive                                                                           8305      8325      8345    8365                                      layer 5                                                                        IR absorptive                                                                           8306      8326      8346    8366                                      layer 6                                                                        IR absorptive                                                                           8307      8327      8347    8367                                      layer 7                                                                        IR absorptive                                                                           8308      8328      8348    8368                                      layer 8                                                                        IR absorptive                                                                           8309      8329      8349    8369                                      layer 9                                                                        IR absorptive                                                                           8310      8330      8350    8370                                      layer 10                                                                       IR absorptive                                                                           8311      8331      8351    8371                                      layer 11                                                                       IR absorptive                                                                           8312      8332      8352    8372                                      layer 12                                                                       IR absorptive                                                                           8313      8333      8353    8373                                      layer 13                                                                       IR absorptive                                                                           8314      8334      8354    8374                                      layer 14                                                                       IR absorptive                                                                           8315      8335      8355    8375                                      layer 15                                                                       IR absorptive                                                                           8316      8336      8356    8376                                      layer 16                                                                       IR absorptive                                                                           8317      8337      8357    8377                                      layer 17                                                                       IR absorptive                                                                           8318      8338      8358    8378                                      layer 18                                                                       IR absorptive                                                                           8319      8339      8359    8379                                      layer 19                                                                       IR absorptive                                                                           8320      8340      8360    8380                                      layer 20                                                                       ______________________________________                                    

                  TABLE 125                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           8401      8421      8441    8461                                      layer 1                                                                        IR absorptive                                                                           8402      8422      8442    8462                                      layer 2                                                                        IR absorptive                                                                           8403      8423      8443    8463                                      layer 3                                                                        IR absorptive                                                                           8404      8424      8444    8464                                      layer 4                                                                        IR absorptive                                                                           8405      8425      8445    8465                                      layer 5                                                                        IR absorptive                                                                           8406      8426      8446    8466                                      layer 6                                                                        IR absorptive                                                                           8407      8427      8447    8467                                      layer 7                                                                        IR absorptive                                                                           8408      8428      8448    8468                                      layer 8                                                                        IR absorptive                                                                           8409      8429      8449    8469                                      layer 9                                                                        IR absorptive                                                                           8410      8430      8450    8470                                      layer 10                                                                       IR absorptive                                                                           8411      8431      8451    8471                                      layer 11                                                                       IR absorptive                                                                           8412      8432      8452    8472                                      layer 12                                                                       IR absorptive                                                                           8413      8433      8453    8473                                      layer 13                                                                       IR absorptive                                                                           8414      8434      8454    8474                                      layer 14                                                                       IR absorptive                                                                           8415      8435      8455    8475                                      layer 15                                                                       IR absorptive                                                                           8416      8436      8456    8476                                      layer 16                                                                       IR absorptive                                                                           8417      8437      8457    8477                                      layer 17                                                                       IR absorptive                                                                           8418      8438      8458    8478                                      layer 18                                                                       IR absorptive                                                                           8419      8439      8459    8479                                      layer 19                                                                       IR absorptive                                                                           8420      8440      8460    8480                                      layer 20                                                                       ______________________________________                                    

                                      TABLE 126                                    __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               8501 8502 8503 8504 8505 8506 8507                                         No.                                                                            __________________________________________________________________________

                  TABLE 127                                                        ______________________________________                                                Charge  Charge   Charge                                                                               Charge                                                                               Charge Charge                                     injec-  injec-   injec-                                                                               injec-                                                                               injec- injec-                                     tion    tion     tion  tion  tion   tion                                       inhibi- inhibi-  inhibi-                                                                              inhibi-                                                                              inhibi-                                                                               inhibi-                             Drum   tion    tion     tion  tion  tion   tion                                No.    layer 2 layer 3  layer 4                                                                              layer 5                                                                              layer 6                                                                               layer 7                             ______________________________________                                         Contact                                                                               8601    8609     8617  8625  8633   8641                                layer 1                                                                        Contact                                                                               8602    8610     8618  8626  8634   8642                                layer 2                                                                        Contact                                                                               8603    8611     8619  8627  8635   8643                                layer 3                                                                        Contact                                                                               8604    8612     8620  8628  8636   8644                                layer 4                                                                        Contact                                                                               8605    8613     8621  8629  8637   8645                                layer 5                                                                        Contact                                                                               8606    8614     8622  8630  8638   8646                                layer 6                                                                        Contact                                                                               8607    8615     8623  8631  8639   8647                                layer 7                                                                        Contact                                                                               8608    8616     8624  8662  8640   8648                                layer 8                                                                        ______________________________________                                    

                                      TABLE 128                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             8701 8709 8717 8725 8733 8741 8749                                        layer 1                                                                        Contact                                                                             8702 8710 8718 8726 8734 8742 8750                                        layer 2                                                                        Contact                                                                             8703 8711 8719 8727 8735 8743 8751                                        layer 3                                                                        Contact                                                                             8704 8712 8720 8728 8736 8744 8752                                        layer 4                                                                        Contact                                                                             8705 8713 8721 8729 8737 8745 8753                                        layer 5                                                                        Contact                                                                             8706 8714 8722 8730 8738 8746 8754                                        layer 6                                                                        Contact                                                                             8707 8715 8723 8731 8739 8747 8755                                        layer 7                                                                        Contact                                                                             8708 8716 8724 8732 8740 8748 8756                                        layer 8                                                                        __________________________________________________________________________

                                      TABLE 129                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             8801 8809 8817 8825 8833 8841 8849                                        layer 1                                                                        Contact                                                                             8802 8810 8818 8826 8834 8842 8850                                        layer 2                                                                        Contact                                                                             8803 8811 8819 8827 8835 8843 8851                                        layer 3                                                                        Contact                                                                             8804 8812 8820 8828 8836 8844 8852                                        layer 4                                                                        Contact                                                                             8805 8813 8821 8829 8837 8845 8853                                        layer 5                                                                        Contact                                                                             8806 8814 8822 8830 8838 8846 8854                                        layer 6                                                                        Contact                                                                             8807 8815 8823 8831 8839 8847 8855                                        layer 7                                                                        Contact                                                                             8808 8816 8824 8832 8840 8848 8856                                        layer 8                                                                        __________________________________________________________________________

                  TABLE 130                                                        ______________________________________                                         Charge            Charge   Charge                                              injection         injection                                                                               injection                                           inhibition        inhibition                                                                              inhibition                                          layer 4           layer 6  layer 7                                             ______________________________________                                         Drum    8901          8902     8903                                            No.                                                                            ______________________________________                                    

                  TABLE 131                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   9001      9003      9005    9007                                      conductive                                                                     layer 5                                                                        Photo-   9002      9004      9006    9008                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 132                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   9101      9104      9107    9110                                      conductive                                                                     layer 4                                                                        Photo-   9102      9105      9108    9111                                      conductive                                                                     layer 5                                                                        Photo-   9103      9106      9109    9112                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 133                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   9201      9204      9207    9210                                      conductive                                                                     layer 4                                                                        Photo-   9202      9205      9208    9211                                      conductive                                                                     layer 5                                                                        Photo-   9203      9206      9209    9212                                      conductive                                                                     layer 6                                                                        ______________________________________                                    

                                      TABLE 134                                    __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                          layer 1                                                                             NH.sub.3                                                                               100                                                               __________________________________________________________________________

                  TABLE 135                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9301      9321      9341    9361                                      layer 1                                                                        IR absorptive                                                                           9302      9322      9342    9362                                      layer 2                                                                        IR absorptive                                                                           9303      9323      9343    9363                                      layer 3                                                                        IR absorptive                                                                           9304      9324      9344    9364                                      layer 4                                                                        IR absorptive                                                                           9305      9325      9345    9365                                      layer 5                                                                        IR absorptive                                                                           9306      9326      9346    9366                                      layer 6                                                                        IR absorptive                                                                           9307      9327      9347    9367                                      layer 7                                                                        IR absorptive                                                                           9308      9328      9348    9368                                      layer 8                                                                        IR absorptive                                                                           9309      9329      9349    9369                                      layer 9                                                                        IR absorptive                                                                           9310      9330      9350    9370                                      layer 10                                                                       IR absorptive                                                                           9311      9331      9351    9371                                      layer 11                                                                       IR absorptive                                                                           9312      9332      9352    9372                                      layer 12                                                                       IR absorptive                                                                           9313      9333      9353    9373                                      layer 13                                                                       IR absorptive                                                                           9314      9334      9354    9374                                      layer 14                                                                       IR absorptive                                                                           9315      9335      9355    9375                                      layer 15                                                                       IR absorptive                                                                           9316      9336      9356    9376                                      layer 16                                                                       IR absorptive                                                                           9317      9337      9357    9377                                      layer 17                                                                       IR absorptive                                                                           9318      9338      9358    9378                                      layer 18                                                                       IR absorptive                                                                           9319      9339      9359    9379                                      layer 19                                                                       IR absorptive                                                                           9320      9340      9360    9380                                      layer 20                                                                       ______________________________________                                    

                  TABLE 136                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9401      9421      9441    9461                                      layer 1                                                                        IR absorptive                                                                           9402      9422      9442    9462                                      layer 2                                                                        IR absorptive                                                                           9403      9423      9443    9463                                      layer 3                                                                        IR absorptive                                                                           9404      9424      9444    9464                                      layer 4                                                                        IR absorptive                                                                           9405      9425      9445    9465                                      layer 5                                                                        IR absorptive                                                                           9406      9426      9446    9466                                      layer 6                                                                        IR absorptive                                                                           9407      9427      9447    9467                                      layer 7                                                                        IR absorptive                                                                           9408      9428      9448    9468                                      layer 8                                                                        IR absorptive                                                                           9409      9429      9449    9469                                      layer 9                                                                        IR absorptive                                                                           9410      9430      9450    9470                                      layer 10                                                                       IR absorptive                                                                           9411      9431      9451    9471                                      layer 11                                                                       IR absorptive                                                                           9412      9432      9452    9472                                      layer 12                                                                       IR absorptive                                                                           9413      9433      9453    9473                                      layer 13                                                                       IR absorptive                                                                           9414      9434      9454    9474                                      layer 14                                                                       IR absorptive                                                                           9415      9435      9455    9475                                      layer 15                                                                       IR absorptive                                                                           9416      9436      9456    9476                                      layer 16                                                                       IR absorptive                                                                           9417      9437      9457    9477                                      layer 17                                                                       IR absorptive                                                                           9418      9438      9458    9478                                      layer 18                                                                       IR absorptive                                                                           9419      9439      9459    9479                                      layer 19                                                                       IR absorptive                                                                           9420      9440      9460    9480                                      layer 20                                                                       ______________________________________                                    

                  TABLE 137                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9501      9521      9541    9561                                      layer 1                                                                        IR absorptive                                                                           9502      9522      9542    9562                                      layer 2                                                                        IR absorptive                                                                           9503      9523      9543    9563                                      layer 3                                                                        IR absorptive                                                                           9504      9524      9544    9564                                      layer 4                                                                        IR absorptive                                                                           9505      9525      9545    9565                                      layer 5                                                                        IR absorptive                                                                           9506      9526      9546    9566                                      layer 6                                                                        IR absorptive                                                                           9507      9527      9547    9567                                      layer 7                                                                        IR absorptive                                                                           9508      9528      9548    9568                                      layer 8                                                                        IR absorptive                                                                           9509      9529      9549    9569                                      layer 9                                                                        IR absorptive                                                                           9510      9530      9550    9570                                      layer 10                                                                       IR absorptive                                                                           9511      9531      9551    9571                                      layer 11                                                                       IR absorptive                                                                           9512      9532      9552    9572                                      layer 12                                                                       IR absorptive                                                                           9513      9533      9553    9573                                      layer 13                                                                       IR absorptive                                                                           9514      9534      9554    9574                                      layer 14                                                                       IR absorptive                                                                           9515      9535      9555    9575                                      layer 15                                                                       IR absorptive                                                                           9516      9536      9556    9576                                      layer 16                                                                       IR absorptive                                                                           9517      9537      9557    9577                                      layer 17                                                                       IR absorptive                                                                           9518      9538      9558    9578                                      layer 18                                                                       IR absorptive                                                                           9519      9539      9559    9579                                      layer 19                                                                       IR absorptive                                                                           9520      9540      9560    9580                                      layer 20                                                                       ______________________________________                                    

                  TABLE 138                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9601      9621      9641    9661                                      layer 1                                                                        IR absorptive                                                                           9602      9622      9642    9662                                      layer 2                                                                        IR absorptive                                                                           9603      9623      9643    9663                                      layer 3                                                                        IR absorptive                                                                           9604      9624      9644    9664                                      layer 4                                                                        IR absorptive                                                                           9605      9625      9645    9665                                      layer 5                                                                        IR absorptive                                                                           9606      9626      9646    9666                                      layer 6                                                                        IR absorptive                                                                           9607      9627      9647    9667                                      layer 7                                                                        IR absorptive                                                                           9608      9628      9648    9668                                      layer 8                                                                        IR absorptive                                                                           9609      9629      9649    9669                                      layer 9                                                                        IR absorptive                                                                           9610      9630      9650    9670                                      layer 10                                                                       IR absorptive                                                                           9611      9631      9651    9671                                      layer 11                                                                       IR absorptive                                                                           9612      9632      9652    9672                                      layer 12                                                                       IR absorptive                                                                           9613      9633      9653    9673                                      layer 13                                                                       IR absorptive                                                                           9614      9634      9654    9674                                      layer 14                                                                       IR absorptive                                                                           9615      9635      9655    9675                                      layer 15                                                                       IR absorptive                                                                           9616      9636      9656    9676                                      layer 16                                                                       IR absorptive                                                                           9617      9637      9657    9677                                      layer 17                                                                       IR absorptive                                                                           9618      9638      9658    9678                                      layer 18                                                                       IR absorptive                                                                           9619      9639      9659    9679                                      layer 19                                                                       IR absorptive                                                                           9620      9640      9660    9680                                      layer 20                                                                       ______________________________________                                    

                  TABLE 139                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9701      9721      9741    9761                                      layer 1                                                                        IR absorptive                                                                           9702      9722      9742    9762                                      layer 2                                                                        IR absorptive                                                                           9703      9723      9743    9763                                      layer 3                                                                        IR absorptive                                                                           9704      9724      9744    9764                                      layer 4                                                                        IR absorptive                                                                           9705      9725      9745    9765                                      layer 5                                                                        IR absorptive                                                                           9706      9726      9746    9766                                      layer 6                                                                        IR absorptive                                                                           9707      9727      9747    9767                                      layer 7                                                                        IR absorptive                                                                           9708      9728      9748    9768                                      layer 8                                                                        IR absorptive                                                                           9709      9729      9749    9769                                      layer 9                                                                        IR absorptive                                                                           9710      9730      9750    9770                                      layer 10                                                                       IR absorptive                                                                           9711      9731      9751    9771                                      layer 11                                                                       IR absorptive                                                                           9712      9732      9752    9772                                      layer 12                                                                       IR absorptive                                                                           9713      9733      9753    9773                                      layer 13                                                                       IR absorptive                                                                           9714      9734      9754    9774                                      layer 14                                                                       IR absorptive                                                                           9715      9735      9755    9775                                      layer 15                                                                       IR absorptive                                                                           9716      9736      9756    9776                                      layer 16                                                                       IR absorptive                                                                           9717      9737      9757    9777                                      layer 17                                                                       IR absorptive                                                                           9718      9738      9758    9778                                      layer 18                                                                       IR absorptive                                                                           9719      9739      9759    9779                                      layer 19                                                                       IR absorptive                                                                           9720      9740      9760    9780                                      layer 20                                                                       ______________________________________                                    

                  TABLE 140                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           9801      9821      9841    9861                                      layer 1                                                                        IR absorptive                                                                           9802      9822      9842    9862                                      layer 2                                                                        IR absorptive                                                                           9803      9823      9843    9863                                      layer 3                                                                        IR absorptive                                                                           9804      9824      9844    9864                                      layer 4                                                                        IR absorptive                                                                           9805      9825      9845    9865                                      layer 5                                                                        IR absorptive                                                                           9806      9826      9846    9866                                      layer 6                                                                        IR absorptive                                                                           9807      9827      9847    9867                                      layer 7                                                                        IR absorptive                                                                           9808      9828      9848    9868                                      layer 8                                                                        IR absorptive                                                                           9809      9829      9849    9869                                      layer 9                                                                        IR absorptive                                                                           9810      9830      9850    9870                                      layer 10                                                                       IR absorptive                                                                           9811      9831      9851    9871                                      layer 11                                                                       IR absorptive                                                                           9812      9832      9852    9872                                      layer 12                                                                       IR absorptive                                                                           9813      9833      9853    9873                                      layer 13                                                                       IR absorptive                                                                           9814      9834      9854    9874                                      layer 14                                                                       IR absorptive                                                                           9815      9835      9855    9875                                      layer 15                                                                       IR absorptive                                                                           9816      9836      9856    9876                                      layer 16                                                                       IR absorptive                                                                           9817      9837      9857    9877                                      layer 17                                                                       IR absorptive                                                                           9818      9038      9858    9878                                      layer 18                                                                       IR absorptive                                                                           9819      9839      9859    9879                                      layer 19                                                                       IR absorptive                                                                           9820      9840      9860    9880                                      layer 20                                                                       ______________________________________                                    

                                      TABLE 141                                    __________________________________________________________________________         Gas used and its                                                                          Substrate    Inner                                                                               Layer                                         Drum                                                                               flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                     No. (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                       __________________________________________________________________________     9901                                                                               B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                9902                                                                               B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.5                                               H.sub.2 100                                                                    NH.sub.3                                                                               300                                                                9903                                                                               B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                Bias voltage of                                                                the cylinder +100 V                                                            __________________________________________________________________________

                                      TABLE 142                                    __________________________________________________________________________         Gas used and its                                                                          Substrate    Inner                                                                               Layer                                         Drum                                                                               flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                     No. (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                       __________________________________________________________________________     10001                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                10002                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.5                                               H.sub.2 100                                                                    NH.sub.3                                                                               300                                                                10003                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                Bias voltage of                                                                the cylinder +100 V                                                            __________________________________________________________________________

                                      TABLE 143                                    __________________________________________________________________________         Gas used and its                                                                          Substrate    Inner                                                                               Layer                                         Drum                                                                               flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                     No. (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                       __________________________________________________________________________     10101                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                10102                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.5                                               H.sub.2 100                                                                    NH.sub.3                                                                               300                                                                10103                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.5                                               NH.sub.3                                                                               100                                                                Bias voltage of                                                                the cylinder +100 V                                                            __________________________________________________________________________

                                      TABLE 144                                    __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Charge                                                                               SiH.sub.4                                                                              100                                                                               250    150   0.35  3                                          injection                                                                            H.sub.2 100                                                              inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer 1000 ppm                                                                       NO       10                                                              Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Inter-                                                                               SiH.sub.4                                                                               10                                                                               250    150   0.35 0.3                                         mediate                                                                              CH.sub.4                                                                               400                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 He (20%)                                                               500                                                                               250    100   0.35 0.5                                         layer NH.sub.3                                                                               100                                                              __________________________________________________________________________

                                      TABLE 145                                    __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    250   0.35  20                                         conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer 100 ppm                                                                        NO       4                                                               Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 146                                                        ______________________________________                                         Initial                                                                        electri-                                                                       fication Residual           Defective                                                                               Image                                     efficiency                                                                              voltage   Ghost    image    flow                                      ______________________________________                                         ○ ○  ○ ⊚                                                                        ⊚                          ______________________________________                                         Increase                                                                       of              Break                Degree of                                 defective                                                                             Surface  down    Abrasion     background                                image  abrasion voltage resistance   fogginess                                 ______________________________________                                         ○                                                                              ○ ⊚                                                                       ⊚                                                                            ⊚                          ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                               Δ: Applicable for practical use                                          X: Poor                                                                  

                                      TABLE 147                                    __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    250   0.35 20                                          conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer 100 ppm                                                                        NO       4                                                               Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.40 0.3                                         layer H.sub.2 100                                                              (lower                                                                               NH.sub.3                                                                               100                                                              layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.3                                         layer H.sub.2 100                                                              (upper                                                                               NH.sub.3                                                                               300                                                              layer)                                                                         __________________________________________________________________________

                  TABLE 148                                                        ______________________________________                                         Initial                                                                        electri-                                                                       fication Residual           Defective                                                                               Image                                     efficiency                                                                              voltage   Ghost    image    flow                                      ______________________________________                                         ○ ○  ○ ⊚                                                                        ⊚                          ______________________________________                                         Increase                                                                       of              Break                Degree of                                 defective                                                                             Surface  down    Abrasion     background                                image  abrasion voltage resistance   fogginess                                 ______________________________________                                         ○                                                                              ○ ⊚                                                                       ⊚                                                                            ⊚                          ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                               Δ: Applicable for practical use                                          X: Poor                                                                  

                  TABLE 149                                                        ______________________________________                                         Intial electrification                                                                     Residual          Defective                                                                               Image                                   efficiency  voltage   Ghost   image    flow                                    ______________________________________                                         ○    ○  ○                                                                               ⊚                                                                        ⊚                        ______________________________________                                                                              Degree of                                 Increase of                                                                              Surface  Breakdown  Abrasion                                                                              background                                defective image                                                                          abrasion voltage    resistance                                                                            fogginess                                 ______________________________________                                         ○  ○ ⊚                                                                          ⊚                                                                      ⊚                          ______________________________________                                          ⊚ Excellent                                                      ○  Good                                                                Δ Applicable for practical use                                           X Poor                                                                   

                                      TABLE 150                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer           1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 151                                                        ______________________________________                                         Intial electrification                                                                     Residual          Defective                                                                               Image                                   efficiency  voltage   Ghost   image    flow                                    ______________________________________                                         ⊚                                                                           ○  ○                                                                               ⊚                                                                        ⊚                        ______________________________________                                                                              Degree of                                 Increase of                                                                              Surface  Breakdown  Abrasion                                                                              background                                defective image                                                                          abrasion voltage    resistance                                                                            fogginess                                 ______________________________________                                         ○  ○ ⊚                                                                          ⊚                                                                      ⊚                          ______________________________________                                          ⊚ Excellent                                                      ○  Good                                                                Δ Applicable for practical use                                           X Poor                                                                   

                                      TABLE 152                                    __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 He (20%)                                                               500                                                                               250    100   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 153                                                        ______________________________________                                         Intial electrification                                                                     Residual          Defective                                                                               Image                                   efficiency  voltage   Ghost   image    flow                                    ______________________________________                                         ⊚                                                                           ○  ○                                                                               ⊚                                                                        ⊚                        ______________________________________                                                                              Degree of                                 Increase of                                                                              Surface  Breakdown  Abrasion                                                                              background                                defective image                                                                          abrasion voltage    resistance                                                                            fogginess                                 ______________________________________                                         ○  ○ ⊚                                                                          ⊚                                                                      ⊚                          ______________________________________                                          ⊚ Excellent                                                      ○  Good                                                                Δ Applicable for practical use                                           X Poor                                                                   

                                      TABLE 154                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                                      TABLE 155                                    __________________________________________________________________________     Intial electrification                                                                   Residual Defective                                                                            Image                                                                              Increase of                                       efficiency                                                                               voltage                                                                             Ghost                                                                              image flow                                                                               defective image                                   __________________________________________________________________________     ○  ○                                                                            ○                                                                           ⊚                                                                     ⊚                                                                   ○                                          __________________________________________________________________________     Surface                                                                              Breakdown                                                                             Abrasion                                                                             Interference                                                                          Degree of background                                 abrasion                                                                             voltage                                                                               resistance                                                                           fringe fogginess                                            __________________________________________________________________________     ○                                                                             ⊚                                                                      ⊚                                                                     ○                                                                              ⊚                                     __________________________________________________________________________      ⊚ Excellent                                                      ○  Good                                                          

                                      TABLE 156                                    __________________________________________________________________________           Gas used and its                                                                          Substrate    Inner                                                                               Layer                                       Name of                                                                              flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                   layer (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                     __________________________________________________________________________     Contact                                                                              SiH.sub.4                                                                               20                                                                               250    100   0.25 0.5                                         layer N.sub.2 100                                                              Photo-                                                                               SiH.sub.4                                                                              200                                                                               250    300   0.40 20                                          conductive                                                                           H.sub.2 200                                                              layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.3                                         layer NH.sub.3                                                                               100                                                              (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 157                                                        ______________________________________                                         Intial electrification                                                                     Residual          Defective                                                                               Image                                   efficiency  voltage   Ghost   image    flow                                    ______________________________________                                         ⊚                                                                           ○  ○                                                                               ⊚                                                                        ⊚                        ______________________________________                                                                              Degree of                                 Increase of                                                                              Surface  Breakdown  Abrasion                                                                              background                                defective image                                                                          abrasion voltage    resistance                                                                            fogginess                                 ______________________________________                                         ○  ○ ⊚                                                                          ⊚                                                                      ⊚                          ______________________________________                                          ⊚ Excellent                                                      ○  Good                                                                Δ Applicable for practical use                                           X Poor                                                                   

                                      TABLE 158                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer           1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                                      TABLE 159                                    __________________________________________________________________________     Intial electrification                                                                   Residual Defective                                                                            Image                                                                              Increase of                                       efficiency                                                                               voltage                                                                             Ghost                                                                              image flow                                                                               defective image                                   __________________________________________________________________________     ⊚                                                                         ○                                                                            ○                                                                           ⊚                                                                     ⊚                                                                   ○                                          __________________________________________________________________________     Surface                                                                              Breakdown                                                                             Abrasion                                                                             Interference                                                                          Degree of background                                 abrasion                                                                             voltage                                                                               resistance                                                                           fringe fogginess                                            __________________________________________________________________________     ○                                                                             ⊚                                                                      ⊚                                                                     ○                                                                              ⊚                                     __________________________________________________________________________      ⊚ Excellent                                                      ○  Good                                                          

                                      TABLE 160                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer           1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 161                                                        ______________________________________                                         Intial electrification                                                                     Residual          Defective                                                                               Image                                   efficiency  voltage   Ghost   image    flow                                    ______________________________________                                         ⊚                                                                           ○  ○                                                                               ⊚                                                                        ⊚                        ______________________________________                                                                              Degree of                                 Increase of                                                                              Surface  Breakdown  Abrasion                                                                              background                                defective image                                                                          abrasion voltage    resistance                                                                            fogginess                                 ______________________________________                                         ○  ○ ⊚                                                                          ⊚                                                                      ⊚                          ______________________________________                                          ⊚ Excellent                                                      ○  Good                                                                Δ Applicable for practical use                                           X Poor                                                                   

                                      TABLE 162                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Contact                                                                              SiH.sub.4 20    250     50   0.05 0.5                                    layer N.sub.2   10                                                             IR    SiH.sub.4 100   250    150   0.35 1                                      absorptive                                                                           H.sub.2   100                                                            layer GeH.sub.4 50                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO        10                                                             Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                      layer           1000                                                                              ppm                                                               NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 163                                                        ______________________________________                                         Initial                                Increase                                electri-                               of                                      fication                                                                               Residual         Defective                                                                              Image defective                               efficiency                                                                             voltage  Ghost   image   flow  image                                   ______________________________________                                         ⊚                                                                       ○ ○                                                                               ⊚                                                                       ⊚                                                                     ○                                ______________________________________                                                 Break                       Degree of                                  Surface down     Abrasion  Interference                                                                            background                                 abrasion                                                                               voltage  resistance                                                                               fringe   fogginess                                  ______________________________________                                         ○                                                                               ⊚                                                                        ⊚                                                                         ○ ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 164                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               11901                                                                               11906                                                                               11911                                                                               11916                                                                               11921                                                                               11926                                                                               11931                                      conductive                                                                     layer 1                                                                        Photo-                                                                               11902                                                                               11907                                                                               11912                                                                               11917                                                                               11922                                                                               11927                                                                               11932                                      conductive                                                                     layer 2                                                                        Photo-                                                                               11903                                                                               11908                                                                               11913                                                                               11918                                                                               11923                                                                               11928                                                                               11933                                      conductive                                                                     layer 3                                                                        Photo-                                                                               11904                                                                               11909                                                                               11914                                                                               11919                                                                               11924                                                                               11929                                                                               11934                                      conductive                                                                     layer 5                                                                        Photo-                                                                               11905                                                                               11910                                                                               11915                                                                               11920                                                                               11925                                                                               11930                                                                               11935                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 165                                    __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.40 0.3                                          layer                                                                               H.sub.2 100                                                               (lower                                                                              NH.sub.3                                                                               100                                                               layer)                                                                         Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.40 0.3                                          layer                                                                               H.sub.2 100                                                               (upper                                                                              NH.sub.3                                                                               300                                                               layer)                                                                         __________________________________________________________________________

                                      TABLE 166                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               12001                                                                               12007                                                                               12013                                                                               12019                                                                               12025                                                                               12031                                                                               12037                                      conductive                                                                     layer 1                                                                        Photo-                                                                               12002                                                                               12008                                                                               12014                                                                               12020                                                                               12026                                                                               12032                                                                               12038                                      conductive                                                                     layer 2                                                                        Photo-                                                                               12003                                                                               12009                                                                               12015                                                                               12021                                                                               12027                                                                               12033                                                                               12039                                      conductive                                                                     layer 3                                                                        Photo-                                                                               12004                                                                               12010                                                                               12016                                                                               12022                                                                               12028                                                                               12034                                                                               12040                                      conductive                                                                     layer 4                                                                        Photo-                                                                               12005                                                                               12011                                                                               12017                                                                               12023                                                                               12029                                                                               12035                                                                               12041                                      conductive                                                                     layer 5                                                                        Photo-                                                                               12006                                                                               12012                                                                               12018                                                                               12024                                                                               12030                                                                               12036                                                                               12042                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________

                                      TABLE 167                                    __________________________________________________________________________          Gas used and its                                                                             Substrate    Inner                                                                               Layer                                     Name of                                                                             flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                                 layer                                                                               (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                   __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                       layer                                                                               NH.sub.3                                                                               100                                                               (lower                                                                              Bias voltage of                                                                        -150                                                                               V                                                             layer)                                                                              the cylinder                                                              Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                       layer                                                                               NH.sub.3                                                                               100                                                               (upper                                                                              Bias voltage of                                                                        +150                                                                               V                                                             layer)                                                                              the cylinder                                                              __________________________________________________________________________

                                      TABLE 168                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                    __________________________________________________________________________     Photo-                                                                               12101                                                                               12107                                                                               12113                                                                               12119                                                                               12125                                                                               12131                                                                               12137                                      conductive                                                                     layer 1                                                                        Photo-                                                                               12102                                                                               12108                                                                               12114                                                                               12120                                                                               12126                                                                               12132                                                                               12138                                      conductive                                                                     layer 2                                                                        Photo-                                                                               12103                                                                               12109                                                                               12115                                                                               12121                                                                               12127                                                                               12133                                                                               12139                                      conductive                                                                     layer 3                                                                        Photo-                                                                               12104                                                                               12110                                                                               12116                                                                               12122                                                                               12128                                                                               12134                                                                               12140                                      conductive                                                                     layer 4                                                                        Photo-                                                                               12105                                                                               12111                                                                               12117                                                                               12123                                                                               12129                                                                               12135                                                                               12141                                      conductive                                                                     layer 5                                                                        Photo-                                                                               12106                                                                               12112                                                                               12118                                                                               12124                                                                               12130                                                                               12136                                                                               12142                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________

                  TABLE 169                                                        ______________________________________                                         Photo-     Photo-    Photo-   Photo-  Photo-                                   con-       con-      con-     con-    con-                                     ductive    ductive   ductive  ductive ductive                                  Layer 1    Layer 2   Layer 3  Layer 5 Layer 6                                  ______________________________________                                         Drum  12201    12202     12203  12204   12205                                  No.                                                                            ______________________________________                                    

                                      TABLE 170                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               12301 12302 12303 12304 12305 12306                                        No.                                                                            __________________________________________________________________________

                                      TABLE 171                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               12401 12402 12403 12404 12405 12406                                        No.                                                                            __________________________________________________________________________

                  TABLE 172                                                        ______________________________________                                                       Drum                                                                           No.                                                              ______________________________________                                         IR Absorptive   12501                                                          Layer 1                                                                        IR Absorptive   12502                                                          Layer 2                                                                        IR Absorptive   12503                                                          Layer 3                                                                        IR Absorptive   12504                                                          Layer 4                                                                        IR Absorptive   12505                                                          Layer 5                                                                        IR Absorptive   12506                                                          Layer 6                                                                        IR Absorptive   12507                                                          Layer 7                                                                        IR Absorptive   12508                                                          Layer 8                                                                        IR Absorptive   12509                                                          Layer 9                                                                        IR Absorptive   12510                                                          Layer 10                                                                       IR Absorptive   12511                                                          Layer 11                                                                       IR Absorptive   12512                                                          Layer 12                                                                       IR Absorptive   12513                                                          Layer 13                                                                       IR Absorptive   12514                                                          Layer 14                                                                       IR Absorptive   12515                                                          Layer 15                                                                       IR Absorptive   12516                                                          Layer 17                                                                       IR Absorptive   12517                                                          Layer 18                                                                       IR Absorptive   12518                                                          Layer 19                                                                       IR Absorptive   12519                                                          Layer 20                                                                       ______________________________________                                    

                                      TABLE 173                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                          Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                      No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 5                                                                              layer 6                                         __________________________________________________________________________     IR absorptive                                                                         12601 12621 12641 12661 12681                                           layer 1                                                                        IR absorptive                                                                         12602 12622 12642 12662 12682                                           layer 2                                                                        IR absorptive                                                                         12603 12623 12643 12663 12683                                           layer 3                                                                        IR absorptive                                                                         12604 12624 12644 12664 12684                                           layer 4                                                                        IR absorptive                                                                         12605 12625 12645 12665 12685                                           layer 5                                                                        IR absorptive                                                                         12606 12626 12646 12666 12686                                           layer 6                                                                        IR absorptive                                                                         12607 12627 12647 12667 12687                                           layer 7                                                                        IR absorptive                                                                         12608 12628 12648 12668 12688                                           layer 8                                                                        IR absorptive                                                                         12609 12629 12649 12669 12689                                           layer 9                                                                        IR absorptive                                                                         12610 12630 12650 12670 12690                                           layer 10                                                                       IR absorptive                                                                         12611 12631 12651 12671 12691                                           layer 11                                                                       IR absorptive                                                                         12612 12632 12652 12672 12692                                           layer 12                                                                       IR absorptive                                                                         12613 12633 12653 12673 12693                                           layer 13                                                                       IR absorptive                                                                         12614 12634 12654 12674 12694                                           layer 14                                                                       IR absorptive                                                                         12615 12635 12655 12675 12695                                           layer 15                                                                       IR absorptive                                                                         12616 12636 12656 12676 12696                                           layer 16                                                                       IR absorptive                                                                         12617 12637 12657 12677 12697                                           layer 17                                                                       IR absorptive                                                                         12618 12638 12658 12678 12698                                           layer 18                                                                       IR absorptive                                                                         12619 12639 12659 12979 12699                                           layer 19                                                                       IR absorptive                                                                         12620 12640 12660 12680 126100                                          layer 20                                                                       __________________________________________________________________________

                                      TABLE 174                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         12701 12721 12741 12761 12781 127101                                    layer 1                                                                        IR absorptive                                                                         12702 12722 12742 12762 12782 127102                                    layer 2                                                                        IR absorptive                                                                         12703 12723 12743 12763 12783 127103                                    layer 3                                                                        IR absorptive                                                                         12704 12724 12744 12764 12784 127104                                    layer 4                                                                        IR absorptive                                                                         12705 12725 12745 12765 12785 127105                                    layer 5                                                                        IR absorptive                                                                         12706 12726 12746 12766 12786 127106                                    layer 6                                                                        IR absorptive                                                                         12707 12727 12747 12767 12787 127107                                    layer 7                                                                        IR absorptive                                                                         12708 12728 12748 12768 12788 127108                                    layer 8                                                                        IR absorptive                                                                         12709 12729 12749 12769 12789 127109                                    layer 9                                                                        IR absorptive                                                                         12710 12730 12750 12770 12790 127110                                    layer 10                                                                       IR absorptive                                                                         12711 12731 12751 12771 12791 127111                                    layer 11                                                                       IR absorptive                                                                         12712 12732 12752 12772 12792 127112                                    layer 12                                                                       IR absorptive                                                                         12713 12733 12753 12773 12793 127113                                    layer 13                                                                       IR absorptive                                                                         12714 12734 12754 12774 12794 127114                                    layer 14                                                                       IR absorptive                                                                         12715 12735 12755 12775 12795 127115                                    layer 15                                                                       IR absorptive                                                                         12716 12736 12756 12776 12796 127116                                    layer 16                                                                       IR absorptive                                                                         12717 12737 12757 12777 12797 127117                                    layer 17                                                                       IR absorptive                                                                         12718 12738 12758 12778 12798 127118                                    layer 18                                                                       IR absorptive                                                                         12719 12739 12759 12779 12799 127119                                    layer 19                                                                       IR absorptive                                                                         12720 12740 12760 12780 12700 127120                                    layer 20                                                                       __________________________________________________________________________

                                      TABLE 175                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductve                                                                            conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         12801 12821 18241 12861 12881 128101                                    layer 1                                                                        IR absorptive                                                                         12802 12822 12842 12862 12882 128102                                    layer 2                                                                        IR absorptive                                                                         12803 12823 12843 12863 12883 128103                                    layer 3                                                                        IR absorptive                                                                         12804 12824 12844 12864 12884 128104                                    layer 4                                                                        IR absorptive                                                                         12805 12825 12845 12865 12885 128105                                    layer 5                                                                        IR absorptive                                                                         12806 12826 12846 12866 12886 128106                                    layer 6                                                                        IR absorptive                                                                         12807 12827 12847 12867 12887 128107                                    layer 7                                                                        IR absorptive                                                                         12808 12828 12848 12868 12888 128108                                    layer 8                                                                        IR absorptive                                                                         12809 12829 12849 12869 12889 128109                                    layer 9                                                                        IR absorptive                                                                         12810 12830 12850 12870 12890 128110                                    layer 10                                                                       IR absorptive                                                                         12811 12831 12851 12871 12891 128111                                    layer 11                                                                       IR absorptive                                                                         12812 12832 12852 12872 12892 128112                                    layer 12                                                                       IR absorptive                                                                         12813 12833 12853 12873 12893 128113                                    layer 13                                                                       IR absorptive                                                                         12814 12834 12854 12874 12894 128114                                    layer 14                                                                       IR absorptive                                                                         12815 12835 12855 12875 12895 128115                                    layer 15                                                                       IR absorptive                                                                         12816 12836 12856 12876 12896 128116                                    layer 16                                                                       IR absorptive                                                                         12817 12837 12857 12877 12897 128117                                    layer 17                                                                       IR absorptive                                                                         12818 12838 12858 12878 12898 128118                                    layer 18                                                                       IR absorptive                                                                         12819 12839 12879 12879 12899 128119                                    layer 19                                                                       IR absorptive                                                                         12820 12840 12860 12880 128100                                                                               128120                                    layer 20                                                                       __________________________________________________________________________

                  TABLE 176                                                        ______________________________________                                         Contact           Contact  Contact                                             Layer 2           Layer 3  Layer 4                                             ______________________________________                                         Drum    12901         12902    12903                                           No.                                                                            ______________________________________                                    

                  TABLE 177                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   13001     13007     13013   13019                                     conductive                                                                     layer 1                                                                        Photo-   13002     13008     13014   13020                                     conductive                                                                     layer 2                                                                        Photo-   13003     13009     13015   13021                                     conductive                                                                     layer 3                                                                        Photo-   13004     13010     13016   13022                                     conductive                                                                     layer 4                                                                        Photo-   13005     13011     13017   13023                                     conductive                                                                     layer 5                                                                        Photo-   13006     13012     13018   13024                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 178                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   13101     13107     13113   13119                                     conductive                                                                     layer 1                                                                        Photo-   13102     13108     13114   13120                                     conductive                                                                     layer 2                                                                        Photo-   13103     13109     13115   13121                                     conductive                                                                     layer 3                                                                        Photo-   13104     13110     13116   13122                                     conductive                                                                     layer 4                                                                        Photo-   13105     13111     13117   13123                                     conductive                                                                     layer 5                                                                        Photo-   13106     13112     13118   13124                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 179                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   13201     13207     13213   13219                                     conductive                                                                     layer 1                                                                        Photo-   13202     13208     13214   13220                                     conductive                                                                     layer 2                                                                        Photo-   13203     13209     13215   13221                                     conductive                                                                     layer 3                                                                        Photo-   13204     13210     13216   13222                                     conductive                                                                     layer 4                                                                        Photo-   13205     13211     13217   13223                                     conductive                                                                     layer 5                                                                        Photo-   13206     13212     13218   13224                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 180                                                        ______________________________________                                                       Drum                                                                           No.                                                              ______________________________________                                                IR absorptive                                                                           13301                                                                 layer 1                                                                        IR absorptive                                                                           13302                                                                 layer 2                                                                        IR absorptive                                                                           13303                                                                 layer 3                                                                        IR absorptive                                                                           13304                                                                 layer 4                                                                        IR absorptive                                                                           13305                                                                 layer 5                                                                        IR absorptive                                                                           13306                                                                 layer 6                                                                        IR absorptive                                                                           13307                                                                 layer 7                                                                        IR absorptive                                                                           13308                                                                 layer 8                                                                        IR absorptive                                                                           13309                                                                 layer 9                                                                        IR absorptive                                                                           13310                                                                 layer 10                                                                       IR absorptive                                                                           13311                                                                 layer 11                                                                       IR absorptive                                                                           13312                                                                 layer 12                                                                       IR absorptive                                                                           13313                                                                 layer 13                                                                       IR absorptive                                                                           13314                                                                 layer 14                                                                       IR absorptive                                                                           13315                                                                 layer 15                                                                       IR absorptive                                                                           13317                                                                 layer 17                                                                       IR absorptive                                                                           13318                                                                 layer 18                                                                       IR absorptive                                                                           13319                                                                 layer 19                                                                       IR absorptive                                                                           13320                                                                 layer 20                                                                ______________________________________                                    

                  TABLE 181                                                        ______________________________________                                                    Photo-      Photo-    Photo-                                        Drum       conductive  conductive                                                                               conductive                                    No.        layer 4     layer 5   layer 7                                       ______________________________________                                         IR absorptive                                                                             13401       13421     13441                                         layer 1                                                                        IR absorptive                                                                             13402       13422     13442                                         layer 2                                                                        IR absorptive                                                                             13403       13423     13443                                         layer 3                                                                        IR absorptive                                                                             13404       13424     13444                                         layer 4                                                                        IR absorptive                                                                             13405       13425     13445                                         layer 5                                                                        IR absorptive                                                                             13406       13426     13446                                         layer 6                                                                        IR absorptive                                                                             13407       13427     13447                                         layer 7                                                                        IR absorptive                                                                             13408       13428     13448                                         layer 8                                                                        IR absorptive                                                                             13409       13429     13449                                         layer 9                                                                        IR absorptive                                                                             13410       13430     13450                                         layer 10                                                                       IR absorptive                                                                             13411       13431     13451                                         layer 11                                                                       IR absorptive                                                                             13412       13432     13452                                         layer 12                                                                       IR absorptive                                                                             13413       13433     13453                                         layer 13                                                                       IR absorptive                                                                             13414       13434     13454                                         layer 14                                                                       IR absorptive                                                                             13415       13435     13455                                         layer 15                                                                       IR absorptive                                                                             13416       13436     13456                                         layer 16                                                                       IR absorptive                                                                             13417       13437     13457                                         layer 17                                                                       IR absorptive                                                                             13418       13438     13458                                         layer 18                                                                       IR absorptive                                                                             13419       13439     13459                                         layer 19                                                                       IR absorptive                                                                             13420       13440     13460                                         layer 20                                                                       ______________________________________                                    

                  TABLE 182                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           13501     13521     13541   13561                                     layer 1                                                                        IR absorptive                                                                           13502     13522     13542   13562                                     layer 2                                                                        IR absorptive                                                                           13503     13523     13543   13563                                     layer 3                                                                        IR absorptive                                                                           13504     13524     13544   13564                                     layer 4                                                                        IR absorptive                                                                           13505     13525     13545   13565                                     layer 5                                                                        IR absorptive                                                                           13506     13526     13546   13566                                     layer 6                                                                        IR absorptive                                                                           13507     13527     13547   13567                                     layer 7                                                                        IR absorptive                                                                           13508     13528     13548   13568                                     layer 8                                                                        IR absorptive                                                                           13509     13529     13549   13569                                     layer 9                                                                        IR absorptive                                                                           13510     13530     13550   13570                                     layer 10                                                                       IR absorptive                                                                           13511     13531     13551   13571                                     layer 11                                                                       IR absorptive                                                                           13512     13532     13552   13572                                     layer 12                                                                       IR absorptive                                                                           13513     13533     13553   13573                                     layer 13                                                                       IR absorptive                                                                           13514     13534     13554   13574                                     layer 14                                                                       IR absorptive                                                                           13515     13535     13555   13575                                     layer 15                                                                       IR absorptive                                                                           13516     13536     13556   13576                                     layer 16                                                                       IR absorptive                                                                           13517     13537     13557   13577                                     layer 17                                                                       IR absorptive                                                                           13518     13538     13558   13578                                     layer 18                                                                       IR absorptive                                                                           13519     13539     13559   13579                                     layer 19                                                                       IR absorptive                                                                           13520     13540     13560   13580                                     layer 20                                                                       ______________________________________                                    

                  TABLE 183                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           13601     13621     13641   13661                                     layer 1                                                                        IR absorptive                                                                           13602     13622     13642   13662                                     layer 2                                                                        IR absorptive                                                                           13603     13623     13643   13663                                     layer 3                                                                        IR absorptive                                                                           13604     13624     13644   13664                                     layer 4                                                                        IR absorptive                                                                           13605     13625     13645   13665                                     layer 5                                                                        IR absorptive                                                                           13606     13626     13646   13666                                     layer 6                                                                        IR absorptive                                                                           13607     13627     13647   13667                                     layer 7                                                                        IR absorptive                                                                           13608     13628     13648   13668                                     layer 8                                                                        IR absorptive                                                                           13609     13629     13649   13669                                     layer 9                                                                        IR absorptive                                                                           13610     13630     13650   13670                                     layer 10                                                                       IR absorptive                                                                           13611     13631     13651   13671                                     layer 11                                                                       IR absoprtive                                                                           13612     13632     13652   13672                                     layer 12                                                                       IR absorptive                                                                           13613     13633     13653   13673                                     layer 13                                                                       IR absorptive                                                                           13614     13634     13654   13674                                     layer 14                                                                       IR absorptive                                                                           13615     13635     13655   13675                                     layer 15                                                                       IR absorptive                                                                           13616     13636     13656   13676                                     layer 16                                                                       IR absorptive                                                                           13617     13637     13657   13677                                     layer 17                                                                       IR absorptive                                                                           13618     13638     13658   13678                                     layer 18                                                                       IR absorptive                                                                           13619     13639     13659   13679                                     layer 19                                                                       IR absorptive                                                                           13620     13640     13660   13680                                     layer 20                                                                       ______________________________________                                    

                                      TABLE 184                                    __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               13701                                                                               13702                                                                               13703                                                                               13704                                                                               13705                                                                               13706                                                                               13707                                        No.                                                                            __________________________________________________________________________

                                      TABLE 185                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                        Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                       No.  layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                          __________________________________________________________________________     Contact                                                                             13801                                                                               13809                                                                               13817                                                                               13825                                                                               13833                                                                               13841                                            layer 1                                                                        Contact                                                                             13802                                                                               13810                                                                               13818                                                                               13826                                                                               13834                                                                               13842                                            layer 2                                                                        Contact                                                                             13803                                                                               13811                                                                               13819                                                                               13827                                                                               13835                                                                               13843                                            layer 3                                                                        Contact                                                                             13804                                                                               13812                                                                               13820                                                                               13828                                                                               13836                                                                               13844                                            layer 4                                                                        Contact                                                                             13805                                                                               13813                                                                               13821                                                                               13829                                                                               13837                                                                               13845                                            layer 5                                                                        Contact                                                                             13806                                                                               13814                                                                               13822                                                                               13830                                                                               13838                                                                               13846                                            layer 6                                                                        Contact                                                                             13807                                                                               13815                                                                               13823                                                                               13831                                                                               13839                                                                               13847                                            layer 7                                                                        Contact                                                                             13808                                                                               13816                                                                               13824                                                                               13832                                                                               13840                                                                               13848                                            layer 8                                                                        __________________________________________________________________________

                                      TABLE 186                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             13901                                                                               13909                                                                               13917                                                                               13925                                                                               13933                                                                               13941                                                                               13949                                       layer 1                                                                        Contact                                                                             13902                                                                               13910                                                                               13918                                                                               13926                                                                               13934                                                                               13942                                                                               13950                                       layer 2                                                                        Contact                                                                             13903                                                                               13911                                                                               13919                                                                               13927                                                                               13935                                                                               13943                                                                               13951                                       layer 3                                                                        Contact                                                                             13904                                                                               13912                                                                               13920                                                                               13928                                                                               13936                                                                               13944                                                                               13952                                       layer 4                                                                        Contact                                                                             13905                                                                               13913                                                                               13921                                                                               13929                                                                               13937                                                                               13945                                                                               13953                                       layer 5                                                                        Contact                                                                             13906                                                                               13914                                                                               13922                                                                               13930                                                                               13938                                                                               13946                                                                               13954                                       layer 6                                                                        Contact                                                                             13907                                                                               13915                                                                               13923                                                                               13931                                                                               13939                                                                               13947                                                                               13955                                       layer 7                                                                        Contact                                                                             13908                                                                               13916                                                                               13924                                                                               13932                                                                               13940                                                                               13948                                                                               13956                                       layer 8                                                                        __________________________________________________________________________

                                      TABLE 187                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5                                                                             layer 6                                                                             layer 7                                     __________________________________________________________________________     Contact                                                                             14001                                                                               14009                                                                               14017                                                                               14025                                                                               14033                                                                               14041                                                                               14049                                       layer 1                                                                        Contact                                                                             14002                                                                               14010                                                                               14018                                                                               14026                                                                               14034                                                                               14042                                                                               14050                                       layer 2                                                                        Contact                                                                             14003                                                                               14011                                                                               14019                                                                               14027                                                                               14035                                                                               14043                                                                               14051                                       layer 3                                                                        Contact                                                                             14004                                                                               14012                                                                               14020                                                                               14028                                                                               14036                                                                               14044                                                                               14052                                       layer 4                                                                        Contact                                                                             14005                                                                               14013                                                                               14021                                                                               14029                                                                               14037                                                                               14045                                                                               14053                                       layer 5                                                                        Contact                                                                             14006                                                                               14014                                                                               14022                                                                               14030                                                                               14038                                                                               14046                                                                               14054                                       layer 6                                                                        Contact                                                                             14007                                                                               14015                                                                               14023                                                                               14031                                                                               14039                                                                               14047                                                                               14055                                       layer 7                                                                        Contact                                                                             14008                                                                               14016                                                                               14024                                                                               14032                                                                               14040                                                                               14048                                                                               14056                                       layer 8                                                                        __________________________________________________________________________

                  TABLE 188                                                        ______________________________________                                         Charge injection                                                                              Charge injection                                                                            Charge injection                                   inhibition layer 4                                                                            inhibition layer 6                                                                          inhibition 7                                       Drum  14101        14102        14103                                          No.                                                                            ______________________________________                                    

                  TABLE 189                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   14201     14203     14205   14207                                     conductive                                                                     layer 5                                                                        Photo-   14202     14204     14206   14208                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 190                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   14301     14304     14307   14310                                     conductive                                                                     layer 4                                                                        Photo-   14302     14305     14308   14311                                     conductive                                                                     layer 5                                                                        Photo-   14303     14306     14309   14312                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 191                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6 layer 7                                   ______________________________________                                         Photo-   14401     14404     14407   14410                                     conductive                                                                     layer 4                                                                        Photo-   14402     14405     14408   14411                                     conductive                                                                     layer 5                                                                        Photo-   14403     14406     14409   14412                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                                      TABLE 192                                    __________________________________________________________________________          Gas used and its                                                                          Substrate    Inner                                                                               Layer                                        Name of                                                                             flow rate  temperature                                                                           RF power                                                                             pressure                                                                            thickness                                    layer                                                                               (SSCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                      __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                               250    200   0.35 0.3                                          layer                                                                               NH.sub.3                                                                               100                                                               (lower                                                                         layer)                                                                         Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                              500                                                                               250    100   0.35 0.3                                          layer                                                                               NH.sub.3                                                                               100                                                               (upper                                                                         layer)                                                                         __________________________________________________________________________

                  TABLE 193                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           14501     14521     14541   14561                                     layer 1                                                                        IR absorptive                                                                           14502     14522     14542   14562                                     layer 2                                                                        IR absorptive                                                                           14503     14523     14543   14563                                     layer 3                                                                        IR absorptive                                                                           14504     14524     14544   14564                                     layer 4                                                                        IR absorptive                                                                           14505     14525     14545   14565                                     layer 5                                                                        IR absorptive                                                                           14506     14526     14546   14566                                     layer 6                                                                        IR absorptive                                                                           14507     14527     14547   14567                                     layer 7                                                                        IR absorptive                                                                           14508     14528     14548   14568                                     layer 8                                                                        IR absorptive                                                                           14509     14529     14549   14569                                     layer 9                                                                        IR absorptive                                                                           14510     14530     14550   14570                                     layer 10                                                                       IR absorptive                                                                           14511     14531     14551   14571                                     layer 11                                                                       IR absorptive                                                                           14512     14532     14552   14572                                     layer 12                                                                       IR absorptive                                                                           14513     14533     14553   14573                                     layer 13                                                                       IR absorptive                                                                           14514     14534     14554   14574                                     layer 14                                                                       IR absorptive                                                                           14515     14535     14555   14575                                     layer 15                                                                       IR absorptive                                                                           14516     14536     14556   14576                                     layer 16                                                                       IR absorptive                                                                           14517     14537     14557   14577                                     layer 17                                                                       IR absorptive                                                                           14518     14538     14558   14578                                     layer 18                                                                       IR absorptive                                                                           14519     14539     14559   14579                                     layer 19                                                                       IR absorptive                                                                           14520     14540     14560   14580                                     layer 20                                                                       ______________________________________                                    

                  TABLE 194                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           14601     14621     14641   14661                                     layer 1                                                                        IR absorptive                                                                           14602     14622     14642   14662                                     layer 2                                                                        IR absorptive                                                                           14603     14623     14643   14663                                     layer 3                                                                        IR absortive                                                                            14604     14624     14644   14664                                     layer 4                                                                        IR absorptive                                                                           14605     14625     14645   14665                                     layer 5                                                                        IR absorptive                                                                           14606     14626     14646   14666                                     layer 6                                                                        IR absorptive                                                                           14607     14627     14647   14667                                     layer 7                                                                        IR absorptive                                                                           14608     14628     14648   14668                                     layer 8                                                                        IR absorptive                                                                           14609     14629     14649   14669                                     layer 9                                                                        IR absorptive                                                                           14610     14630     14650   14670                                     layer 10                                                                       IR absorptive                                                                           14611     14631     14651   14671                                     layer 11                                                                       IR absorptive                                                                           14612     14632     14652   14672                                     layer 12                                                                       IR absorptive                                                                           14613     14633     14653   14673                                     layer 13                                                                       IR absorptive                                                                           14614     14634     14654   14674                                     layer 14                                                                       IR absorptive                                                                           14615     14635     14655   14675                                     layer 15                                                                       IR absorptive                                                                           14616     14636     14656   14676                                     layer 16                                                                       IR absorptive                                                                           14617     14637     14657   14677                                     layer 17                                                                       IR absorptive                                                                           14618     14638     14658   14678                                     layer 18                                                                       IR absorptive                                                                           14619     14639     14659   14679                                     layer 19                                                                       IR absorptive                                                                           14620     14640     14660   14680                                     layer 20                                                                       ______________________________________                                    

                  TABLE 195                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           14701     14721     14741   14761                                     layer 1                                                                        IR absorptive                                                                           14702     14722     14742   14762                                     layer 2                                                                        IR absorptive                                                                           14703     14723     14743   14763                                     layer 3                                                                        IR absorptive                                                                           14704     14724     14744   14764                                     layer 4                                                                        IR absorptive                                                                           14705     14725     14745   14765                                     layer 5                                                                        IR absorptive                                                                           14706     14726     14746   14766                                     layer 6                                                                        IR absorptive                                                                           14707     14727     14747   14767                                     layer 7                                                                        IR absorptive                                                                           14708     14728     14748   14768                                     layer 8                                                                        IR absorptive                                                                           14709     14729     14749   14769                                     layer 9                                                                        IR absorptive                                                                           14710     14730     14750   14770                                     layer 10                                                                       IR absorptive                                                                           14711     14731     14751   14771                                     layer 11                                                                       IR absorptive                                                                           14712     14732     14752   14772                                     layer 12                                                                       IR absorptive                                                                           14713     14733     14753   14773                                     layer 13                                                                       IR absorptive                                                                           14714     14734     14754   14774                                     layer 14                                                                       IR absorptive                                                                           14715     14735     14755   14775                                     layer 15                                                                       IR absorptive                                                                           14716     14736     14756   14776                                     layer 16                                                                       IR absorptive                                                                           14717     14737     14757   14777                                     layer 17                                                                       IR absorptive                                                                           14718     14738     14758   14778                                     layer 18                                                                       IR absorptive                                                                           14719     14739     14759   14779                                     layer 19                                                                       IR absorptive                                                                           14720     14740     14760   14780                                     layer 20                                                                       ______________________________________                                    

                  TABLE 196                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           14801     14821     14841   14861                                     layer 1                                                                        IR absorptive                                                                           14802     14822     14842   14862                                     layer 2                                                                        IR absorptive                                                                           14803     14823     14843   14863                                     layer 3                                                                        IR absorptive                                                                           14804     14824     14844   14864                                     layer 4                                                                        IR absorptive                                                                           14805     14825     14845   14865                                     layer 5                                                                        IR absorptive                                                                           14806     14826     14846   14866                                     layer 6                                                                        IR absorptive                                                                           14807     14827     14847   14867                                     layer 7                                                                        IR absorptive                                                                           14808     14828     14848   14868                                     layer 8                                                                        IR absorptive                                                                           14809     14829     14849   14869                                     layer 9                                                                        IR absorptive                                                                           14810     14830     14850   14870                                     layer 10                                                                       IR absorptive                                                                           14811     14831     14851   14871                                     layer 11                                                                       IR absorptive                                                                           14812     14832     14852   14872                                     layer 12                                                                       IR absorptive                                                                           14813     14833     14853   14873                                     layer 13                                                                       IR absorptive                                                                           14814     14834     14854   14874                                     layer 14                                                                       IR absorptive                                                                           14815     14835     14855   14875                                     layer 15                                                                       IR absorptive                                                                           14816     14836     14856   14876                                     layer 16                                                                       IR absorptive                                                                           14817     14837     14857   14877                                     layer 17                                                                       IR absorptive                                                                           14818     14838     14858   14878                                     layer 18                                                                       IR absorptive                                                                           14819     14839     14859   14879                                     layer 19                                                                       IR absorptive                                                                           14820     14840     14860   14880                                     layer 20                                                                       ______________________________________                                    

                  TABLE 197                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           14901     14921     14941   14961                                     layer 1                                                                        IR absorptive                                                                           14902     14922     14942   14962                                     layer 2                                                                        IR absorptive                                                                           14903     14923     14943   14963                                     layer 3                                                                        IR absorptive                                                                           14904     14924     14944   14964                                     layer 4                                                                        IR absorptive                                                                           14905     14925     14945   14965                                     layer 5                                                                        IR absorptive                                                                           14906     14926     14946   14966                                     layer 6                                                                        IR absorptive                                                                           14907     14927     14947   14967                                     layer 7                                                                        IR absorptive                                                                           14908     14928     14948   14968                                     layer 8                                                                        IR absorptive                                                                           14909     14929     14949   14969                                     layer 9                                                                        IR absorptive                                                                           14910     14990     14950   14970                                     layer 10                                                                       IR absorptive                                                                           14911     14931     14951   14971                                     layer 11                                                                       IR absorptive                                                                           14912     14932     14952   14972                                     layer 12                                                                       IR absorptive                                                                           14913     14933     14953   14973                                     layer 13                                                                       IR absorptive                                                                           14914     14934     14954   14974                                     layer 14                                                                       IR absorptive                                                                           14915     14935     14955   14975                                     layer 15                                                                       IR absorptive                                                                           14916     14936     14956   14996                                     layer 16                                                                       IR absorptive                                                                           14917     14937     14957   14977                                     layer 17                                                                       IR absorptive                                                                           14918     14938     14958   14978                                     layer 18                                                                       IR absorptive                                                                           14919     14939     14959   14979                                     layer 19                                                                       IR absorptive                                                                           14920     14940     14960   14980                                     layer 20                                                                       ______________________________________                                    

                  TABLE 198                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5 layer 7                                   ______________________________________                                         IR absorptive                                                                           15051     15021     15041   15061                                     layer 1                                                                        IR absorptive                                                                           15002     15022     15042   15062                                     layer 2                                                                        IR absorptive                                                                           15003     15023     15043   15063                                     layer 3                                                                        IR absorptive                                                                           15004     15024     15044   15064                                     layer 4                                                                        IR absorptive                                                                           15005     15025     15045   15065                                     layer 5                                                                        IR absorptive                                                                           15006     15026     15046   15066                                     layer 6                                                                        IR absorptive                                                                           15007     15027     15047   15067                                     layer 7                                                                        IR absorptive                                                                           15008     15028     15048   15068                                     layer 8                                                                        IR absorptive                                                                           15009     15029     15049   15069                                     layer 9                                                                        IR absorptive                                                                           15010     15030     15050   15070                                     layer 10                                                                       IR absorptive                                                                           15011     15031     15051   15071                                     layer 11                                                                       IR absorptive                                                                           15012     15032     15052   15072                                     layer 12                                                                       IR absorptive                                                                           15013     15033     15053   15073                                     layer 13                                                                       IR absorptive                                                                           15014     15034     15054   15074                                     layer 14                                                                       IR absorptive                                                                           15015     15035     15055   15075                                     layer 15                                                                       IR absorptive                                                                           15016     15036     15056   15076                                     layer 16                                                                       IR absorptive                                                                           15017     15037     15057   15077                                     layer 17                                                                       IR absorptive                                                                           15018     15038     15058   15078                                     layer 18                                                                       IR absorptive                                                                           15019     15039     15059   15079                                     layer 19                                                                       IR absorptive                                                                           15020     15040     15060   15080                                     layer 20                                                                       ______________________________________                                    

                                      TABLE 199                                    __________________________________________________________________________                Gas used and its                                                                             Substrate    Inner                                                                               Layer                                          flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           Drum No.   (SSCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     15101                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /AR (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                         15102                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.40 0.3                                            H.sub.2 100                                                                    NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.40 0.3                                            H.sub.2 100                                                                    NH.sub.3                                                                               300                                                         15103                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        -150                                                                               V                                                                  the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        +100                                                                               V                                                                  the cylinder                                                        __________________________________________________________________________

                                      TABLE 200                                    __________________________________________________________________________                Gas used and its                                                                             Substrate    Inner                                                                               Layer                                          flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           Drum No.   (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     15201                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                         15202                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.40 0.3                                            H.sub.2 100                                                                    NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.40 0.3                                            H.sub.2 100                                                                    NH.sub.3                                                                               300                                                         15203                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        -150                                                                               V                                                                  the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        +100                                                                               V                                                                  the cylinder                                                        __________________________________________________________________________

                                      TABLE 201                                    __________________________________________________________________________                Gas used and its                                                                             Substrate    Inner                                                                               Layer                                          flow rate     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           Drum No.   (SCCM)        (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     15301                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                         15302                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500                                                                    H.sub.2 100   250    200   0.40 0.3                                            NH.sub.3                                                                               100                                                             Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.40 0.3                                            H.sub.2 100                                                                    NH.sub.3                                                                               300                                                         15303                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                              500   250    200   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        -150                                                                               V                                                                  the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                              500   250    100   0.35 0.3                                            NH.sub.3                                                                               100                                                                    Bias voltage of                                                                        +100                                                                               V                                                                  the cylinder                                                        __________________________________________________________________________

                                      TABLE 202                                    __________________________________________________________________________           Gas used and its                                                                               Substrate    Inner                                                                               Layer                                  Name of                                                                              flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                              layer (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                __________________________________________________________________________     Charge                                                                               SiH.sub.4 100   250    150   0.35 3                                      injection                                                                            H.sub.2   100                                                            inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                         layer NO        10                                                             Photo-                                                                               SiH.sub.4 200   250    300   0.40 20                                     conductive                                                                           H.sub.2   200                                                            layer                                                                          Inter-                                                                               SiH.sub.4 10    250    150   0.35 0.3                                    mediate                                                                              CH.sub.4  400                                                            layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                500   250    200   0.35 0.3                                    layer NH.sub.3  100                                                            (lower                                                                         layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                500   250    100   0.35 0.3                                    layer NH.sub.3  100                                                            (upper                                                                         layer)                                                                         __________________________________________________________________________

                                      TABLE 203 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 203 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 204                                                        ______________________________________                                                Intial                                                                  Drum   electrification                                                                           Residual       Defective                                                                              Image                                 No.    efficiency voltage  Ghost image   flow                                  ______________________________________                                         (a)    ○   ⊚                                                                        ⊚                                                                     ⊚                                                                       ○                              (b)    ○   ⊚                                                                        ⊚                                                                     ⊚                                                                       ○                              ______________________________________                                         Drum   Increase of Surface   Breakdown                                                                               Abrasion                                 No.    defective image                                                                            abrasion  voltage  resistance                               ______________________________________                                         (a)    ○    ⊚                                                                         ⊚                                                                        ⊚                         (b)    ○    ⊚                                                                         ⊚                                                                        ⊚                         ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                                      TABLE 205 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.5                                layer H.sub.2       100                                                              NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                     __________________________________________________________________________

                                      TABLE 205 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.5                                layer H.sub.2       100                                                              NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                     __________________________________________________________________________

                  TABLE 206                                                        ______________________________________                                                Initial                                                                        electri-                                                                Drum   fication Residual        Defective                                                                              Image                                  No.    efficiency                                                                              voltage  Ghost  image   flow                                   ______________________________________                                         (a)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              (b)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              ______________________________________                                                  Increase                                                                       of                   Break                                            Drum     defective                                                                               Surface     down  Abrasion                                   No.      image    abrasion    voltage                                                                              resistance                                 ______________________________________                                         (a)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           (b)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                  TABLE 207                                                        ______________________________________                                                Initial                                                                        electri-                                                                Drum   fication Residual        Defective                                                                              Image                                  No.    efficiency                                                                              voltage  Ghost  image   flow                                   ______________________________________                                         (a)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              (b)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              ______________________________________                                                  Increase                                                                       of                   Break                                            Drum     defective                                                                               Surface     down  Abrasion                                   No.      image    abrasion    voltage                                                                              resistance                                 ______________________________________                                         (a)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           (b)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 208 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35  3                                 injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 208 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35  3                                 injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 209                                                        ______________________________________                                                Initial                                                                        electri-                                                                Drum   fication Residual        Defective                                                                              Image                                  No.    efficiency                                                                              voltage  Ghost  image   flow                                   ______________________________________                                         (a)    ⊚                                                                        ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              (b)    ⊚                                                                        ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              ______________________________________                                                  Increase                                                                       of                   Break                                            Drum     defective                                                                               Surface     down  Abrasion                                   No.      image    abrasion    voltage                                                                              resistance                                 ______________________________________                                         (a)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           (b)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 210 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200  250     300   0.40                                                                               20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250     200   0.35                                                                               0.5                                 layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 210 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200  250     300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250     200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 211                                                        ______________________________________                                                Initial                                                                        electri-                                                                Drum   fication Residual        Defective                                                                              Image                                  No.    efficiency                                                                              voltage  Ghost  image   flow                                   ______________________________________                                         (a)    ⊚                                                                        ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              (b)    ⊚                                                                        ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              ______________________________________                                                  Increase                                                                       of                   Break                                            Drum     defective                                                                               Surface     down  Abrasion                                   No.      image    abrasion    voltage                                                                              resistance                                 ______________________________________                                         (a)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           (b)       ○                                                                               ⊚                                                                           ⊚                                                                     ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 212 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35  1                                 absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 212 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100  250     150   0.35  1                                 absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200  250     300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250     200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 213                                                        ______________________________________                                                Initial                                                                        electri-                                                                Drum   fication Residual        Defective                                                                              Image                                  No.    efficiency                                                                              voltage  Ghost  image   flow                                   ______________________________________                                         (a)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              (b)     ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                        ○                              ______________________________________                                               Increase                                                                       of                Break                                                  Drum  defective                                                                               Surface  down   Abrasion                                                                              Interference                             No.   image    abrasion voltage                                                                               resistance                                                                            fringe                                   ______________________________________                                         (a)    ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                                (b)    ○                                                                               ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                                ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 214 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 214 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 215                                                        ______________________________________                                               Initial                                                                  Drum  electrification                                                                           Residual        Defective                                                                              Image                                 No.   efficiency voltage  Ghost  image   flow                                  ______________________________________                                         (a)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              (b)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              ______________________________________                                                 Increase of          Break                                             Drum    defective Surface    down   Abrasion                                   No.     image     abrasion   voltage                                                                               resistance                                 ______________________________________                                         (a)     ○  ⊚                                                                          ⊚                                                                      ⊚                           (b)     ○  ⊚                                                                          ⊚                                                                      ⊚                           ______________________________________                                          ⊚: Exellent                                                      ○ : Good                                                         

                                      TABLE 216 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 216 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 217                                                        ______________________________________                                               Initial                                                                  Drum  electrification                                                                           Residual        Defective                                                                              Image                                 No.   efficiency voltage  Ghost  image   flow                                  ______________________________________                                         (a)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              (b)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              ______________________________________                                               Increase of        Break                                                 Drum  defective Surface  down  Abrasion                                                                              Interference                             No.   image     abrasion voltage                                                                              resistence                                                                            fringe                                   ______________________________________                                         (a)   ○  ⊚                                                                        ⊚                                                                     ⊚                                                                      ○                                 (b)   ○  ⊚                                                                        ⊚                                                                     ⊚                                                                      ○                                 ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 218 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250     50   0.05 0.5                                layer N.sub.2       10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 218 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250     50   0.05 0.5                                layer N.sub.2       10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 219                                                        ______________________________________                                               Initial                                                                  Drum  electrification                                                                           Residual        Defective                                                                              Image                                 No.   efficiency voltage  Ghost  image   flow                                  ______________________________________                                         (a)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ⊚                      (b)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ⊚                      ______________________________________                                                 Increase of          Break                                             Drum    defective Surface    down   Abrasion                                   No.     image     abrasion   voltage                                                                               resistance                                 ______________________________________                                         (a)     ○  ○   ⊚                                                                      ⊚                           (b)     ○  ○   ⊚                                                                      ⊚                           ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 220 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperatrue                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250     50   0.05 0.5                                layer N.sub.2       10                                                         IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 220 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250     50   0.05 0.5                                layer N.sub.2       10                                                         IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 221                                                        ______________________________________                                               Initial                                                                  Drum  electrification                                                                           Residual        Defective                                                                              Image                                 No.   efficiency voltage  Ghost  image   flow                                  ______________________________________                                         (a)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              (b)   ⊚                                                                          ⊚                                                                        ⊚                                                                      ⊚                                                                       ○                              ______________________________________                                               Increase of        Break                                                 Drum  defective Surface  down  Abrasion                                                                              Interference                             No.   image     abrasion voltage                                                                              resistance                                                                            fringe                                   ______________________________________                                         (a)   ○  ⊚                                                                        ⊚                                                                     ⊚                                                                      ○                                 (b)   ○  ⊚                                                                        ⊚                                                                     ⊚                                                                      ○                                 ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 222                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     16701                                                                              SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16702                                                                              SiF.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                16703                                                                              SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16704                                                                              SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16705                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              16706*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16707*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                16708*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16709*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16710*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________      *surface layer followed Table 203 (b)                                          markless case: followed Table 203 (a)                                    

                                      TABLE 223                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     16801                                                                              SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16802                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                16803                                                                              SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16804                                                                              SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16805                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              16806*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16807*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                16808*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16809*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16810*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________      *surface layer followed Table 205 (b)                                          markless case: followed Table 205 (a)                                    

                                      TABLE 224                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     16901                                                                              SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16902                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                16903                                                                              SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16304                                                                              SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16905                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              16906*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                16907*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub. 4)                                                     100                                                                               ppm                                                               NO        6                                                                16908*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              16309*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              16910*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________      *surface layer followed Table 203 (b)                                          markless case: followed Table 203 (a)                                    

                                      TABLE 225                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     17001                                                                              SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               GeH.sub.4 10                                                                   NO        10                                                               17002                                                                              SiH.sub.4 80    250    170   0.25 3                                            SiF.sub.4 20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               SnH.sub.4 5                                                                    NO        5                                                                17003                                                                              SiH.sub.4 100   250    130   0.25 3                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                               NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                                17004*                                                                             SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                           17005*                                                                             SiH.sub.4 100   250    130   0.25 3                                            PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                               GeH.sub.4 10                                                                   NO        10                                                               17006                                                                              SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO**      10                                                               NO***         10 → 0****                                                __________________________________________________________________________      *surface layer followed Table 208(b)                                           markless case: followed Table 208(a)                                           **Substrate side 2 μm                                                       ***Surface layer side 1 μm                                                  ****Constantly changed                                                   

                                      TABLE 226                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               17101                                                                               17106                                                                               17111                                                                               17116                                                                               17121                                                                               17126                                                                               17131                                      conductive                                                                     layer 1                                                                        Photo-                                                                               17102                                                                               17107                                                                               17112                                                                               17117                                                                               17122                                                                               17127                                                                               17132                                      conductive                                                                     layer 2                                                                        Photo-                                                                               17103                                                                               17108                                                                               17113                                                                               17118                                                                               17123                                                                               17128                                                                               17133                                      conductive                                                                     layer 3                                                                        Photo-                                                                               17104                                                                               17109                                                                               17114                                                                               17119                                                                               17124                                                                               17129                                                                               17134                                      conductive                                                                     layer 5                                                                        Photo-                                                                               17105                                                                               17110                                                                               17115                                                                               17120                                                                               17125                                                                               17130                                                                               17135                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer followed Table 6 (b)                                            markless case: followed Table 6 (a)                                      

                                      TABLE 227                                    __________________________________________________________________________          Gas used and its    Substrate    Inner                                                                               Layer                               Name of                                                                             flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer                                                                               (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Surface*                                                                            B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.5                                 layer A                                                                             H.sub.2       100                                                              NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                      Surface*                                                                            B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.5                                 layer B                                                                             H.sub.2       100                                                              NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                      __________________________________________________________________________      *each of the surface layers A and B is individually used in accordance         with the kind of the lower layer                                         

                                      TABLE 228                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               17201                                                                               17207                                                                               17213                                                                               17219                                                                               17225                                                                               17231                                                                               17237                                      conductive                                                                     layer 1                                                                        Photo-                                                                               17202                                                                               17208                                                                               17214                                                                               17220                                                                               17226                                                                               17232                                                                               17238                                      conductive                                                                     layer 2                                                                        Photo-                                                                               17203                                                                               17209                                                                               17215                                                                               17221                                                                               17227                                                                               17233                                                                               17239                                      conductive                                                                     layer 3                                                                        Photo-                                                                               17204                                                                               17210                                                                               17216                                                                               17222                                                                               17228                                                                               17234                                                                               17240                                      conductive                                                                     layer 4                                                                        Photo-                                                                               17205                                                                               17211                                                                               17217                                                                               17223                                                                               17229                                                                               17235                                                                               17241                                      conductive                                                                     layer 5                                                                        Photo-                                                                               17206                                                                               17212                                                                               17218                                                                               17224                                                                               17230                                                                               17236                                                                               17242                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 229                                    __________________________________________________________________________          Gas used and its     Substrate    Inner                                                                               Layer                              Name of                                                                             flow rate            temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer                                                                               (SCCM)               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Surface*                                                                            B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                layer A                                                                             NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                              Surface*                                                                            B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                layer B                                                                             NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                              __________________________________________________________________________      *each of the surface layers A and B is individually used in accordance         with the kind of the lower layer                                         

                                      TABLE 230                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               17301                                                                               17307                                                                               17313                                                                               17319                                                                               17325                                                                               17331                                                                               17337                                      conductive                                                                     layer 1                                                                        Photo-                                                                               17302                                                                               17308                                                                               17314                                                                               17320                                                                               17326                                                                               17362                                                                               17338                                      conductive                                                                     layer 2                                                                        Photo-                                                                               17303                                                                               17309                                                                               17315                                                                               17321                                                                               17327                                                                               17333                                                                               17339                                      conductive                                                                     layer 3                                                                        Photo-                                                                               17304                                                                               17310                                                                               17316                                                                               17322                                                                               17328                                                                               17334                                                                               17340                                      conductive                                                                     layer 4                                                                        Photo-                                                                               17305                                                                               17311                                                                               17317                                                                               17323                                                                               17329                                                                               17335                                                                               17341                                      conductive                                                                     layer 5                                                                        Photo-                                                                               17306                                                                               17312                                                                               17318                                                                               17324                                                                               17330                                                                               17336                                                                               17342                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 231                                                        ______________________________________                                         Photo-               Photo-           Photo-                                   con-       Photo-    con-     Photo-  con-                                     ductive    conductive                                                                               ductive  conductive                                                                             ductive                                  Layer 1    Layer 2   Layer 3  Layer 5 Layer 6                                  ______________________________________                                         Drum  17401    17402     17403  17404   17405                                  No.   17406*   17407*    17408* 17409*  17410*                                 ______________________________________                                          *Surface layer followed Table 210 (b)                                          Markless case: followed Table 210 (a)                                    

                  TABLE 232                                                        ______________________________________                                         Photo-     Photo-  Photo-   Photo-                                                                               Photo- Photo-                                con-       con-    con-     con-  con-   con-                                  ductive    ductive ductive  ductive                                                                              ductive                                                                               ductive                               layer 1    layer 2 layer 3  layer 4                                                                              layer 5                                                                               layer 6                               ______________________________________                                         Drum  17501    17502   17503  17504 17505  17506                               No.   17507*   17508*  17509* 17510*                                                                               17511* 17512*                              ______________________________________                                          *surface layer B was used.                                                     markless case: surface layer A was used.                                 

                  TABLE 233                                                        ______________________________________                                         Photo-     Photo-  Photo-   Photo-                                                                               Photo- Photo-                                con-       con-    con-     con-  con-   con-                                  ductive    ductive ductive  ductive                                                                              ductive                                                                               ductive                               layer 1    layer 2 layer 3  layer 4                                                                              layer 5                                                                               layer 6                               ______________________________________                                         Drum  17601    17602   17603  17604 17605  17606                               No.   17607*   17608*  17609* 17610*                                                                               17611* 17612*                              ______________________________________                                          *surface layer B was used.                                                     *markless case: surface layer A was used.                                

                  TABLE 234                                                        ______________________________________                                                        Drum                                                                           No.                                                             ______________________________________                                         IR Absorptive    17701   17720*                                                Layer 1                                                                        IR Absorptive    17702   17721*                                                Layer 2                                                                        IR Absorptive    17703   17722*                                                Layer 3                                                                        IR Absorptive    17704   17723*                                                Layer 4                                                                        IR Absorptive    17705   17724*                                                Layer 5                                                                        IR Absorptive    17706   --                                                    Layer 6                                                                        IR Absorptive    17707   --                                                    Layer 7                                                                        IR Absorptive    17708   --                                                    Layer 8                                                                        IR Absorptive    17709   --                                                    Layer 9                                                                        IR Absorptive    17710   --                                                    Layer 10                                                                       IR Absorptive    17711   --                                                    Layer 11                                                                       IR Absorptive    17712   --                                                    Layer 12                                                                       IR Absorptive    17713   --                                                    Layer 13                                                                       IR Absorptive    17714   --                                                    Layer 14                                                                       IR Absorptive    17715   --                                                    Layer 15                                                                       IR Absorptive    17716   --                                                    Layer 17                                                                       IR Absorptive    17717   17725*                                                Layer 18                                                                       IR Absorptive    17718   17726*                                                Layer 19                                                                       IR Absorptive    17719   17727*                                                Layer 20                                                                       ______________________________________                                          *:Surface layer followed                                                       Table 212(b)                                                                   Markless case:followed 212(a)                                            

                                      TABLE 235                                    __________________________________________________________________________            Photo- Photo-                                                                               Photo- Photo-                                                                               Photo-                                        Drum   conductive                                                                            conductive                                                                           conductive                                                                            conductive                                                                           conductive                                    No.    layer 1                                                                               layer 2                                                                              layer 3                                                                               layer 5                                                                              layer 6                                       __________________________________________________________________________     IR absorptive                                                                         17801  17821 17841  17861 17881                                         layer 1                                                                        IR absorptive                                                                         17802  17822 17842  17862 17882                                         layer 2                                                                        IR absorptive                                                                         17803  17823 17843  17863 17883                                         layer 3                                                                        IR absorptive                                                                         17804  17824 17844  17864 17884                                         layer 4                                                                        IR absorptive                                                                         17805  17825 17845  17865 17885                                         layer 5                                                                        IR absorptive                                                                         17806  17826 17846  17866 17886                                         layer 6                                                                        IR absorptive                                                                         17807  17827 17847  17867 17887                                         layer 7                                                                        IR absorptive                                                                         17808  17828 17848  17868 17888                                         layer 8                                                                        IR absorptive                                                                         17809  17829 17849  17869 17889                                         layer 9                                                                        IR absorptive                                                                         17810  17830 17850  17870 17890                                         layer 10                                                                       IR absorptive                                                                         17811  17831 17851  17871 17891                                         layer 11*                                                                      IR absorptive                                                                         17812  17832 17852  17872 17892                                         layer 12*                                                                      IR absorptive                                                                         17813  17833 17853  17873 17893                                         layer 13*                                                                      IR absorptive                                                                         17814  17834 17854  17874 17894                                         layer 14*                                                                      IR absorptive                                                                         17815  17835 17855  17875 17895                                         layer 15*                                                                      IR absorptive                                                                         17816  17836 17856  17876 17896                                         layer 16                                                                       IR absorptive                                                                         17817  17837 17857  17877 17897                                         layer 17*                                                                      IR absorptive                                                                         17818  17838 17858  17878 17898                                         layer 18                                                                       IR absorptive                                                                         17819  17839 17859  17879 17899                                         layer 19                                                                       IR absorptive                                                                         17820  17840 17860  17880 178100                                        layer 20                                                                       __________________________________________________________________________      *: surface layer followed Table 212(b)                                         markless case: followed Table 212(a)                                     

                                      TABLE 236                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         17901 17921 17941 17961 17981 179101                                    layer 1                                                                        IR absorptive                                                                         17902 17922 17942 17962 17982 179102                                    layer 2                                                                        IR absorptive                                                                         17903 17923 17943 17963 17983 179103                                    layer 3                                                                        IR absorptive                                                                         17904 17924 17944 17964 17984 179104                                    layer 4                                                                        IR absorptive                                                                         17905 17925 17945 17965 17985 179105                                    layer 5                                                                        IR absorptive                                                                         17906 17926 17946 17966 17986 179106                                    layer 6                                                                        IR absorptive                                                                         17907 17927 17947 17967 17987 179107                                    layer 7                                                                        IR absorptive                                                                         17908 17928 17948 17968 17988 179108                                    layer 8                                                                        IR absorptive                                                                         17909 17929 17949 17969 17989 179109                                    layer 9                                                                        IR absorptive                                                                         17910 17930 17950 17970 17990 179110                                    layer 10                                                                       IR absorptive                                                                         17911 17931 17951 17971 17991 179111                                    layer 11*                                                                      IR absorptive                                                                         17912 17932 17952 17972 17992 179112                                    layer 12*                                                                      IR absorptive                                                                         17913 17933 17953 17973 17993 179113                                    layer 13*                                                                      IR absorptive                                                                         17914 17934 17954 17974 17994 179114                                    layer 14*                                                                      IR absorptive                                                                         17915 17935 17955 17975 17995 179115                                    layer 15*                                                                      IR absorptive                                                                         17916 17936 17956 17976 17996 179116                                    layer 16                                                                       IR absorptive                                                                         17917 17937 17957 17977 17997 179117                                    layer 17*                                                                      IR absorptive                                                                         17918 17938 17958 17978 17998 179118                                    layer 18                                                                       IR absorptive                                                                         17919 17939 17959 17979 17999 179119                                    layer 19                                                                       IR absorptive                                                                         17920 17940 17960 17980 179100                                                                               179120                                    layer 20                                                                       __________________________________________________________________________      *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 237                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         18001 18021 18041 18061 18081 180101                                    layer 1                                                                        IR absorptive                                                                         18002 18022 18042 18062 18082 180102                                    layer 2                                                                        IR absorptive                                                                         18003 18023 18043 18063 18083 180103                                    layer 3                                                                        IR absorptive                                                                         18004 18024 18044 18064 18084 180104                                    layer 4                                                                        IR absorptive                                                                         18005 18025 18045 18065 18085 180105                                    layer 5                                                                        IR absorptive                                                                         18006 18026 18046 18066 18086 180106                                    layer 6                                                                        IR absorptive                                                                         18007 18027 18047 18067 18087 180107                                    layer 7                                                                        IR absorptive                                                                         18008 18028 18048 18068 18088 180108                                    layer 8                                                                        IR absorptive                                                                         18009 18029 18049 18069 18089 180109                                    layer 9                                                                        IR absorptive                                                                         18010 18030 18050 18070 18090 180110                                    layer 10                                                                       IR absorptive                                                                         18011 18031 18051 18071 18091 180111                                    layer 11*                                                                      IR absorptive                                                                         18012 18032 18052 18072 18092 180112                                    layer 12*                                                                      IR absorptive                                                                         18013 18033 18053 18073 18093 180113                                    layer 13*                                                                      IR absorptive                                                                         18014 18034 18054 18074 18094 180114                                    layer 14*                                                                      IR absorptive                                                                         18015 18035 18055 18075 18095 180115                                    layer 15*                                                                      IR absorptive                                                                         18016 18036 18056 18076 18096 180116                                    layer 16                                                                       IR absorptive                                                                         18017 18037 18057 18077 18097 180117                                    layer 17*                                                                      IR absorptive                                                                         18018 18038 18058 18078 18098 180118                                    layer 18                                                                       IR absorptive                                                                         18019 18039 18059 18079 18099 180119                                    layer 19                                                                       IR absorptive                                                                         18020 18040 18060 18080 180100                                                                               180120                                    layer 20                                                                       __________________________________________________________________________      *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 238                                                        ______________________________________                                         Contact           Contact  Contact                                             Layer 2           Layer 3  Layer 4                                             ______________________________________                                         Drum    18101         18102    18103                                           No.     18104*        18105*   18106*                                          ______________________________________                                          *Surface layer followed Table 214 (b)                                          Markless case: followed Table 214 (a)                                    

                  TABLE 239                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   18201      18207*   18213   18219                                     conductive                                                                     layer 1                                                                        Photo-   18202     18208      18214* 18220                                     conductive                                                                     layer 2                                                                        Photo-    18203*   18209     18215   18221                                     conductive                                                                     layer 3                                                                        Photo-   18204     18210     18216    18222*                                   conductive                                                                     layer 4                                                                        Photo-   18205     18211      18217* 18223                                     conductive                                                                     layer 5                                                                        Photo-   18206      18212*   18218   18224                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 214 (b)                                          markless case: followed Table 214 (a)                                    

                  TABLE 240                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   18301     18307      18313* 18319                                     conductive                                                                     layer 1                                                                        Photo-   18302      18308*   18314   18320                                     conductive                                                                     layer 2                                                                        Photo-   18303     18309     18315    18321*                                   conductive                                                                     layer 3                                                                        Photo-    18304*   18310     18316   18322                                     conductive                                                                     layer 4                                                                        Photo-   18305      18311*   18317   18323                                     conductive                                                                     layer 5                                                                        Photo-   18306     18312      18318* 18324                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 241                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-    18402*   18407     18413   18419                                     conductive                                                                     layer 1                                                                        Photo-   18402     18408      18414* 18420                                     conductive                                                                     layer 2                                                                        Photo-   18403     18409     18415    18421*                                   conductive                                                                     layer 3                                                                        Photo-   18404      18410*   18416   18422                                     conductive                                                                     layer 4                                                                        Photo-   18405     18411     18417    18423*                                   conductive                                                                     layer 5                                                                        Photo-    18406*   18412     18418   18424                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 242                                                        ______________________________________                                                        Drum                                                                           No.                                                             ______________________________________                                         IR absorptive    18501   18521                                                 layer 1                  *                                                     IR absorptive    18502   18522                                                 layer 2                  *                                                     IR absorptive    18503   18523                                                 layer 3                  *                                                     IR absorptive    18504   18524                                                 layer 4                  *                                                     IR absorptive    18505   18526                                                 layer 5                  *                                                     IR absorptive    18506   18526                                                 layer 6                  *                                                     IR absorptive    18507   18527                                                 layer 7                  *                                                     IR absorptive    18508   18528                                                 layer 8                  *                                                     IR absorptive    18509   18529                                                 layer 9                  *                                                     IR absorptive    18510   18530                                                 layer 10                 *                                                     IR absorptive    18511   18531                                                 layer 11                 *                                                     IR absorptive    18512   18532                                                 layer 12                 *                                                     IR absorptive    18513   18533                                                 layer 13                 *                                                     IR absorptive    18514   18534                                                 layer 14                 *                                                     IR absorptive    18515   18535                                                 layer 15                 *                                                     IR absorptive    18516   18536                                                 layer 16                 *                                                     IR absorptive    18517   18537                                                 layer 17                 *                                                     IR absorptive    18518   18538                                                 layer 18                 *                                                     IR absorptive    18519   18539                                                 layer 19                 *                                                     IR absorptive    18520   18540                                                 layer 20                 *                                                     ______________________________________                                           *Charge injection inhibition layer and surface layer followed Table           216(b)                                                                         markless case: followed Table 216(a)                                     

                  TABLE 243                                                        ______________________________________                                                    Photo-      Photo-    Photo-                                        Drum       conductive  conductive                                                                               conductive                                    No.        layer 4     layer 5*  layer 7                                       ______________________________________                                         IR absorptive                                                                             18601       18621     18641                                         layer 1                                                                        IR absorptive                                                                             18602       18622     18642                                         layer 2                                                                        IR absorptive                                                                             18603       18623     18643                                         layer 3                                                                        IR absorptive                                                                             18604       18624     18644                                         layer 4                                                                        IR absorptive                                                                             18605       18625     18645                                         layer 5                                                                        IR absorptive                                                                             18606       18626     18646                                         layer 6                                                                        IR absorptive                                                                             18607       18627     18647                                         layer 7                                                                        IR absorptive                                                                             18608       18628     18648                                         layer 8                                                                        IR absorptive                                                                             18609       18629     18649                                         layer 9                                                                        IR absorptive                                                                             18610       18630     18650                                         layer 10                                                                       IR absorptive                                                                             18611       18631     18651                                         layer 11                                                                       IR absorptive                                                                             18612       18632     18652                                         layer 12                                                                       IR absorptive                                                                             18613       18633     18653                                         layer 13                                                                       IR absorptive                                                                             18614       18634     18654                                         layer 14                                                                       IR absorptive                                                                             18615       18635     18655                                         layer 15                                                                       IR absorptive                                                                             18616       18636     18656                                         layer 16                                                                       IR absorptive                                                                             18617       18637     18657                                         layer 17                                                                       IR absorptive                                                                             18618       18638     18658                                         layer 18                                                                       IR absorptive                                                                             18619       18639     18659                                         layer 19                                                                       IR absorptive                                                                             18620       18640     18660                                         layer 20                                                                       ______________________________________                                           *surface layer followed Table 216(b)                                          markless case: followed Table 216(a)                                     

                  TABLE 244                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           18701     18721     18741   18761                                     layer 1                                                                        IR absorptive                                                                           18702     18722     18742   18762                                     layer 2                                                                        IR absorptive                                                                           18703     18723     18743   18763                                     layer 3                                                                        IR absorptive                                                                           18704     18724     18744   18764                                     layer 4                                                                        IR absorptive                                                                           18705     18725     18745   18765                                     layer 5                                                                        IR absorptive                                                                           18706     18726     18746   18766                                     layer 6                                                                        IR absorptive                                                                           18707     18727     18747   18767                                     layer 7                                                                        IR absorptive                                                                           18708     18728     18748   18768                                     layer 8                                                                        IR absorptive                                                                           18709     18729     18749   18769                                     layer 9                                                                        IR absorptive                                                                           18710     18730     18750   18770                                     layer 10                                                                       IR absorptive                                                                           18711     18731     18751   18771                                     layer 11                                                                       IR absorptive                                                                           18712     18732     18752   18772                                     layer 12                                                                       IR absorptive                                                                           18713     18733     18753   18773                                     layer 13                                                                       IR absorptive                                                                           18714     18734     18754   18774                                     layer 14                                                                       IR absorptive                                                                           18715     18735     18755   18775                                     layer 15                                                                       IR absorptive                                                                           18716     18736     18756   18776                                     layer 16                                                                       IR absorptive                                                                           18717     18737     18757   18777                                     layer 17                                                                       IR absorptive                                                                           18718     18738     18758   18778                                     layer 18                                                                       IR absorptive                                                                           18719     18739     18759   18779                                     layer 19                                                                       IR absorptive                                                                           18720     18740     18760   18780                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 245                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           18801     18821     18841   18861                                     layer 1                                                                        IR absorptive                                                                           18802     18822     18842   18862                                     layer 2                                                                        IR absorptive                                                                           18803     18823     18843   18863                                     layer 3                                                                        IR absorptive                                                                           18804     18824     18844   18864                                     layer 4                                                                        IR absorptive                                                                           18805     18825     18845   18865                                     layer 5                                                                        IR absorptive                                                                           18806     18826     18846   18866                                     layer 6                                                                        IR absorptive                                                                           18807     18827     18847   18867                                     layer 7                                                                        IR absorptive                                                                           18808     18828     18848   18868                                     layer 8                                                                        IR absorptive                                                                           18809     18829     18849   18869                                     layer 9                                                                        IR absorptive                                                                           18810     18830     18850   18870                                     layer 10                                                                       IR absorptive                                                                           18811     18831     18851   18871                                     layer 11                                                                       IR absorptive                                                                           18812     18832     18852   18872                                     layer 12                                                                       IR absorptive                                                                           18813     18833     18853   18873                                     layer 13                                                                       IR absorptive                                                                           18814     18834     18854   18874                                     layer 14                                                                       IR absorptive                                                                           18815     18835     18855   18875                                     layer 15                                                                       IR absorptive                                                                           18816     18836     18856   18876                                     layer 16                                                                       IR absorptive                                                                           18817     18837     18857   18877                                     layer 17                                                                       IR absorptive                                                                           18818     18838     18858   18878                                     layer 18                                                                       IR absorptive                                                                           18819     18839     18859   18879                                     layer 19                                                                       IR absorptive                                                                           18820     18840     18860   18880                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                                      TABLE 246                                    __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               18901                                                                               18902                                                                               18903                                                                               18904                                                                               18905                                                                               18906                                                                               18907                                        No. 18908*                                                                              18909*                                                                              18910*                                                                              18911*                                                                              18912*                                                                              18913*                                                                              18914*                                       __________________________________________________________________________      *Charge injection inhibition layer and surface layer followed Table 218        (b)                                                                            Markless case: followed Table 218 (a)                                    

                                      TABLE 247                                    __________________________________________________________________________           Charge                                                                              Charge                                                                               Charge                                                                              Charge                                                                               Charge                                                                              Charge                                              injection                                                                           injection                                                                            injection                                                                           injection                                                                            injection                                                                           injection                                     Drum  inhibition                                                                          inhibition                                                                           inhibition                                                                          inhibition                                                                           inhibition                                                                          inhibition                                    No.   layer 2                                                                             layer 3                                                                              layer 4                                                                             layer 5*                                                                             layer 6*                                                                            layer 7                                       __________________________________________________________________________     Contact                                                                              19001                                                                               19009 19017                                                                               19025 19033                                                                               19041                                         layer 1                                                                        Contact                                                                              19002                                                                               19010 19018                                                                               19026 19034                                                                               19042                                         layer 2                                                                        Contact                                                                              19003                                                                               19011 19019                                                                               19027 19035                                                                               19043                                         layer 3                                                                        Contact                                                                              19004                                                                               19012 19020                                                                               19028 19036                                                                               19044                                         layer 4                                                                        Contact                                                                              19005                                                                               19013 19021                                                                               19029 19037                                                                               19045                                         layer 5                                                                        Contact                                                                              19006                                                                               19014 19022                                                                               19030 19038                                                                               19046                                         layer 6                                                                        Contact                                                                              19007                                                                               19015 19023                                                                               19031 19039                                                                               19047                                         layer 7                                                                        Contact                                                                              19008                                                                               19016 19024                                                                               19032 19040                                                                               19048                                         layer 8                                                                        __________________________________________________________________________      *surface layer followed Table 218 (b)                                          markless case: followed Table 218 (a)                                    

                                      TABLE 248                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             19101                                                                               19109                                                                               19117                                                                               19125                                                                               19133                                                                               19141                                                                               19149                                       layer 1                                                                        Contact                                                                             19102                                                                               19110                                                                               19118                                                                               19126                                                                               19134                                                                               19142                                                                               19150                                       layer 2                                                                        Contact                                                                             19103                                                                               19111                                                                               19119                                                                               19127                                                                               19135                                                                               19143                                                                               19151                                       layer 3                                                                        Contact                                                                             19104                                                                               19112                                                                               19120                                                                               19128                                                                               19136                                                                               19144                                                                               19152                                       layer 4                                                                        Contact                                                                             19105                                                                               19113                                                                               19121                                                                               19129                                                                               19137                                                                               19145                                                                               19153                                       layer 5                                                                        Contact                                                                             19106                                                                               19114                                                                               19122                                                                               19130                                                                               19138                                                                               19146                                                                               19154                                       layer 6                                                                        Contact                                                                             19107                                                                               19115                                                                               19123                                                                               19131                                                                               19139                                                                               19147                                                                               19155                                       layer 7                                                                        Contact                                                                             19108                                                                               19116                                                                               19124                                                                               19132                                                                               19140                                                                               19148                                                                               19156                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 249                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             19201                                                                               19209                                                                               19217                                                                               19225                                                                               19233                                                                               19241                                                                               19249                                       layer 1                                                                        Contact                                                                             19202                                                                               19210                                                                               19218                                                                               19226                                                                               19234                                                                               19242                                                                               19250                                       layer 2                                                                        Contact                                                                             19203                                                                               19211                                                                               19219                                                                               19227                                                                               19235                                                                               19243                                                                               19251                                       layer 3                                                                        Contact                                                                             19204                                                                               19212                                                                               19220                                                                               19228                                                                               19236                                                                               19244                                                                               19252                                       layer 4                                                                        Contact                                                                             19205                                                                               19213                                                                               19221                                                                               19229                                                                               19237                                                                               19245                                                                               19253                                       layer 5                                                                        Contact                                                                             19206                                                                               19214                                                                               19222                                                                               19230                                                                               19238                                                                               19246                                                                               19254                                       layer 6                                                                        Contact                                                                             19207                                                                               19215                                                                               19223                                                                               19231                                                                               19239                                                                               19247                                                                               19255                                       layer 7                                                                        Contact                                                                             19208                                                                               19216                                                                               19224                                                                               19232                                                                               19240                                                                               19248                                                                               19256                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 250                                                        ______________________________________                                         Charge            Charge   Charge                                              injection         injection                                                                               injection                                           inhibition        inhibition                                                                              inhibition                                          layer 4           layer 6* layer 7                                             ______________________________________                                         Drum    19301         19302    19303                                           No.                                                                            ______________________________________                                          *surface layer followed Table 220 (b)                                          markless case: followed Table 220 (a)                                    

                  TABLE 251                                                        ______________________________________                                                  Charge   Charge     Charge Charge                                              injection                                                                               injection  injection                                                                             injection                                  Drum     inhibition                                                                              inhibition inhibition                                                                            inhibition                                 No.      layer 1  layer 4    layer 6*                                                                              layer 7                                    ______________________________________                                         Photo-   19401    19403      19405  19407                                      conductive                                                                     layer 5                                                                        Photo-   19402    19404      19406  19408                                      conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 220 (b)                                          markless case: followed Table 220 (a)                                    

                  TABLE 252                                                        ______________________________________                                                  Charge   Charge     Charge Charge                                              injection                                                                               injection  injection                                                                             injection                                  Drum     inhibition                                                                              inhibition inhibition                                                                            inhibition                                 No.      layer 1  layer 4    layer 6*                                                                              layer 7                                    ______________________________________                                         Photo-   19501    19504      19507  19510                                      conductive                                                                     layer 4                                                                        Photo-   19502    19505      19508  19511                                      conductive                                                                     layer 5                                                                        Photo-   19503    19506      19509  19512                                      conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 253                                                        ______________________________________                                                  Charge   Charge     Charge Charge                                              injection                                                                               injection  injection                                                                             injection                                  Drum     inhibition                                                                              inhibition inhibition                                                                            inhibition                                 No.      layer 1  layer 4    layer 6*                                                                              layer 7                                    ______________________________________                                         Photo-   19601    19604      19607  19610                                      conductive                                                                     layer 4                                                                        Photo-   19602    19605      19608  19611                                      conductive                                                                     layer 5                                                                        Photo-   19603    19606      19609  19612                                      conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 254                                    __________________________________________________________________________          Gas used and its    Substrate    Inner                                                                               Layer                               Name of                                                                             flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer                                                                               (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                 layer A                                                                             NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                      Surface                                                                             B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                 layer B                                                                             NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                      __________________________________________________________________________

                  TABLE 255                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           19701     19721     19741   19761                                     layer 1                                                                        IR absorptive                                                                           19702     19722     19742   19762                                     layer 2                                                                        IR absorptive                                                                           19703     19723     19743   19763                                     layer 3                                                                        IR absorptive                                                                           19704     19724     19744   19764                                     layer 4                                                                        IR absorptive                                                                           19705     19725     19745   19765                                     layer 5                                                                        IR absorptive                                                                           19706     19726     19746   19766                                     layer 6                                                                        IR absorptive                                                                           19707     19727     19747   19767                                     layer 7                                                                        IR absorptive                                                                           19708     19728     19748   19768                                     layer 8                                                                        IR absorptive                                                                           19709     19729     19749   19769                                     layer 9                                                                        IR absorptive                                                                           19710     19730     19750   19770                                     layer 10                                                                       IR absorptive                                                                           19711     19731     19751   19771                                     layer 11                                                                       IR absorptive                                                                           19712     19732     19752   19772                                     layer 12                                                                       IR absorptive                                                                           19713     19733     19753   19773                                     layer 13                                                                       IR absorptive                                                                           19714     19734     19754   19774                                     layer 14                                                                       IR absorptive                                                                           19715     19735     19755   19775                                     layer 15                                                                       IR absorptive                                                                           19716     19736     19756   19776                                     layer 16                                                                       IR absorptive                                                                           19717     19737     19757   19777                                     layer 17                                                                       IR absorptive                                                                           19718     19738     19758   19778                                     layer 18                                                                       IR absorptive                                                                           19719     19739     19759   19779                                     layer 19                                                                       IR absorptive                                                                           19720     19740     19760   19780                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 256                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           19801     19821     19841   19861                                     layer 1                                                                        IR absorptive                                                                           19802     19822     19842   19862                                     layer 2                                                                        IR absorptive                                                                           19803     19823     19843   19863                                     layer 3                                                                        IR absorptive                                                                           19804     19824     19844   19864                                     layer 4                                                                        IR absorptive                                                                           19805     19825     19845   19865                                     layer 5                                                                        IR absorptive                                                                           19806     19826     19846   19866                                     layer 6                                                                        IR absorptive                                                                           19807     19827     19847   19867                                     layer 7                                                                        IR absorptive                                                                           19808     19828     19848   19868                                     layer 8                                                                        IR absorptive                                                                           19809     19829     19849   19869                                     layer 9                                                                        IR absorptive                                                                           19810     19830     19850   19870                                     layer 10                                                                       IR absorptive                                                                           19811     19831     19851   19871                                     layer 11                                                                       IR absorptive                                                                           19812     19832     19852   19872                                     layer 12                                                                       IR absorptive                                                                           19813     19833     19853   19873                                     layer 13                                                                       IR absorptive                                                                           19814     19834     19854   19874                                     layer 14                                                                       IR absorptive                                                                           19815     19835     19855   19875                                     layer 15                                                                       IR absorptive                                                                           19816     19836     19856   19876                                     layer 16                                                                       IR absorptive                                                                           19817     19837     19857   19877                                     layer 17                                                                       IR absorptive                                                                           19818     19838     19858   19878                                     layer 18                                                                       IR absorptive                                                                           19819     19839     19859   19879                                     layer 19                                                                       IR absorptive                                                                           19820     19840     19860   19880                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 257                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           19901     19921     19941   19961                                     layer 1                                                                        IR absorptive                                                                           19902     19922     19942   19962                                     layer 2                                                                        IR absorptive                                                                           19903     19923     19943   19963                                     layer 3                                                                        IR absorptive                                                                           19904     19924     19944   19964                                     layer 4                                                                        IR absorptive                                                                           19905     19925     19945   19965                                     layer 5                                                                        IR absorptive                                                                           19906     19926     19946   19966                                     layer 6                                                                        IR absorptive                                                                           19907     19927     19947   19967                                     layer 7                                                                        IR absorptive                                                                           19908     19928     19948   19968                                     layer 8                                                                        IR absorptive                                                                           19909     19929     19949   19969                                     layer 9                                                                        IR absorptive                                                                           19910     19930     19950   19970                                     layer 10                                                                       IR absorptive                                                                           19911     19931     19951   19971                                     layer 11                                                                       IR absorptive                                                                           19912     19932     19952   19972                                     layer 12                                                                       IR absorptive                                                                           19913     19933     19953   19973                                     layer 13                                                                       IR absorptive                                                                           19914     19934     19954   19974                                     layer 14                                                                       IR absorptive                                                                           19915     19935     19955   19975                                     layer 15                                                                       IR absorptive                                                                           19916     19936     19956   19976                                     layer 16                                                                       IR absorptive                                                                           19917     19937     19957   19977                                     layer 17                                                                       IR absorptive                                                                           19918     19938     19958   19978                                     layer 18                                                                       IR absorptive                                                                           19919     19938     19959   19979                                     layer 19                                                                       IR absorptive                                                                           19920     19940     19960   19980                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 258                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           20001     20021     20041   20061                                     layer 1                                                                        IR absorptive                                                                           20002     20022     20042   20062                                     layer 2                                                                        IR absorptive                                                                           20003     20023     20043   20063                                     layer 3                                                                        IR absorptive                                                                           20004     20024     20044   20064                                     layer 4                                                                        IR absorptive                                                                           20005     20025     20045   20065                                     layer 5                                                                        IR absorptive                                                                           20006     20026     20046   20066                                     layer 6                                                                        IR absorptive                                                                           20007     20027     20047   20067                                     layer 7                                                                        IR absorptive                                                                           20008     20028     20048   20068                                     layer 8                                                                        IR absorptive                                                                           20009     20029     20049   20069                                     layer 9                                                                        IR absorptive                                                                           20010     20030     20050   20070                                     layer 10                                                                       IR absorptive                                                                           20011     20031     20051   20071                                     layer 11                                                                       IR absorptive                                                                           20012     20032     20052   20072                                     layer 12                                                                       IR absorptive                                                                           20013     20033     20053   20073                                     layer 13                                                                       IR absorptive                                                                           20014     20034     20054   20074                                     layer 14                                                                       IR absorptive                                                                           20015     20035     20055   20075                                     layer 15                                                                       IR absorptive                                                                           20016     20036     20056   20076                                     layer 16                                                                       IR absorptive                                                                           20017     20037     20057   20078                                     layer 17                                                                       IR absorptive                                                                           20018     20038     20058   20078                                     layer 18                                                                       IR absorptive                                                                           20019     20039     20059   20079                                     layer 19                                                                       IR absorptive                                                                           20020     20040     20060   20080                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 259                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           20101     20121     20141   20161                                     layer 1                                                                        IR absorptive                                                                           20102     20122     20142   20162                                     layer 2                                                                        IR absorptive                                                                           20103     20123     20143   20163                                     layer 3                                                                        IR absorptive                                                                           20104     20124     20144   20164                                     layer 4                                                                        IR absorptive                                                                           20105     20125     20145   20165                                     layer 5                                                                        IR absorptive                                                                           20106     20126     20146   20166                                     layer 6                                                                        IR absorptive                                                                           20107     20127     20147   20167                                     layer 7                                                                        IR absorptive                                                                           20108     20128     20148   20168                                     layer 8                                                                        IR absorptive                                                                           20109     20129     20149   20169                                     layer 9                                                                        IR absorptive                                                                           20110     20130     20150   20170                                     layer 10                                                                       IR absorptive                                                                           20111     20131     20151   20171                                     layer 11                                                                       IR absorptive                                                                           20112     20132     20152   20172                                     layer 12                                                                       IR absorptive                                                                           20113     20133     20153   20173                                     layer 13                                                                       IR absorptive                                                                           20114     20134     20154   20174                                     layer 14                                                                       IR absorptive                                                                           20115     20135     20155   20175                                     layer 15                                                                       IR absorptive                                                                           20116     20136     20156   20176                                     layer 16                                                                       IR absorptive                                                                           20117     20137     20157   20177                                     layer 17                                                                       IR absorptive                                                                           20118     20138     20158   20178                                     layer 18                                                                       IR absorptive                                                                           20119     20139     20159   20179                                     layer 19                                                                       IR absorptive                                                                           20120     20140     20160   20180                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 260                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           20201     20221     20241   20261                                     layer 1                                                                        IR absorptive                                                                           20202     20222     20242   20262                                     layer 2                                                                        IR absorptive                                                                           20203     20223     20243   20263                                     layer 3                                                                        IR absorptive                                                                           20204     20224     20244   20264                                     layer 4                                                                        IR absorptive                                                                           20205     20225     20245   20265                                     layer 5                                                                        IR absorptive                                                                           20206     20226     20246   20266                                     layer 6                                                                        IR absorptive                                                                           20207     20227     20247   20267                                     layer 7                                                                        IR absorptive                                                                           20208     20228     20248   20268                                     layer 8                                                                        IR absorptive                                                                           20209     20229     20249   20269                                     layer 9                                                                        IR absorptive                                                                           20210     20230     20250   20270                                     layer 10                                                                       IR absorptive                                                                           20211     20231     20251   20271                                     layer 11                                                                       IR absorptive                                                                           20212     20232     20252   20272                                     layer 12                                                                       IR absorptive                                                                           20213     20233     20253   20273                                     layer 13                                                                       IR absorptive                                                                           20214     20234     20254   20274                                     layer 14                                                                       IR absorptive                                                                           20215     20235     20255   20275                                     layer 15                                                                       IR absorptive                                                                           20216     20236     20256   20276                                     layer 16                                                                       IR absorptive                                                                           20217     20237     20257   20277                                     layer 17                                                                       IR absorptive                                                                           20218     20238     20258   20278                                     layer 18                                                                       IR absorptive                                                                           20219     20239     20259   20279                                     layer 19                                                                       IR absorptive                                                                           20220     20240     20260   20280                                     layer 20                                                                       ______________________________________                                           *surface layer B was used                                                     markless case: surface layer A was used                                  

                                      TABLE 261                                    __________________________________________________________________________         Gas used and its     Substrate    Inner                                                                               Layer                               Drum                                                                               flow rate            temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. (SCCM)               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     20301                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          20302                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      100                                                          20303                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 262                                    __________________________________________________________________________         Gas used and its     Substrate    Inner                                                                               Layer                               Drum                                                                               flow rate            temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. (SCCM)               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     20401                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          20402                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      100                                                          20403                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 263                                    __________________________________________________________________________         Gas used and its     Substrate    Inner                                                                               Layer                               Drum                                                                               flow rate            temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. (SCCM)               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     20501                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          20502                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      100                                                          20503                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 264                                    __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Inter-                                                                               SiH.sub.4     10    250    150   0.35 0.3                                mediate                                                                              CH.sub.4      400                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 265 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 265 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 266                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 267 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.5                                layer H.sub.2       100                                                              NH.sub.3      300                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                     __________________________________________________________________________

                                      TABLE 267 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    250   0.35 20                                 conductive                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                     layer NO            4                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.5                                layer H.sub.2       100                                                              NH.sub.3      300                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                     __________________________________________________________________________

                  TABLE 268                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                  TABLE 269                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 270 (a)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 270 (b)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 271                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 272 (a)                                __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Name of                                                                              Gas used and its   temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer flow rate (SCCM)   (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.5                                 layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    __________________________________________________________________________

                                      TABLE 272 (b)                                __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Name of                                                                              Gas used and its   temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer flow rate (SCCM)   (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.5                                 layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    __________________________________________________________________________

                  TABLE 273                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 274 (a)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 274 (b)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 275                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ○ ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 276 (a)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 276 (b)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 277                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break           Degree of                                                                              Degree of                               Drum  Surface  down    Abrasion                                                                               background                                                                             residual                                No.   abrasion voltage resistance                                                                             fogginess                                                                              stress                                  ______________________________________                                         (a)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        (b)   ○ ○                                                                               ○                                                                               ⊚                                                                       ⊚                        ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 278 (a)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 278 (b)                                __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 279                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break          Degree of                                                                              Degree of                                Drum  Surface  down    Abrasion                                                                              background                                                                             residual                                 No.   abrasion voltage resistance                                                                            fogginess                                                                              stress                                   ______________________________________                                         (a)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         (b)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         ______________________________________                                          ⊚:Excellent                                                      ○ :Good                                                          

                                      TABLE 280 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250     50   0.05 0.5                                layer N.sub.2       10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 280 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250     50   0.05 0.5                                layer N.sub.2       10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH 3 (against SiH.sub.4)                                                                     800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 281                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break          Degree of                                                                              Degree of                                Drum  Surface  down    Abrasion                                                                              background                                                                             residual                                 No.   abrasion voltage resistance                                                                            fogginess                                                                              stress                                   ______________________________________                                         (a)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         (b)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         ______________________________________                                          ⊚:Excellent                                                      ○ :Good                                                          

                                      TABLE 282 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250     50   0.05 0.5                                layer N.sub.2       10                                                         IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 282 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4      20   250     50   0.05 0.5                                layer N.sub.2       10                                                         IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                  TABLE 283                                                        ______________________________________                                               Initial                             Increase                                   electri-                Defec-      of                                   Drum  fication Residual       tive  Image defective                            No.   efficiency                                                                              voltage  Ghost image flow  image                                ______________________________________                                         (a)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             (b)   ⊚                                                                        ⊚                                                                        ○                                                                             ⊚                                                                     ⊚                                                                     ○                             ______________________________________                                                        Break          Degree of                                                                              Degree of                                Drum  Surface  down    Abrasion                                                                              background                                                                             residual                                 No.   abrasion voltage resistance                                                                            fogginess                                                                              stress                                   ______________________________________                                         (a)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         (b)   ○ ○                                                                               ○                                                                              ⊚                                                                       ⊚                         ______________________________________                                          ⊚:Excellent                                                      ○ :Good                                                          

                                      TABLE 284                                    __________________________________________________________________________          Gas used and its                                                                               Substrate    Inner                                                                               Layer                                   Drum flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                               No.  (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     21901                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                               21902                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                               21903                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                             21904                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                             21905                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              21906*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                21907*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                21908*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              21909*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              21910*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                             __________________________________________________________________________      *surface layer followed Table 265 (b)                                          markless case: followed Table 265 (a)                                    

                                      TABLE 285                                    __________________________________________________________________________          Gas used and its                                                                               Substrate    Inner                                                                               Layer                                   Drum flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                               No.  (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     22001                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                               22002                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                               22003                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                             22004                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                             22005                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              22006*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                22007*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                22008*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              22009*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              22010*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                             __________________________________________________________________________      *surface layer followed Table 267 (b)                                          markless case: followed Table 267 (a)                                    

                                      TABLE 286                                    __________________________________________________________________________          Gas used and its                                                                               Substrate    Inner                                                                               Layer                                   Drum flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                               No.  (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                 __________________________________________________________________________     22101                                                                               SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                               22102                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                               22103                                                                               SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                             22104                                                                               SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                             22105                                                                               SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              22106*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                22107*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                22108*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              22109*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              22110*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                             __________________________________________________________________________      *surface layer followed Table 265 (b)                                          markless case: followed Table 265 (a)                                    

                                      TABLE 287                                    __________________________________________________________________________                         Substrate    Inner                                                                               Layer                                    Drum                                                                               Gas used and its                                                                               temperature                                                                           RF Power                                                                             pressure                                                                            thickness                                No. flow rate (SCCM)                                                                               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     22201                                                                              SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               GeH.sub.4 10                                                                   NO        10                                                               22202                                                                              SiH.sub.4 80    250    170   0.25 3                                            SiF.sub.4 20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               SnH.sub.4 5                                                                    NO        5                                                                22203                                                                              SiH.sub.4 100   250    130   0.25 3                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800                                                                               ppm                                                               NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                                22204*                                                                             SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                           22205*                                                                             SiH.sub.4 100   250    130   0.25 3                                            PH.sub.3 (against SiH.sub.4)                                                             800                                                                               ppm                                                               GeH.sub.4 10                                                                   NO        10                                                               22206                                                                              SiH.sub.4 100   250    150   0.35 3                                            H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000                                                                              ppm                                                               NO*       10                                                               NO**          10→0***                                                   __________________________________________________________________________      *surface layer followed Table 208(b)                                           markless case: followed Table 208(a)                                           *Substrate side 2 μm                                                        **Surface layer side 1 μm                                                   ***Constantly changed                                                    

                                      TABLE 288                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               22301                                                                               22306                                                                               22311                                                                               22316                                                                               22321                                                                               22326                                                                               22331                                      conductive                                                                     layer 1                                                                        Photo-                                                                               22302                                                                               22307                                                                               22312                                                                               22317                                                                               22322                                                                               22327                                                                               22332                                      conductive                                                                     layer 2                                                                        Photo-                                                                               22303                                                                               22308                                                                               22313                                                                               22318                                                                               22323                                                                               22328                                                                               22233                                      conductive                                                                     layer 3                                                                        Photo-                                                                               22304                                                                               22309                                                                               22314                                                                               22319                                                                               22324                                                                               22329                                                                               22334                                      conductive                                                                     layer 5                                                                        Photo-                                                                               22305                                                                               22310                                                                               22315                                                                               22320                                                                               22325                                                                               22330                                                                               22335                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer followed Table 6(b)                                             markless case: followed Table 6(a)                                       

                                      TABLE 289                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Name of                                                                             Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer                                                                               flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Surface*                                                                            B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.5                                 layer A                                                                             H.sub.2       100                                                              NH.sub.3      300                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                      Surface*                                                                            B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.5                                 layer B                                                                             H.sub.2       100                                                              NH.sub.3      300                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                      __________________________________________________________________________      *each of surface layers A and B is individually used in accordance with        the kind of the lower layer                                              

                                      TABLE 290                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               22401                                                                               22407                                                                               22413                                                                               22419                                                                               22425                                                                               22431                                                                               22437                                      conductive                                                                     layer 1                                                                        Photo-                                                                               22402                                                                               22408                                                                               22414                                                                               22420                                                                               22426                                                                               22432                                                                               22438                                      conductive                                                                     layer 2                                                                        Photo-                                                                               22403                                                                               22409                                                                               22415                                                                               22421                                                                               22427                                                                               22433                                                                               22439                                      conductive                                                                     layer 3                                                                        Photo-                                                                               22404                                                                               22410                                                                               22416                                                                               22422                                                                               22428                                                                               22434                                                                               22440                                      conductive                                                                     layer 4                                                                        Photo-                                                                               22405                                                                               22411                                                                               22417                                                                               22423                                                                               22429                                                                               22435                                                                               22441                                      conductive                                                                     layer 5                                                                        Photo-                                                                               22406                                                                               22412                                                                               22418                                                                               22424                                                                               22430                                                                               22436                                                                               22442                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 291                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Name of                                                                             Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer                                                                               flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Surface*                                                                            B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                 layer A                                                                             NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                           Bias voltage of                                                                              +100                                                                              V                                                             the cylinder                                                              Surface*                                                                            B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                 layer B                                                                             NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                           Bias voltage of                                                                              +100                                                                              V                                                             the cylinder                                                              __________________________________________________________________________      *each of surface layers A and B is individually used in accordance with        the kind of the lower layer                                              

                                      TABLE 292                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               22501                                                                               22507                                                                               22513                                                                               22519                                                                               22525                                                                               22531                                                                               22537                                      conductive                                                                     layer 1                                                                        Photo-                                                                               22502                                                                               22508                                                                               22514                                                                               22520                                                                               22526                                                                               22532                                                                               22538                                      conductive                                                                     layer 2                                                                        Photo-                                                                               22503                                                                               22509                                                                               22515                                                                               22521                                                                               22527                                                                               22533                                                                               22539                                      conductive                                                                     layer 3                                                                        Photo-                                                                               22504                                                                               22510                                                                               22516                                                                               22522                                                                               22528                                                                               22534                                                                               22540                                      conductive                                                                     layer 4                                                                        Photo-                                                                               22505                                                                               22511                                                                               22517                                                                               22523                                                                               22529                                                                               22535                                                                               22541                                      conductive                                                                     layer 5                                                                        Photo-                                                                               22506                                                                               22512                                                                               22518                                                                               22524                                                                               22530                                                                               22536                                                                               22542                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 293                                                        ______________________________________                                         Photo-               Photo-           Photo-                                   conduc-    Photo-    conduc-  Photo-  conduc-                                  tive       conductive                                                                               tive     conductive                                                                             tive                                     Layer 1    Layer 2   Layer 3  Layer 5 Layer 6                                  ______________________________________                                         Drum  22601    22602     22603  22604   22605                                  No.   22606*   22607*    22608* 22609*  22610*                                 ______________________________________                                          *Surface layer followed Table 272(b)                                           Markless case: followed Table 272(a)                                     

                                      TABLE 294                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               22701 22702 22703 22704 22705 22706                                        No. 22707*                                                                               22708*                                                                               22709*                                                                               22710*                                                                               22711*                                                                               22712*                                       __________________________________________________________________________      *surface layer B was used.                                                     markless case: surface layer A was used.                                 

                                      TABLE 295                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               22801 22802 22803 22804 22805 22806                                        No. 22807*                                                                               22808*                                                                               22809*                                                                               22810*                                                                               22811*                                                                               22812*                                       __________________________________________________________________________      *surface layer B was used.                                                     markless case: surface layer A was used.                                 

                  TABLE 296                                                        ______________________________________                                                        Drum                                                                           No.                                                             ______________________________________                                         IR Absorptive    22901   22920*                                                Layer 1                                                                        IR Absorptive    22902   22921*                                                Layer 2                                                                        IR Absorptive    22903   22922*                                                Layer 3                                                                        IR Absorptive    22904   22923*                                                Layer 4                                                                        IR Absorptive    22905   22924*                                                Layer 5                                                                        IR Absorptive    22906   --                                                    Layer 6                                                                        IR Absorptive    22907   --                                                    Layer 7                                                                        IR Absorptive    22908   --                                                    Layer 8                                                                        IR Absorptive    22909   --                                                    Layer 9                                                                        IR Absorptive    22910   --                                                    Layer 10                                                                       IR Absorptive    22911   --                                                    Layer 11                                                                       IR Absorptive    22912   --                                                    Layer 12                                                                       IR Absorptive    22913   --                                                    Layer 13                                                                       IR Absorptive    22914   --                                                    Layer 14                                                                       IR Absorptive    22915   --                                                    Layer 15                                                                       IR Absorptive    22916   --                                                    Layer 17                                                                       IR Absorptive    22917   22925*                                                Layer 18                                                                       IR Absorptive    22918   22926*                                                Layer 19                                                                       IR Absorptive    22919   22927*                                                Layer 20                                                                       ______________________________________                                          *Surface layer followed Table 274(b)                                           Markless case: followed 274(a)                                           

                                      TABLE 297                                    __________________________________________________________________________             Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                         Drum    conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                     No.     layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 5                                                                              layer 6                                        __________________________________________________________________________     IR aborptive                                                                           23001 23021 23041 23061 23081                                          layer 1                                                                        IR absorptive                                                                          23002 23022 23042 23062 23082                                          layer 2                                                                        IR absorptive                                                                          23003 23023 23043 23063 23083                                          layer 3                                                                        IR absorptive                                                                          23004 23024 23044 23064 23084                                          layer 4                                                                        IR absorptive                                                                          23005 23025 23045 23065 23085                                          layer 5                                                                        IR absorptive                                                                          23006 23026 23046 23066 23086                                          layer 6                                                                        IR absorptive                                                                          23007 23027 23047 23067 23087                                          layer 7                                                                        IR absorptive                                                                          23008 23028 23048 23068 23088                                          layer 8                                                                        IR absorptive                                                                          23009 23029 23049 23069 23089                                          layer 9                                                                        IR absorptive                                                                          23010 23030 23050 23070 23090                                          layer 10                                                                       IR absorptive                                                                          23011 23031 23051 23071 23091                                          layer 11*                                                                      IR absorptive                                                                          23012 23032 23052 23072 23092                                          layer 12*                                                                      IR absorptive                                                                          23013 23033 23053 23073 23093                                          layer 13*                                                                      IR absorptive                                                                          23014 23034 23054 23074 23094                                          layer 14*                                                                      IR absorptive                                                                          23015 23035 23055 23075 23095                                          layer 15*                                                                      IR absorptive                                                                          23016 23036 23056 23076 23096                                          layer 16*                                                                      IR absorptive                                                                          23017 23037 23057 23077 23097                                          layer 17*                                                                      IR absorptive                                                                          23018 23038 23058 23078 23098                                          layer 18                                                                       IR absorptive                                                                          23019 23039 23059 23079 23099                                          layer 19                                                                       IR absorptive                                                                          23020 23040 23060 23080 230100                                         layer 20                                                                       __________________________________________________________________________       *surface layer followed Table 274(b)                                          markless case: followed Table 274(a)                                     

                                      TABLE 298                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         23101 23121 23141 23161 23181 231101                                    layer 1                                                                        IR absorptive                                                                         23102 23122 23142 23162 23182 231102                                    layer 2                                                                        IR absorptive                                                                         23103 23123 23143 23163 23183 231103                                    layer 3                                                                        IR absorptive                                                                         23104 23124 23144 23164 23184 231104                                    layer 4                                                                        IR absorptive                                                                         23105 23125 23145 23165 23185 231105                                    layer 5                                                                        IR absorptive                                                                         23106 23126 23146 23166 23186 231106                                    layer 6                                                                        IR absorptive                                                                         23107 23127 23147 23167 23187 231107                                    layer 7                                                                        IR absorptive                                                                         23108 23128 23148 23168 23188 231108                                    layer 8                                                                        IR absorptive                                                                         23109 23129 23149 23169 23189 231109                                    layer 9                                                                        IR absorptive                                                                         23110 23130 23150 23170 23190 231110                                    layer 10                                                                       IR absorptive                                                                         23111 23131 23151 23171 23191 231111                                    layer 11*                                                                      IR absorptive                                                                         23112 23132 23152 23172 23192 231112                                    layer 12*                                                                      IR absorptive                                                                         23113 23133 23153 23173 23193 231113                                    layer 13*                                                                      IR absorptive                                                                         23114 23134 23154 23174 23194 231114                                    layer 14*                                                                      IR absorptive                                                                         23115 23135 23155 23175 23195 231115                                    layer 15*                                                                      IR absorptive                                                                         23116 23136 23156 23176 23196 231116                                    layer 16                                                                       IR absorptive                                                                         23117 23137 23157 23177 23197 231117                                    layer 17*                                                                      IR absorptive                                                                         23118 23138 23158 23178 23198 231118                                    layer 18                                                                       IR absorptive                                                                         23119 23139 23159 23179 23199 231119                                    layer 19                                                                       IR absorptive                                                                         23120 23140 23160 23180 231100                                                                               231120                                    layer 20                                                                       __________________________________________________________________________       *surface layer B was used                                                     markless case: surface layer A was used                                  

                                      TABLE 299                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              laeyr 6                                   __________________________________________________________________________     IR absorptive                                                                         23201 23221 23241 23261 23281 232101                                    layer 1                                                                        IR absorptive                                                                         23202 23222 23242 23262 23282 232102                                    layer 2                                                                        IR absorptive                                                                         23203 23223 23243 23263 23283 232103                                    layer 3                                                                        IR absorptive                                                                         23204 23224 23244 23264 23284 232104                                    layer 4                                                                        IR absorptive                                                                         23205 23225 23245 23265 23285 232105                                    layer 5                                                                        IR absorptive                                                                         23206 23226 23246 23266 23286 232106                                    layer 6                                                                        IR absorptive                                                                         23207 23227 23247 23267 23287 232107                                    layer 7                                                                        IR absorptive                                                                         23208 23228 23248 23268 23288 232108                                    layer 8                                                                        IR absorptive                                                                         23209 23229 23249 23269 23289 232109                                    layer 9                                                                        IR absorptive                                                                         23210 23230 23250 23270 23290 232110                                    layer 10                                                                       IR absorptive                                                                         23211 23231 23251 23271 23291 232111                                    layer 11*                                                                      IR absorptive                                                                         23212 23232 23252 23272 23292 232112                                    layer 12*                                                                      IR absorptive                                                                         23213 23233 23253 23273 23293 232113                                    layer 13*                                                                      IR absorptive                                                                         23214 23234 23254 23274 23294 232114                                    layer 14*                                                                      IR absorptive                                                                         23215 23235 23255 23275 23295 232115                                    layer 15*                                                                      IR absorptive                                                                         23216 23236 23256 23276 23296 232116                                    layer 16*                                                                      IR absorptive                                                                         23217 23237 23257 23277 23297 232117                                    layer 17*                                                                      IR absorptive                                                                         23218 23238 23258 23278 23298 232118                                    layer 18                                                                       IR absorptive                                                                         23219 23239 23259 23279 23299 232119                                    layer 19                                                                       IR absorptive                                                                         23220 23240 23260 23280 232100                                                                               232120                                    layer 20                                                                       __________________________________________________________________________       *surface layer B was used                                                     markless case: surface layer A was used                                  

                  TABLE 300                                                        ______________________________________                                         Contact           Contact  Contact                                             Layer 2           Layer 3  Layer 4                                             ______________________________________                                         Drum    23301         23302    23303                                           No.     23304*        23305*   23306*                                          ______________________________________                                          *Surface layer followed Table 276(b)                                           Markless case: followed Table 276(a)                                     

                  TABLE 301                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   23401      23407*   23413   23419                                     conductive                                                                     layer 1                                                                        Photo-   23402     23408      23414* 23420                                     conductive                                                                     layer 2                                                                        Photo-    23403*   23409     23415   23421                                     conductive                                                                     layer 3                                                                        Photo-   23404     23410     23416    23422*                                   conductive                                                                     layer 4                                                                        Photo-   23405     23411      23417* 23423                                     conductive                                                                     layer 5                                                                        Photo-   23406      23412*   23418   23424                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 276(b)                                           markless case: followed Table 276(a)                                     

                  TABLE 302                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   23501     23507      23513* 23519                                     conductive                                                                     layer 1                                                                        Photo-   23502      23508*   23514   23520                                     conductive                                                                     layer 2                                                                        Photo-   23503     23509     23515    23521*                                   conductive                                                                     layer 3                                                                        Photo-    23504*   23510     23516   23522                                     conductive                                                                     layer 4                                                                        Photo-   23505      23511*   23517   23523                                     conductive                                                                     layer 5                                                                        Photo-   23506     23512      23518* 23524                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 303                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-    23601*   23607     23613   23619                                     conductive                                                                     layer 1                                                                        Photo-   23602     23608      23614* 23620                                     conductive                                                                     layer 2                                                                        Photo-   23603     23609     23615    23621*                                   conductive                                                                     layer 3                                                                        Photo-   23604      23610*   23616   23622                                     conductive                                                                     layer 4                                                                        Photo-   23605     23611     23617    23623*                                   conductive                                                                     layer 5                                                                        Photo-    23606*   23612     23618   23624                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 304                                                        ______________________________________                                                        Drum                                                                           No.                                                             ______________________________________                                         IR absorptive    23701   23721                                                 layer 1                  *                                                     IR absorptive    23702   23722                                                 layer 2                  *                                                     IR absorptive    23703   23723                                                 layer 3                  *                                                     IR absorptive    23704   23724                                                 layer 4                  *                                                     IR absorptive    23705   23726                                                 layer 5                  *                                                     IR absorptive    23706   23726                                                 layer 6                  *                                                     IR absorptive    23707   23727                                                 layer 7                  *                                                     IR absorptive    23708   23728                                                 layer 8                  *                                                     IR absorptive    23709   23729                                                 layer 9                  *                                                     IR absorptive    23710   23730                                                 layer 10                 *                                                     IR absorptive    23711   23731                                                 layer 11                 *                                                     IR absorptive    23712   23732                                                 layer 12                 *                                                     IR absorptive    23713   23733                                                 layer 13                 *                                                     IR absorptive    23714   23734                                                 layer 14                 *                                                     IR absorptive    23715   23735                                                 layer 15                 *                                                     IR absorptive    23717   23737                                                 layer 17                 *                                                     IR absorptive    23718   23738                                                 layer 18                 *                                                     IR absorptive    23719   23739                                                 layer 19                 *                                                     IR absorptive    23720   23740                                                 layer 20                 *                                                     ______________________________________                                           *Charge injection inhibition layer and surface layer followed Table           278(b)                                                                         markless case: followed Table 178(a)                                     

                  TABLE 305                                                        ______________________________________                                                    Photo-      Photo-    Photo-                                        Drum       conductive  conductive                                                                               conductive                                    No.        layer 4     layer 5*  layer 7                                       ______________________________________                                         IR absorptive                                                                             23801       23821     23841                                         layer 1                                                                        IR absorptive                                                                             23802       23822     23842                                         layer 2                                                                        IR absorptive                                                                             23803       23823     23843                                         layer 3                                                                        IR absorptive                                                                             23804       23824     23844                                         layer 4                                                                        IR absorptive                                                                             23805       23825     23845                                         layer 5                                                                        IR absorptive                                                                             23806       23826     23846                                         layer 6                                                                        IR absorptive                                                                             23807       23827     23847                                         layer 7                                                                        IR absorptive                                                                             23808       23828     23848                                         layer 8                                                                        IR absorptive                                                                             23809       23829     23849                                         layer 9                                                                        IR absorptive                                                                             23810       23830     23840                                         layer 10                                                                       IR absorptive                                                                             23811       23831     23851                                         layer 11                                                                       IR absorptive                                                                             23812       23832     23852                                         layer 12                                                                       IR absorptive                                                                             23813       23833     23853                                         layer 13                                                                       IR absorptive                                                                             23814       23834     23854                                         layer 14                                                                       IR absorptive                                                                             23815       23835     23855                                         layer 15                                                                       IR absorptive                                                                             23816       23836     23856                                         layer 16                                                                       IR absorptive                                                                             23817       23837     23857                                         layer 17                                                                       IR absorptive                                                                             23818       23838     23858                                         layer 18                                                                       IR absorptive                                                                             23819       23839     23859                                         layer 19                                                                       IR absorptive                                                                             23820       23840     23860                                         layer 20                                                                       ______________________________________                                          *: surface layer followed Table 278(b)                                         markless case: followed Table 278(a)                                     

                  TABLE 306                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           23901     23921     23941   23961                                     layer 1                                                                        IR absorptive                                                                           23902     23922     23942   23962                                     layer 2                                                                        IR absorptive                                                                           23903     23923     23943   23963                                     layer 3                                                                        IR absorptive                                                                           23904     23924     23944   23964                                     layer 4                                                                        IR absorptive                                                                           23905     23925     23945   23965                                     layer 5                                                                        IR absorptive                                                                           23906     23926     23946   23966                                     layer 6                                                                        IR absorptive                                                                           23907     23927     23947   23967                                     layer 7                                                                        IR absorptive                                                                           23908     23928     23948   23968                                     layer 8                                                                        IR absorptive                                                                           23909     23929     23949   23969                                     layer 9                                                                        IR absorptive                                                                           23910     23930     23950   23970                                     layer 10                                                                       IR absorptive                                                                           23911     23931     23951   23971                                     layer 11                                                                       IR absorptive                                                                           23912     23932     23952   23972                                     layer 12                                                                       IR absorptive                                                                           23913     23933     23953   23973                                     layer 13                                                                       IR absorptive                                                                           23914     23934     23954   23974                                     layer 14                                                                       IR absorptive                                                                           23915     23935     23955   23975                                     layer 15                                                                       IR absorptive                                                                           23916     23936     23956   23976                                     layer 16                                                                       IR absorptive                                                                           23917     23937     23957   23977                                     layer 17                                                                       IR absorptive                                                                           23918     23938     23958   23978                                     layer 18                                                                       IR absorptive                                                                           23919     23939     23959   23979                                     layer 19                                                                       IR absorptive                                                                           23920     23940     23960   23980                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 307                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           24001     24021     24041   24061                                     layer 1                                                                        IR absorptive                                                                           24002     24022     24042   24062                                     layer 2                                                                        IR absorptive                                                                           24003     24023     24043   24063                                     layer 3                                                                        IR absorptive                                                                           24004     24024     24044   24064                                     layer 4                                                                        IR absorptive                                                                           24005     24025     24045   24065                                     layer 5                                                                        IR absorptive                                                                           24006     24026     24046   24066                                     layer 6                                                                        IR absorptive                                                                           24007     24027     24047   24067                                     layer 7                                                                        IR absorptive                                                                           24008     24028     24048   24068                                     layer 8                                                                        IR absorptive                                                                           24009     24029     24049   24069                                     layer 9                                                                        IR absorptive                                                                           24010     24030     24050   24070                                     layer 10                                                                       IR absorptive                                                                           24011     24031     24051   24071                                     layer 11                                                                       IR absorptive                                                                           24012     24032     24052   24072                                     layer 12                                                                       IR absorptive                                                                           24013     24033     24053   24073                                     layer 13                                                                       IR absorptive                                                                           24014     24034     24054   24074                                     layer 14                                                                       IR absorptive                                                                           24015     24035     24055   24075                                     layer 15                                                                       IR absorptive                                                                           24016     24036     24056   24076                                     layer 16                                                                       IR absorptive                                                                           24017     24037     24057   24077                                     layer 17                                                                       IR absorptive                                                                           24018     24038     24058   24078                                     layer 18                                                                       IR absorptive                                                                           24019     24039     24059   24079                                     layer 19                                                                       IR absorptive                                                                           24020     24040     24060   24080                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 308                                    __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               24101                                                                               24102                                                                               24103                                                                               24104                                                                               24105                                                                               24106                                                                               24107                                        No. 24108*                                                                              24109*                                                                              24110*                                                                              24111*                                                                              24112*                                                                              24113*                                                                              24114*                                       __________________________________________________________________________      *Charge injection inhibition layer and surface layer followed Table 280(b      Markless case: followed Table 280(a)                                     

                                      TABLE 309                                    __________________________________________________________________________           Charge                                                                              Charge                                                                               Charge                                                                              Charge                                                                               Charge                                                                              Charge                                              injection                                                                           injection                                                                            injection                                                                           injection                                                                            injection                                                                           injection                                     Drum  inhibition                                                                          inhibition                                                                           inhibition                                                                          inhibition                                                                           inhibition                                                                          inhibition                                    No.   layer 2                                                                             layer 3                                                                              layer 4                                                                             layer 5*                                                                             layer 6*                                                                            layer 7                                       __________________________________________________________________________     Contact                                                                              24201                                                                               24209 24217                                                                               24225 24233                                                                               24241                                         layer 1                                                                        Contact                                                                              24202                                                                               24210 24218                                                                               24226 24234                                                                               24242                                         layer 2                                                                        Contact                                                                              24203                                                                               24211 24219                                                                               24227 24235                                                                               24243                                         layer 3                                                                        Contact                                                                              24204                                                                               24212 24220                                                                               24228 24236                                                                               24244                                         layer 4                                                                        Contact                                                                              24205                                                                               24213 24221                                                                               24229 24237                                                                               24245                                         layer 5                                                                        Contact                                                                              24206                                                                               24214 24222                                                                               24230 24238                                                                               24246                                         layer 6                                                                        Contact                                                                              24207                                                                               24215 24223                                                                               24231 24239                                                                               24247                                         layer 7                                                                        Contact                                                                              24208                                                                               24216 24224                                                                               24232 24240                                                                               24248                                         layer 8                                                                        __________________________________________________________________________      *surface layer followed Table 280(b)                                           markless case: followed Table 280(a)                                     

                                      TABLE 310                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibiton                                   No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             24301                                                                               24309                                                                               24317                                                                               24325                                                                               24333                                                                               24341                                                                               24349                                       layer 1                                                                        Contact                                                                             24302                                                                               24310                                                                               24318                                                                               24326                                                                               24334                                                                               24342                                                                               24350                                       layer 2                                                                        Contact                                                                             24303                                                                               24311                                                                               24319                                                                               24327                                                                               24335                                                                               24343                                                                               24351                                       layer 3                                                                        Contact                                                                             24304                                                                               24312                                                                               24320                                                                               24328                                                                               24336                                                                               24344                                                                               24352                                       layer 4                                                                        Contact                                                                             24305                                                                               24313                                                                               24321                                                                               24329                                                                               24337                                                                               24345                                                                               24353                                       layer 5                                                                        Contact                                                                             24306                                                                               24314                                                                               24322                                                                               24330                                                                               24338                                                                               24346                                                                               24354                                       layer 6                                                                        Contact                                                                             24307                                                                               24315                                                                               24323                                                                               24331                                                                               24339                                                                               24347                                                                               24355                                       layer 7                                                                        Contact                                                                             24308                                                                               24316                                                                               24324                                                                               24332                                                                               24340                                                                               24348                                                                               24356                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 311                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             24401                                                                               24409                                                                               24417                                                                               24425                                                                               24433                                                                               24441                                                                               24449                                       layer 1                                                                        Contact                                                                             24402                                                                               24410                                                                               24418                                                                               24426                                                                               24434                                                                               24442                                                                               24450                                       layer 2                                                                        Contact                                                                             24403                                                                               24411                                                                               24419                                                                               24427                                                                               24435                                                                               24443                                                                               24451                                       layer 3                                                                        Contact                                                                             24404                                                                               24412                                                                               24420                                                                               24428                                                                               24436                                                                               24444                                                                               24452                                       layer 4                                                                        Contact                                                                             24405                                                                               24413                                                                               24421                                                                               24429                                                                               24437                                                                               24445                                                                               24453                                       layer 5                                                                        Contact                                                                             24406                                                                               24414                                                                               24422                                                                               24430                                                                               24438                                                                               24446                                                                               24454                                       layer 6                                                                        Contact                                                                             24407                                                                               24415                                                                               24423                                                                               24431                                                                               24439                                                                               24447                                                                               24455                                       layer 7                                                                        Contact                                                                             24408                                                                               24416                                                                               24424                                                                               24432                                                                               24440                                                                               24448                                                                               24456                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 312                                                        ______________________________________                                                Charge     Charge   Charge                                                     injection  injection                                                                               injection                                                  inhibition inhibition                                                                              inhibition                                                 layer 4    layer 6* layer 7                                             ______________________________________                                         Drum     24501        24502    24503                                           No.                                                                            ______________________________________                                          *surface layer followed Table 282 (b)                                          markless case: followed Table 282 (a)                                    

                  TABLE 313                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   24601     24603     24605   24607                                     conductive                                                                     layer 5                                                                        Photo-   24602     24604     24606   24608                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 282 (b)                                          markless case: followed Table 282 (a)                                    

                  TABLE 314                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   24701     24704     24707   24710                                     conductive                                                                     layer 4                                                                        Photo-   24702     24705     24708   24711                                     conductive                                                                     layer 5                                                                        Photo-   24703     24706     24709   24712                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 315                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   24801     24804     24807   24810                                     conductive                                                                     layer 4                                                                        Photo-   24802     24805     24808   24811                                     conductive                                                                     layer 5                                                                        Photo-   24803     24806     24809   24812                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 316                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Name of                                                                             Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer                                                                               flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                 layer A                                                                             NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                      Surface                                                                             B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                 layer B                                                                             NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                      __________________________________________________________________________

                  TABLE 317                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           24901     24921     24941   24961                                     layer 1                                                                        IR absorptive                                                                           24902     24922     24942   24962                                     layer 2                                                                        IR absorptive                                                                           24903     24923     24943   24963                                     layer 3                                                                        IR absorptive                                                                           24904     24924     24944   24964                                     layer 4                                                                        IR absorptive                                                                           24905     24925     24945   24965                                     layer 5                                                                        IR absorptive                                                                           24906     24926     24946   24966                                     layer 6                                                                        IR absorptive                                                                           24907     24927     24947   24967                                     layer 7                                                                        IR absorptive                                                                           24908     24928     24948   24968                                     layer 8                                                                        IR absorptive                                                                           24909     24929     24949   24969                                     layer 9                                                                        IR absorptive                                                                           24910     24930     24950   24970                                     layer 10                                                                       IR absorptive                                                                           24911     24931     24951   24971                                     layer 11                                                                       IR absorptive                                                                           24912     24932     24952   24972                                     layer 12                                                                       IR absorptive                                                                           24913     24933     24953   24973                                     layer 13                                                                       IR absorptive                                                                           24914     24934     24954   24974                                     layer 14                                                                       IR absorptive                                                                           24915     24935     24955   24975                                     layer 15                                                                       IR absorptive                                                                           24916     24936     24956   24976                                     layer 16                                                                       IR absorptive                                                                           24917     24937     24957   24977                                     layer 17                                                                       IR absorptive                                                                           24918     24938     24958   24978                                     layer 18                                                                       IR absorptive                                                                           24919     24939     24959   24979                                     layer 19                                                                       IR absorptive                                                                           24920     24940     24960   24980                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 318                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           25001     25021     25041   25061                                     layer 1                                                                        IR absorptive                                                                           25002     25022     25042   25062                                     layer 2                                                                        IR absorptive                                                                           25003     25023     25043   25063                                     layer 3                                                                        IR absorptive                                                                           25004     25024     25044   25064                                     layer 4                                                                        IR absorptive                                                                           25005     25025     25045   25065                                     layer 5                                                                        IR absorptive                                                                           25006     25026     25046   25066                                     layer 6                                                                        IR absorptive                                                                           25007     25027     25047   25067                                     layer 7                                                                        IR absorptive                                                                           25008     25028     25048   25068                                     layer 8                                                                        IR absorptive                                                                           25009     25029     25049   25069                                     layer 9                                                                        IR absorptive                                                                           25010     25030     25050   25070                                     layer 10                                                                       IR absorptive                                                                           25011     25031     25051   25071                                     layer 11                                                                       IR absorptive                                                                           25012     25032     25052   25072                                     layer 12                                                                       IR absorptive                                                                           25013     25033     25053   25073                                     layer 13                                                                       IR absorptive                                                                           25014     25034     25054   25074                                     layer 14                                                                       IR absorptive                                                                           25015     25035     25055   25075                                     layer 15                                                                       IR absorptive                                                                           25016     25036     25056   25076                                     layer 16                                                                       IR absorptive                                                                           25017     25037     25057   25077                                     layer 17                                                                       IR absorptive                                                                           25018     25038     25058   25078                                     layer 18                                                                       IR absorptive                                                                           25019     25039     25059   25079                                     layer 19                                                                       IR absorptive                                                                           25020     25040     25060   25080                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 319                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           25101     25121     25141   25161                                     layer 1                                                                        IR absorptive                                                                           25102     25122     25142   25162                                     layer 2                                                                        IR absorptive                                                                           25103     25123     25143   25163                                     layer 3                                                                        IR absorptive                                                                           25104     25124     25144   25164                                     layer 4                                                                        IR absorptive                                                                           25105     25125     25145   25165                                     layer 5                                                                        IR absorptive                                                                           25106     25126     25146   25166                                     layer 6                                                                        IR absorptive                                                                           25107     25127     25147   25167                                     layer 7                                                                        IR absorptive                                                                           25108     25128     25148   25168                                     layer 8                                                                        IR absorptive                                                                           25109     25129     25149   25169                                     layer 9                                                                        IR absorptive                                                                           25110     25130     25150   25170                                     layer 10                                                                       IR absorptive                                                                           25111     25131     25151   25171                                     layer 11                                                                       IR absorptive                                                                           25112     25132     25152   25172                                     layer 12                                                                       IR absorptive                                                                           25113     25133     25153   25173                                     layer 13                                                                       IR absorptive                                                                           25114     25134     25154   25174                                     layer 14                                                                       IR absorptive                                                                           25115     25135     25155   25175                                     layer 15                                                                       IR absorptive                                                                           25116     25136     25156   25176                                     layer 16                                                                       IR absorptive                                                                           25117     25137     25157   25177                                     layer 17                                                                       IR absorptive                                                                           25118     25138     25158   25178                                     layer 18                                                                       IR absorptive                                                                           25119     25138     25159   25179                                     layer 19                                                                       IR absorptive                                                                           25120     25140     25160   25180                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 320                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           25201     25221     25241   25261                                     layer 1                                                                        IR absorptive                                                                           25202     25222     25242   25262                                     layer 2                                                                        IR absorptive                                                                           25203     25223     25243   25263                                     layer 3                                                                        IR absorptive                                                                           25204     25224     25244   25264                                     layer 4                                                                        IR absorptive                                                                           25205     25225     25245   25265                                     layer 5                                                                        IR absorptive                                                                           25206     25226     25246   25266                                     layer 6                                                                        IR absorptive                                                                           25207     25227     25247   25267                                     layer 7                                                                        IR absorptive                                                                           25208     25228     25248   25268                                     layer 8                                                                        IR absorptive                                                                           25209     25229     25249   25268                                     layer 9                                                                        IR absorptive                                                                           25210     25230     25250   25270                                     layer 10                                                                       IR absorptive                                                                           25211     25231     25251   25171                                     layer 11                                                                       IR absorptive                                                                           25212     25232     25252   25272                                     layer 12                                                                       IR absorptive                                                                           25213     25233     25253   25273                                     layer 13                                                                       IR absorptive                                                                           25214     25234     25254   25274                                     layer 14                                                                       IR absorptive                                                                           25215     25235     25255   25275                                     layer 15                                                                       IR absorptive                                                                           25216     25236     25256   25276                                     layer 16                                                                       IR absorptive                                                                           25217     25237     25257   25277                                     layer 17                                                                       IR absorptive                                                                           25218     25238     25258   25278                                     layer 18                                                                       IR absorptive                                                                           25219     25239     25259   25279                                     layer 19                                                                       IR absorptive                                                                           25220     25240     25260   25280                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 321                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           25301     25321     25341   25361                                     layer 1                                                                        IR absorptive                                                                           25302     25322     25342   25362                                     layer 2                                                                        IR absorptive                                                                           25303     25323     25343   25363                                     layer 3                                                                        IR absorptive                                                                           25304     25324     25344   25364                                     layer 4                                                                        IR absorptive                                                                           25305     25325     25345   25365                                     layer 5                                                                        IR absorptive                                                                           25306     25326     25346   25366                                     layer 6                                                                        IR absorptive                                                                           25307     25327     25347   25367                                     layer 7                                                                        IR absorptive                                                                           25308     25328     25348   25368                                     layer 8                                                                        IR absorptive                                                                           25309     25329     25349   25369                                     layer 9                                                                        IR absorptive                                                                           25310     25330     25350   25370                                     layer 10                                                                       IR absorptive                                                                           25311     25331     25351   25371                                     layer 11                                                                       IR absorptive                                                                           25312     25332     25352   25372                                     layer 12                                                                       IR absorptive                                                                           25313     25333     25353   25373                                     layer 13                                                                       IR absorptive                                                                           25314     25334     25354   25374                                     layer 14                                                                       IR absorptive                                                                           25315     25335     25355   25375                                     layer 15                                                                       IR absorptive                                                                           25316     25336     25356   25376                                     layer 16                                                                       IR absorptive                                                                           25317     25337     25357   25377                                     layer 17                                                                       IR absorptive                                                                           25318     25338     25358   25378                                     layer 18                                                                       IR absorptive                                                                           25319     25339     25359   25379                                     layer 19                                                                       IR absorptive                                                                           25320     25340     25360   25380                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 322                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           25401     25421     25441   25461                                     layer 1                                                                        IR absorptive                                                                           25402     25422     25442   25462                                     layer 2                                                                        IR absorptive                                                                           25403     25423     25443   25463                                     layer 3                                                                        IR absorptive                                                                           25404     25424     25444   25464                                     layer 4                                                                        IR absorptive                                                                           25405     25425     25445   25465                                     layer 5                                                                        IR absorptive                                                                           25406     25426     25446   25466                                     layer 6                                                                        IR absorptive                                                                           25407     25427     25447   25467                                     layer 7                                                                        IR absorptive                                                                           25408     25428     25448   25468                                     layer 8                                                                        IR absorptive                                                                           25409     25429     25449   25469                                     layer 9                                                                        IR absorptive                                                                           25410     25430     25450   25470                                     layer 10                                                                       IR absorptive                                                                           25411     25431     25451   25471                                     layer 11                                                                       IR absorptive                                                                           25412     25432     25452   25472                                     layer 12                                                                       IR absorptive                                                                           25413     25433     25453   25473                                     layer 13                                                                       IR absorptive                                                                           25414     25434     25454   25474                                     layer 14                                                                       IR absorptive                                                                           25415     25435     25455   25475                                     layer 15                                                                       IR absorptive                                                                           25416     25436     25456   25476                                     layer 16                                                                       IR absorptive                                                                           25417     25437     25457   25477                                     layer 17                                                                       IR absorptive                                                                           25418     25438     25458   25478                                     layer 18                                                                       IR absorptive                                                                           25419     25439     25459   25479                                     layer 19                                                                       IR absorptive                                                                           25420     25440     25460   25480                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 323                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Drum                                                                               Gas used and its     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. flow rate (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     25501                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          25502                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      300                                                          25503                                                                              B.sub.2 H.sub.6 /(20%)                                                                       500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              +100                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 324                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Drum                                                                               Gas used and its     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. flow rate (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     25601                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          25602                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      300                                                          25603                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.3 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              +100                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 325                                    __________________________________________________________________________                              Substrate    Inner                                                                               Layer                               Drum                                                                               Gas used and its     temperature                                                                           RF power                                                                             pressure                                                                            thickness                           No. flow rate (SCCM)     (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     25701                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                          25702                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.40 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50  ppm                                                          H.sub.2       100                                                              NH.sub.3      300                                                          25703                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.5                                     SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                          NH.sub.3      100                                                              Bias voltage of                                                                              +100                                                                               V                                                            the cylinder                                                               __________________________________________________________________________

                                      TABLE 326                                    __________________________________________________________________________                               Substrate    Inner                                                                               Layer                              Name of                                                                              Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Inter-                                                                               SiH.sub.4     10    250    150   0.35 0.3                                mediate                                                                              CH.sub.4      400                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.5                                layer NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     __________________________________________________________________________

                                      TABLE 327 (a)                                __________________________________________________________________________                                Substrate    Inner                                                                               Layer                             Name of                                                                               Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                         layer  flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                           __________________________________________________________________________     Photo- SiH.sub.4     200   250    250   0.35 20                                conductive                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                    layer  NO            4                                                         Surface                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                               layer  NH.sub.3      100                                                       (lower layer)                                                                         SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    Surface                                                                               B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                               layer  NH.sub.3      100                                                       (upper layer)                                                                         SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    __________________________________________________________________________

                                      TABLE 327 (b)                                __________________________________________________________________________                                Substrate    Inner                                                                               Layer                             Name of                                                                               Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                         layer  flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                           __________________________________________________________________________     Photo- SiH.sub.4     200   250    250   0.35 20                                conductive                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                    layer  NO            4                                                         Surface                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                               layer  NH.sub.3      100                                                       (lower layer)                                                                         GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    Surface                                                                               B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                               layer  NH.sub.3      100                                                       (upper layer)                                                                         GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    __________________________________________________________________________

                  TABLE 328                                                        ______________________________________                                               Intial                                                                         electri-                                                                 Drum  fication  Residual       Defective                                                                              Image                                   No.   efficiency                                                                               voltage  Ghost image   flow                                    ______________________________________                                         (a)   ○  ⊚                                                                        ○                                                                             ⊚                                                                       ⊚                        (b)   ○  ⊚                                                                        ○                                                                             ⊚                                                                       ⊚                        ______________________________________                                               Increase of        Break         Degree of                               Drum  defective Surface  down  Abrasion                                                                               background                              No.   image     abrasion voltage                                                                              resistance                                                                             fogginess                               ______________________________________                                         (a)   ○  ○ ⊚                                                                     ⊚                                                                       ⊚                        (b)   ○  ○ ⊚                                                                     ⊚                                                                       ⊚                        ______________________________________                                          ⊚ : Excellent                                                    ○ : Good                                                         

                                      TABLE 329 (a)                                __________________________________________________________________________                                Substrate    Inner                                                                               Layer                             Name of                                                                               Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                         layer  flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                           __________________________________________________________________________     Photo- SiH.sub.4     200   250    250   0.35 20                                conductive                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                          100                                                                               ppm                                                    layer  NO            4                                                         Surface                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.3                               layer  H.sub.2       100                                                       (lower layer)                                                                         NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    Surface                                                                               B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.3                               layer  H.sub.2       100                                                       (upper layer)                                                                         NH.sub.3      300                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    __________________________________________________________________________

                                      TABLE 329 (b)                                __________________________________________________________________________                                Substrate    Inner                                                                               Layer                             Name of                                                                               Gas used and its    temperture                                                                            RF power                                                                             pressure                                                                            thickness                         layer  flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                           __________________________________________________________________________     Photo- SiH.sub.4     200   250    250   0.35 20                                conductive                                                                            B.sub.2 H.sub.6 (against SiH.sub.4 )                                                         100                                                                               ppm                                                    layer  NO            4                                                         Surface                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.3                               layer  H.sub.2       100                                                       (lower layer)                                                                         NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    Surface                                                                               B.sub.2 H.sub.6 He (20%)                                                                     500   250    200   0.40 0.3                               layer  H.sub.2       100                                                       (upper layer)                                                                         NH.sub.3      300                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    __________________________________________________________________________

                  TABLE 330                                                        ______________________________________                                                Intial                                                                         electri-                                                                Drum   fication Residual        Defective                                                                             Image                                   No.    efficiency                                                                              voltage  Ghost  image  flow                                    ______________________________________                                         (a)    ○ ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        (b)    ○ ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        ______________________________________                                                Increase                                                                       of                Break         Degree of                               Drum   defective                                                                               Surface  down   Abrasion                                                                              background                              No.    image    abrasion voltage                                                                               resistance                                                                            fogginess                               ______________________________________                                         (a)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        (b)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                  TABLE 331                                                        ______________________________________                                                Intial                                                                         electri-                                                                Drum   fication Residual        Defective                                                                             Image                                   No.    efficiency                                                                              voltage  Ghost  image  flow                                    ______________________________________                                         (a)    ○ ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        (b)    ○ ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        ______________________________________                                                Increase                                                                       of                Break         Degree of                               Drum   defective                                                                               Surface  down   Abrasion                                                                              background                              No.    image    abrasion voltage                                                                               resistance                                                                            fogginess                               ______________________________________                                         (a)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        (b)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                                      TABLE 332 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                                      TABLE 332 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Charge                                                                               SiH.sub.4     100   250    150   0.35 3                                  injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                     layer NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                  TABLE 333                                                        ______________________________________                                                Intial                                                                         electri-                                                                Drum   fication Residual        Defective                                                                             Image                                   No.    efficiency                                                                              voltage  Ghost  image  flow                                    ______________________________________                                         (a)    ⊚                                                                        ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        (b)    ⊚                                                                        ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        ______________________________________                                                Increase                                                                       of                Break         Degree of                               Drum   defective                                                                               Surface  down   Abrasion                                                                              background                              No.    image    abrasion voltage                                                                               resistance                                                                            fogginess                               ______________________________________                                         (a)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        (b)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                                      TABLE 334 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 +NH.sub.3)                                                100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                                      TABLE 334 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                  TABLE 335                                                        ______________________________________                                                Intial                                                                         electri-                                                                Drum   fication Residual        Defective                                                                             Image                                   No.    efficiency                                                                              voltage  Ghost  image  flow                                    ______________________________________                                         (a)    ⊚                                                                        ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        (b)    ⊚                                                                        ⊚                                                                        ○                                                                              ⊚                                                                      ⊚                        ______________________________________                                                Increase                                                                       of                Break         Degree of                               Drum   defective                                                                               Surface  down   Abrasion                                                                              background                              No.    image    abrasion voltage                                                                               resistance                                                                            fogginess                               ______________________________________                                         (a)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        (b)    ○ ○ ⊚                                                                      ⊚                                                                      ⊚                        ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                                      TABLE 336 (a)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                                      TABLE 336 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     IR    SiH.sub.4     100   250    150   0.35 1                                  absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4     50                                                               PH.sub.3 (against SiH.sub.4)                                                                 800                                                                               ppm                                                           NO            10                                                         Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                  TABLE 337                                                        ______________________________________                                               Intial                                                                         electri-                                                                 Drum  fication  Residual        Defective                                                                              Image                                  No.   efficiency                                                                               voltage  Ghost  image   flow                                   ______________________________________                                         (a)   ○  ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       (b)   ○  ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       ______________________________________                                               Increase Sur-          Abra-                                                   of       face    Break sion  Inter-                                                                               Degree of                             Drum  defective                                                                               abra-   down  resis-                                                                               ference                                                                              background                            No.   image    sion    voltage                                                                              tance fringe                                                                               fogginess                             ______________________________________                                         (a)   ○ ○                                                                               ⊚                                                                     ⊚                                                                     ○                                                                             ⊚                      (b)   ○ ○                                                                               ⊚                                                                     ⊚                                                                     ○                                                                             ⊚                      ______________________________________                                          ⊚ : Excellent                                                    ○  : Good                                                        

                                      TABLE 338(a)                                 __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                                      TABLE 338 (b)                                __________________________________________________________________________           Gas used and its    Substrate    Inner                                                                               Layer                              Name of                                                                              flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                          layer (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                            __________________________________________________________________________     Contact                                                                              SiH.sub.4     20    250    100   0.25 0.5                                layer N.sub.2       100                                                        Photo-                                                                               SiH.sub.4     200   250    300   0.40 20                                 conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                                layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                     layer)                                                                         __________________________________________________________________________

                  TABLE 339                                                        ______________________________________                                               Intial                                                                         electri-                                                                 Drum  fication  Residual        Defective                                                                              Image                                  No.   efficiency                                                                               voltage  Ghost  image   flow                                   ______________________________________                                         (a)   ⊚                                                                         ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       (b)   ⊚                                                                         ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       ______________________________________                                               Increase                                                                       of                Break         Degree of                                Drum  defective                                                                               Surface  down  Abrasion                                                                               background                               No.   image    abrasion voltage                                                                              resistance                                                                             fogginess                                ______________________________________                                         (a)   ○ ○ ⊚                                                                     ⊚                                                                       ⊚                         (b)   ○ ○ ⊚                                                                     ⊚                                                                       ⊚                         ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 340 (a)                                __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4     100  250    150   0.35 1                                   absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4      50                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         NO             10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                   layer NO             10                                                        Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                                100 ppm                                                   Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                                100 ppm                                                   layer)                                                                         __________________________________________________________________________

                                      TABLE 340 (b)                                __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     IR    SiH.sub.4     100  250    150   0.35 1                                   absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4      50                                                              PH.sub.3 (against SiH.sub.4)                                                                 800 ppm                                                          NO             10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800 ppm                                                    layer NO             10                                                        Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         __________________________________________________________________________

                                      TABLE 341                                    __________________________________________________________________________           Intial                                                                         electri-                                                                 Drum  fication                                                                              Residual    Defective                                                                            Image                                           No.   efficiency                                                                            voltage                                                                             Ghost  image flow                                            __________________________________________________________________________     (a)   ⊚                                                                      ⊚                                                                    ○                                                                              ⊚                                                                     ⊚                                (b)   ⊚                                                                      ⊚                                                                    ○                                                                              ⊚                                                                     ⊚                                __________________________________________________________________________         Increase                                                                       of        Break            Degree of                                       Drum                                                                               defective                                                                           Surface                                                                             down                                                                               Abrasion                                                                             Interference                                                                          background                                      No. image                                                                               abrasion                                                                            voltage                                                                            resistance                                                                           fringe fogginess                                       __________________________________________________________________________     (a) ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                              ⊚                                (b) ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                              ⊚                                __________________________________________________________________________      ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 342(a)                                 __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Contact                                                                              SiH.sub.4      20  250     50   0.05 0.5                                 layer N.sub.2        10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                   layer NO             10                                                        Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH .sub.3)                                               100 ppm                                                   layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                                100 ppm                                                   layer)                                                                         __________________________________________________________________________

                                      TABLE 342(b)                                 __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Contact                                                                              SiH.sub.4      20  250     50   0.05 0.5                                 layer N.sub.2        10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800 ppm                                                    layer NO             10                                                        Photo-                                                                               Si.sub.4      200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         __________________________________________________________________________

                  TABLE 343                                                        ______________________________________                                               Intial                                                                         electri-                                                                 Drum  fication  Residual        Defective                                                                              Image                                  No.   efficiency                                                                               voltage  Ghost  image   flow                                   ______________________________________                                         (a)   ⊚                                                                         ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       (b)   ⊚                                                                         ⊚                                                                        ○                                                                              ⊚                                                                       ⊚                       ______________________________________                                               Increase                                                                       of                Break         Degree of                                Drum  defective                                                                               Surface  down  Abrasion                                                                               background                               No.   image    abrasion voltage                                                                              resistance                                                                             fogginess                                ______________________________________                                         (a)   ○ ○ ⊚                                                                     ⊚                                                                       ⊚                         (b)   ○ ○ ⊚                                                                     ⊚                                                                       ⊚                         ______________________________________                                          ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 344(a)                                 __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Contact                                                                              SiH.sub.4      20  250     50   0.05 0.5                                 layer N.sub.2        10                                                        IR    SiH.sub.4     100  250    150   0.35 1                                   absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4      50                                                              B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                         NO             10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000 ppm                                                   layer NO             10                                                        Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           Hz            200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                                100 ppm                                                   layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               SiH.sub.4 (against B.sub.2 H.sub.6 +NH.sub.3)                                                 100 ppm                                                   layer)                                                                         __________________________________________________________________________

                                      TABLE 344(b)                                 __________________________________________________________________________           Gas used and its   Substrate    Inner                                                                               Layer                               Name of                                                                              flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                           layer (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                             __________________________________________________________________________     Contact                                                                              SiH.sub.4      20  250     50   0.05 0.5                                 layer N.sub.2        10                                                        IR    SiH.sub.4     100  250    150   0.35 1                                   absorptive                                                                           H.sub.2       100                                                        layer GeH.sub.4      50                                                              PH.sub.3 (against SiH.sub.4)                                                                 800 ppm                                                          NO             10                                                        Charge                                                                               SiH.sub.4     100  250    150   0.35 3                                   injection                                                                            H.sub.2       100                                                        inhibition                                                                           PH.sub.3 (against SiH.sub.4)                                                                 800 ppm                                                    layer NO             10                                                        Photo-                                                                               SiH.sub.4     200  250    300   0.40 20                                  conductive                                                                           H.sub.2       200                                                        layer                                                                          Surface                                                                              B.sub.2 H.sub.6 /Ar (20%)                                                                    500  250    200   0.35 0.3                                 layer NH.sub.3      100                                                        (lower                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         Surface                                                                              B.sub.2 H.sub.6 /He (20%)                                                                    500  250    100   0.35 0.3                                 layer NH.sub.3      100                                                        (upper                                                                               GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                    layer)                                                                         __________________________________________________________________________

                                      TABLE 345                                    __________________________________________________________________________           Intial                                                                         electri-                                                                 Drum  fication                                                                              Residual    Defective                                                                            Image                                           No.   efficiency                                                                            voltage                                                                             Ghost  image flow                                            __________________________________________________________________________     (a)   ⊚                                                                      ⊚                                                                    ○                                                                              ⊚                                                                     ⊚                                (b)   ⊚                                                                      ⊚                                                                    ○                                                                              ⊚                                                                     ⊚                                __________________________________________________________________________         Increase                                                                       of        Break            Degree of                                       Drum                                                                               defective                                                                           Surface                                                                             down                                                                               Abrasion                                                                             Interference                                                                          background                                      No. image                                                                               abrasion                                                                            voltage                                                                            resistance                                                                           fringe fogginess                                       __________________________________________________________________________     (a) ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                              ⊚                                (b) ○                                                                            ○                                                                            ⊚                                                                   ⊚                                                                     ○                                                                              ⊚                                __________________________________________________________________________      ⊚: Excellent                                                     ○ : Good                                                         

                                      TABLE 346                                    __________________________________________________________________________          Gas used and its                                                                              Substrate    Inner                                                                               Layer                                    Drum flow rate      temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No.  (SCCM)         (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________     27101                                                                               SiH.sub.4 200  250    300   0.40 20                                            He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO         4                                                              27102                                                                               SiH.sub.4 150  250    350   0.40 20                                            SiF.sub.4  50                                                                  H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO         6                                                              27103                                                                               SiH.sub.4 200  250    300   0.40 20                                            H.sub.2   200                                                             27104                                                                               SiH.sub.4 200  250    250   0.40 20                                            Ar        200                                                             27105                                                                               SiH.sub.4 150  250    350   0.40 20                                            SiF.sub.4  50                                                                  H.sub.2   200                                                              27106*                                                                             SiH.sub.4 200  250    300   0.40 20                                            He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO         4                                                               27107*                                                                             SiH.sub.4 150  250    350   0.40 20                                            SiF.sub.4  50                                                                  H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100 ppm                                                              NO         6                                                               27108*                                                                             SiH.sub.4 200  250    300   0.40 20                                            H.sub.2   200                                                              27109*                                                                             SiH.sub.4 200  250    250   0.40 20                                            Ar        200                                                              27110*                                                                             SiH.sub.4 150  250    350   0.40 20                                            SiF.sub.4  50                                                                  H.sub.2   200                                                             __________________________________________________________________________      *surface layer followed Table 327(b)                                           markless case: followed Table 327(a)                                     

                                      TABLE 347                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________      27201                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                27202                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                27206                                                                              SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              27204                                                                              SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              27205                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              27206*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                27207*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub. 4)                                                     100                                                                               ppm                                                               NO        6                                                                27208*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              27209*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              27210*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________      *surface layer followed Table 329(b)                                           markless case: followed Table 329(a)                                     

                                      TABLE 348                                    __________________________________________________________________________         Gas used and its                                                                               Substrate    Inner                                                                               Layer                                    Drum                                                                               flow rate       temperature                                                                           RF power                                                                             pressure                                                                            thickness                                No. (SCCM)          (°C.)                                                                          (W)   (Torr)                                                                              (μm)                                  __________________________________________________________________________      27301                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                27302                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                27303                                                                              SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              27304                                                                              SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              27305                                                                              SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              27306*                                                                             SiH.sub.4 200   250    300   0.40 20                                           He        200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        4                                                                27307*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      100                                                                               ppm                                                               NO        6                                                                27308*                                                                             SiH.sub.4 200   250    300   0.40 20                                           H.sub.2   200                                                              27309*                                                                             SiH.sub.4 200   250    250   0.40 20                                           Ar        200                                                              27310*                                                                             SiH.sub.4 150   250    350   0.40 20                                           SiF.sub.4 50                                                                   H.sub.2   200                                                              __________________________________________________________________________      *surface layer followed Table 327(b)                                           markless case: followed Table 327(a)                                     

                                      TABLE 349                                    __________________________________________________________________________         Gas used and its   Substrate    Inner                                                                               Layer                                 Drum                                                                               flow rate          temperature                                                                           RF power                                                                             pressure                                                                            thickness                             No. (SCCM)             (°C.)                                                                          (W)   (Torr)                                                                              (μm)                               __________________________________________________________________________     27401                                                                              SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            GeH.sub.4 10                                                                   NO        10                                                               27402                                                                              SiH.sub.4 80       250    170   0.25 3                                         SiF.sub.4 20                                                                   B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            SnH.sub.4 5                                                                    NO        5                                                                27403                                                                              SiH.sub.4 100      250    130   0.25 3                                         B.sub.2 H.sub.6 (against SiH.sub.4)                                                      800   ppm                                                            NO        4                                                                    N.sub.2   4                                                                    CH.sub.4  6                                                                27404*                                                                             SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                        27405*                                                                             SiH.sub.4 100      250    130   0.25 3                                         PH.sub.3 (against SiH.sub.4)                                                             800   ppm                                                            GeH.sub.4 10                                                                   NO        10                                                               27406                                                                              SiH.sub.4 100      250    150   0.35 3                                         H.sub.2   100                                                                  B.sub.2 H.sub.6 (against SiH.sub.4)                                                      1000  ppm                                                            NO**      10                                                                   NO***     10→0****                                                  __________________________________________________________________________      *surface layer followed Table 332(b)                                           markless case: followed Table 332(a)                                           **Substrate side 2 μm                                                       ***Surface layer side 1 μm                                                  ****Constantly changed                                                   

                                      TABLE 350                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               27501                                                                               27506                                                                               27511                                                                               27516                                                                               27521                                                                               27526                                                                               27531                                      conductive                                                                     layer 1                                                                        Photo-                                                                               27502                                                                               27507                                                                               27512                                                                               27517                                                                               27522                                                                               27527                                                                               27532                                      conductive                                                                     layer 2                                                                        Photo-                                                                               27503                                                                               27508                                                                               28513                                                                               27518                                                                               27523                                                                               27528                                                                               27533                                      conductive                                                                     layer 3                                                                        Photo-                                                                               27504                                                                               27509                                                                               27514                                                                               27519                                                                               27524                                                                               27529                                                                               27534                                      conductive                                                                     layer 5                                                                        Photo-                                                                               27505                                                                               27510                                                                               27515                                                                               27520                                                                               27525                                                                               27530                                                                               27535                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer followed Table 332(b)                                           markless case: followed Table 332(a)                                     

                                      TABLE 351                                    __________________________________________________________________________                 Gas used and its    Substrate    Inner                                                                               Layer                                    flow rate           temperature                                                                           RF power                                                                             pressure                                                                            thickness                    Name of layer                                                                              (SCCM)              (°C.)                                                                          (W)   (Torr)                                                                              (μm)                      __________________________________________________________________________     Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.3                          layer A     H.sub.2       100                                                              NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.3                                      H.sub.2       100                                                              NH.sub.3      300                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                               Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.40 0.3                          layer B     H.sub.2       100                                                              NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                                    Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.40 0.3                                      H.sub.2       100                                                              NH.sub. 3     300                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50 ppm                                               __________________________________________________________________________      *each of the surface layers A and B is individually used in accordance         with the kind of the lower layer                                         

                                      TABLE 352                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               27601                                                                               27607                                                                               27613                                                                               27619                                                                               27625                                                                               27631                                                                               27637                                      conductive                                                                     layer 1                                                                        Photo-                                                                               27602                                                                               27608                                                                               27614                                                                               27620                                                                               27626                                                                               27632                                                                               27638                                      conductive                                                                     layer 2                                                                        Photo-                                                                               27603                                                                               27609                                                                               27615                                                                               27621                                                                               27627                                                                               27633                                                                               27639                                      conductive                                                                     layer 3                                                                        Photo-                                                                               27604                                                                               27610                                                                               27616                                                                               27622                                                                               27628                                                                               27634                                                                               27640                                      conductive                                                                     layer 4                                                                        Photo-                                                                               27605                                                                               27611                                                                               27617                                                                               27623                                                                               27629                                                                               27635                                                                               27641                                      conductive                                                                     layer 5                                                                        Photo-                                                                               27606                                                                               27612                                                                               27618                                                                               27624                                                                               27630                                                                               27636                                                                               27642                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 353                                    __________________________________________________________________________                 Gas used and its     Substrate    Inner                                                                               Layer                                   flow rate            temperature                                                                           RF power                                                                             pressure                                                                            thickness                   Name of layer                                                                              (SCCM)               (°C.)                                                                          (W)   (Torr)                                                                              (μm)                     __________________________________________________________________________     Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.3                         layer A     NH.sub.3      100                                                              Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                                   SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                   Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.3                                     NH.sub.3      100                                                              Bias voltage of                                                                              +100                                                                               V                                                            the cylinder                                                                   SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                              Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500    250    200   0.35 0.3                         layer B     NH.sub.3      100                                                              Bias voltage of                                                                              -150                                                                               V                                                            the cylinder                                                                   GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100 ppm                                                   Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500    250    100   0.35 0.3                                     NH.sub.3      100                                                              Bias voltage of                                                                              +100                                                                               V                                                            the cylinder                                                                   GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.                                                 100 ppm                                              __________________________________________________________________________      *each of the surface layers A and B is individually used in accordance         with the kind of the lower layer                                         

                                      TABLE 354                                    __________________________________________________________________________           Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                  Drum  inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                 No.   layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                    __________________________________________________________________________     Photo-                                                                               27701                                                                               27707                                                                               27713                                                                               27719                                                                               27725                                                                               27731                                                                               27737                                      conductive                                                                     layer 1                                                                        Photo-                                                                               27702                                                                               27708                                                                               27714                                                                               27720                                                                               27726                                                                               27732                                                                               27738                                      conductive                                                                     layer 2                                                                        Photo-                                                                               27703                                                                               27709                                                                               27715                                                                               27721                                                                               27727                                                                               27733                                                                               27739                                      conductive                                                                     layer 3                                                                        Photo-                                                                               27704                                                                               27710                                                                               27716                                                                               27722                                                                               27728                                                                               27734                                                                               27740                                      conductive                                                                     layer 4                                                                        Photo-                                                                               27705                                                                               27711                                                                               27717                                                                               27723                                                                               27729                                                                               27735                                                                               27741                                      conductive                                                                     layer 5                                                                        Photo-                                                                               27706                                                                               27712                                                                               27718                                                                               27724                                                                               27730                                                                               27736                                                                               27742                                      conductive                                                                     layer 6                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 355                                                        ______________________________________                                                     Photo-   Photo-   Photo-                                           Photo-      conduc-  conduc-  conduc-                                                                               Photo-                                    conductive  tive     tive     tive   conductive                                Layer 1     Layer 2  Layer 3  Layer 5                                                                               Layer 6                                   ______________________________________                                         Drum  27801     27802    27803  27804  24805                                   No.    27806*    27807*   27808*                                                                                27809*                                                                                27810*                                 ______________________________________                                          *Surface layer followed Table 334(b)                                           Markless case: followed Table 334(a)                                     

                                      TABLE 356                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               27901 27902 27903 27904 27905 27906                                        No.  27907*                                                                               27908*                                                                               27909*                                                                               27910*                                                                               27911*                                                                               27912*                                      __________________________________________________________________________      *surface layer B was used.                                                     *markless case: surface layer A was used.                                

                                      TABLE 357                                    __________________________________________________________________________     Photo-    Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                       conductive                                                                               conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                   layer 1   layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                      __________________________________________________________________________     Drum                                                                               28001 28002 28003 28004 28005 28006                                        No.  28007*                                                                               28008*                                                                               28009*                                                                               28010*                                                                               28011*                                                                               28012*                                      __________________________________________________________________________      *surface layer B was used.                                                     markless case: surface layer A was used.                                 

                  TABLE 358                                                        ______________________________________                                                        Drum                                                                           No.                                                             ______________________________________                                         IR Absorptive    28101   28120*                                                Layer 1                                                                        IR Absorptive    28102   28121*                                                Layer 2                                                                        IR Absorptive    28103   28122*                                                Layer 3                                                                        IR Absorptive    28104   28123*                                                Layer 4                                                                        IR Absorptive    28105   28124*                                                Layer 5                                                                        IR Absorptive    28106   --                                                    Layer 6                                                                        IR Absorptive    28107   --                                                    Layer 7                                                                        IR Absorptive    28108   --                                                    Layer 8                                                                        IR Absorptive    28109   --                                                    Layer 9                                                                        IR Absorptive    28110   --                                                    Layer 10                                                                       IR Absorptive    28111   --                                                    Layer 11                                                                       IR Absorptive    28112   --                                                    Layer 12                                                                       IR Absorptive    22813   --                                                    Layer 13                                                                       IR Absorptive    28114   --                                                    Layer 14                                                                       IR Absorptive    28115   --                                                    Layer 15                                                                       IR Absorptive    28116   --                                                    Layer 17                                                                       IR Absorptive    28117   28125*                                                Layer 18                                                                       IR Absorptive    28118   28126*                                                Layer 19                                                                       IR Absorptive    28119   28127*                                                Layer 20                                                                       ______________________________________                                          *: Surface layer followed Table 336(b)                                         Markless case: followed 336(a)                                           

                                      TABLE 359                                    __________________________________________________________________________             Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                         Drum    conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                     No.     layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 5                                                                              layer 6                                        __________________________________________________________________________     IR absorptive                                                                          28201 28221 28241 28261 28281                                          layer 1                                                                        IR absorptive                                                                          28202 28222 28242 28262 28282                                          layer 2                                                                        IR absorptive                                                                          28203 28223 28243 28263 28283                                          layer 3                                                                        IR absorptive                                                                          28204 28224 28244 28264 28284                                          layer 4                                                                        IR absorptive                                                                          28205 28225 28245 28265 28285                                          layer 5                                                                        IR absorptive                                                                          28206 28226 28246 28266 28286                                          layer 6                                                                        IR absorptive                                                                          28207 28227 28247 28267 28287                                          layer 7                                                                        IR absorptive                                                                          28208 28228 28248 28268 28288                                          layer 8                                                                        IR absorptive                                                                          28209 28229 28249 28269 28289                                          layer 9                                                                        IR absorptive                                                                          28210 28230 28250 28270 28290                                          layer 10                                                                       IR absorptive                                                                          28211 28231 28251 28271 28291                                          layer 11*                                                                      IR absorptive                                                                          28212 28232 28252 28272 28292                                          layer 12*                                                                      IR absorptive                                                                          28213 28233 28253 28273 28293                                          layer 13*                                                                      IR absorptive                                                                          28214 28234 28254 28274 28294                                          layer 14*                                                                      IR absorptive                                                                          28215 28235 28255 28275 28295                                          layer 15*                                                                      IR absorptive                                                                          28216 28036 28256 28276 28296                                          layer 16                                                                       IR absorptive                                                                          28217 28237 28257 28277 28297                                          layer 17*                                                                      IR absorptive                                                                          28218 28238 28258 28278 28298                                          layer 18                                                                       IR absorptive                                                                          28219 28239 28259 28279 28299                                          layer 19                                                                       IR absorptive                                                                          28220 28240 28260 28280 282100                                         layer 20                                                                       __________________________________________________________________________      *: surface layer followed Table 336(b)                                         markless case: followed Table 336(a)                                     

                                      TABLE 360                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         28301 28321 28341 28361 28381 283101                                    layer 1                                                                        IR absorptive                                                                         28302 28322 28342 28362 28382 283102                                    layer 2                                                                        IR absorptive                                                                         28303 28323 28343 28363 28383 283103                                    layer 3                                                                        IR absorptive                                                                         28304 28324 28344 28364 28384 283104                                    layer 4                                                                        IR absorptive                                                                         28305 28325 28345 28365 28385 283105                                    layer 5                                                                        IR absorptive                                                                         28306 28326 28346 28366 28386 283106                                    layer 6                                                                        IR absorptive                                                                         28307 28327 28347 28367 28387 283107                                    layer 7                                                                        IR absorptive                                                                         28308 28328 28348 28368 28388 283108                                    layer 8                                                                        IR absorptive                                                                         28309 29329 29349 29369 28389 283109                                    layer 9                                                                        IR absorptive                                                                         29310 28330 28350 28370 28390 283110                                    layer 10                                                                       IR absorptive                                                                         28311 28331 28351 28371 28391 283111                                    layer 11*                                                                      IR absorptive                                                                         28312 28332 28352 28372 28392 283112                                    layer 12*                                                                      IR absorptive                                                                         28313 28333 28353 28373 28393 283113                                    layer 13*                                                                      IR absorptive                                                                         28314 28334 28354 28374 28394 283114                                    layer 14*                                                                      IR absorptive                                                                         28315 28335 28355 28375 28395 283115                                    layer 15*                                                                      IR absorptive                                                                         28316 28336 28356 28376 28396 283116                                    layer 16                                                                       IR absorptive                                                                         28317 28337 28357 28377 28397 283117                                    layer 17*                                                                      IR absorptive                                                                         28318 28338 28358 28378 28398 283118                                    layer 18                                                                       IR absorptive                                                                         28319 28339 28359 28379 28399 283119                                    layer 19                                                                       IR absorptive                                                                         28320 28340 28360 28380 283100                                                                               283120                                    layer 20                                                                       __________________________________________________________________________      *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 361                                    __________________________________________________________________________            Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                                                               Photo-                                    Drum   conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                                                           conductive                                No.    layer 1                                                                              layer 2                                                                              layer 3                                                                              layer 4                                                                              layer 5                                                                              layer 6                                   __________________________________________________________________________     IR absorptive                                                                         28401 28421 28441 28461 28481 284101                                    layer 1                                                                        IR absorptive                                                                         28402 28422 28442 28462 28482 284102                                    layer 2                                                                        IR absorptive                                                                         28403 28423 28443 28463 28483 284103                                    layer 3                                                                        IR absorptive                                                                         28404 28424 28444 28464 28484 284104                                    layer 4                                                                        IR absorptive                                                                         28405 28425 28445 28465 28485 284105                                    layer 5                                                                        IR absorptive                                                                         28406 28426 28446 28466 28486 284106                                    layer 6                                                                        IR absorptive                                                                         28407 28427 28447 28467 28487 284107                                    layer 7                                                                        IR absorptive                                                                         28408 28428 28448 28468 28488 284108                                    layer 8                                                                        IR absorptive                                                                         28409 29429 29449 29469 28489 284109                                    layer 9                                                                        IR absorptive                                                                         29410 28430 28450 28470 28490 284110                                    layer 10                                                                       IR absorptive                                                                         28411 28431 28451 28471 28491 284111                                    layer 11*                                                                      IR absorptive                                                                         28412 28432 28452 28472 28492 284112                                    layer 12*                                                                      IR absorptive                                                                         28413 28433 28453 28473 28493 284113                                    layer 13*                                                                      IR absorptive                                                                         28414 28434 28454 28474 28494 284114                                    layer 14*                                                                      IR absorptive                                                                         28415 28435 28455 28475 28495 284115                                    layer 15*                                                                      IR absorptive                                                                         28416 28436 28456 28476 28496 284116                                    layer 16                                                                       IR absorptive                                                                         28417 28437 28457 28477 28497 284117                                    layer 17*                                                                      IR absorptive                                                                         28418 28438 28458 28478 28498 284118                                    layer 18                                                                       IR absorptive                                                                         28419 28439 28459 28479 28499 284119                                    layer 19                                                                       IR absorptive                                                                         28420 28440 28460 28480 284100                                                                               284120                                    layer 20                                                                       __________________________________________________________________________      *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 362                                                        ______________________________________                                                Contact    Contact  Contact                                                    Layer 2    Layer 3  Layer 4                                             ______________________________________                                         Drum     28501        28502    28503                                           No.       28504*       28405*   28506*                                         ______________________________________                                          *Surface layer followed Table 338 (b)                                          Markless case: followed Table 338 (a)                                    

                  TABLE 363                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   28601      28607*   28613   28619                                     conductive                                                                     layer 1                                                                        Photo-   28602     28608      28614* 28620                                     conductive                                                                     layer 2                                                                        Photo-    28603*   28609     28615   28621                                     conductive                                                                     layer 3                                                                        Photo-   28604     28610     28616    28622*                                   conductive                                                                     layer 4                                                                        Photo-   28605     28611      28617* 28623                                     conductive                                                                     layer 5                                                                        Photo-   28606      28612*   28618   28624                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 338 (b)                                          markless case: followed Table 338 (a)                                    

                  TABLE 364                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-   28701     28707      28713* 28719                                     conductive                                                                     layer 1                                                                        Photo-   28702      28708*   28714   28720                                     conductive                                                                     layer 2                                                                        Photo-   28703     28709     28715    28721*                                   conductive                                                                     layer 3                                                                        Photo-    28704*   28710     28716   28722                                     conductive                                                                     layer 4                                                                        Photo-   28705      28711*   28717   28723                                     conductive                                                                     layer 5                                                                        Photo-   28706     28712      28718* 28724                                     conductive                                                                     layer 6                                                                        ______________________________________                                    

                  TABLE 365                                                        ______________________________________                                         Drum     Contact   Contact   Contact Contact                                   No.      layer 1   layer 2   layer 3 layer 4                                   ______________________________________                                         Photo-    28801*   28807     28813   28819                                     conductive                                                                     layer 1                                                                        Photo-   28802     28808      28814* 28820                                     conductive                                                                     layer 2                                                                        Photo-   28803     28809     28815    28821*                                   conductive                                                                     layer 3                                                                        Photo-   28804      28810*   28816   28822                                     conductive                                                                     layer 4                                                                        Photo-   28805     28811     28817    28823*                                   conductive                                                                     layer 5                                                                        Photo-    28806*   28812     28818   28824                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 366                                                        ______________________________________                                                            Drum                                                                           No.                                                         ______________________________________                                         IR absorptive        28901   28921                                             layer 1                      *                                                 IR absorptive        28902   28922                                             layer 2                      *                                                 IR absorptive        28903   28923                                             layer 3                      *                                                 IR absorptive        28904   28924                                             layer 4                      *                                                 IR absorptive        28905   28925                                             layer 5                      *                                                 IR absorptive        28906   28926                                             layer 6                      *                                                 IR absorptive        28907   28927                                             layer 7                      *                                                 IR absorptive        28908   28928                                             layer 8                      *                                                 IR absorptive        28909   28929                                             layer 9                      *                                                 IR absorptive        28910   28930                                             layer 10                     *                                                 IR absorptive        28911   28931                                             layer 11                     *                                                 IR absorptive        28912   28932                                             layer 12                     *                                                 IR absorptive        28913   28933                                             layer 13                     *                                                 IR absorptive        28914   28934                                             layer 14                     *                                                 IR absorptive        28915   28935                                             layer 15                     *                                                 IR absorptive        28916   28936                                             layer 16                     *                                                 IR absorptive        28917   28937                                             layer 17                     *                                                 IR absorptive        28918   28938                                             layer 18                     *                                                 IR absorptive        28919   28939                                             layer 19                     *                                                 IR absorptive        28920   28940                                             layer 20                     *                                                 ______________________________________                                          *: Charge injection inhibition layer and surface layer followed Table          340(b)                                                                         markless case: followed Table 340(a)                                     

                  TABLE 367                                                        ______________________________________                                                    Photo-      Photo-    Photo-                                        Drum       conductive  conductive                                                                               conductive                                    No.        layer 4     layer 5*  layer 7                                       ______________________________________                                         IR absorptive                                                                             29001       29021     29041                                         layer 1                                                                        IR absorptive                                                                             29002       29022     29042                                         layer 2                                                                        IR absorptive                                                                             29003       29023     29043                                         layer 3                                                                        IR absorptive                                                                             29004       29024     29044                                         layer 4                                                                        IR absorptive                                                                             29005       29025     29045                                         layer 5                                                                        IR absorptive                                                                             29006       29026     29046                                         layer 6                                                                        IR absorptive                                                                             29007       29027     29047                                         layer 7                                                                        IR absorptive                                                                             29008       29028     29048                                         layer 8                                                                        IR absorptive                                                                             29009       29029     29049                                         layer 9                                                                        IR absorptive                                                                             29010       29030     29050                                         layer 10                                                                       IR absorptive                                                                             29011       29031     29051                                         layer 11                                                                       IR absorptive                                                                             29012       29032     29052                                         layer 12                                                                       IR absorptive                                                                             29013       29033     29053                                         layer 13                                                                       IR absorptive                                                                             29014       29034     29054                                         layer 14                                                                       IR absorptive                                                                             29015       29035     29055                                         layer 15                                                                       IR absorptive                                                                             29016       29036     29056                                         layer 16                                                                       IR absorptive                                                                             29017       29037     29057                                         layer 17                                                                       IR absorptive                                                                             29018       29038     29058                                         layer 18                                                                       IR absorptive                                                                             29019       29039     29059                                         layer 19                                                                       IR absorptive                                                                             29020       29040     29060                                         layer 20                                                                       ______________________________________                                          *: surface layer followed Table 340(b)                                         markless case: followed Table 340(a)                                     

                  TABLE 368                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           29101     29121     29141   29161                                     layer 1                                                                        IR absorptive                                                                           29102     29122     29142   29162                                     layer 2                                                                        IR absorptive                                                                           29103     29123     29143   29163                                     layer 3                                                                        IR absorptive                                                                           29104     29124     29144   29164                                     layer 4                                                                        IR absorptive                                                                           29105     29125     29145   29165                                     layer 5                                                                        IR absorptive                                                                           29106     29126     29146   29166                                     layer 6                                                                        IR absorptive                                                                           29107     29127     29147   29167                                     layer 7                                                                        IR absorptive                                                                           29108     29128     29148   29168                                     layer 8                                                                        IR absorptive                                                                           29109     29129     29149   29169                                     layer 9                                                                        IR absorptive                                                                           29110     29130     29150   29170                                     layer 10                                                                       IR absorptive                                                                           29111     29131     29151   29171                                     layer 11                                                                       IR absorptive                                                                           29112     29132     29152   29172                                     layer 12                                                                       IR absorptive                                                                           29113     29133     29153   29173                                     layer 13                                                                       IR absorptive                                                                           29114     29134     29154   29174                                     layer 14                                                                       IR absorptive                                                                           29115     29135     29155   29175                                     layer 15                                                                       IR absorptive                                                                           29116     29136     29156   29176                                     layer 16                                                                       IR absorptive                                                                           29117     29137     29157   29177                                     layer 17                                                                       IR absorptive                                                                           29118     29138     29158   29178                                     layer 18                                                                       IR absorptive                                                                           29119     29139     29159   29179                                     layer 19                                                                       IR absorptive                                                                           29120     29140     29160   29180                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 369                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           29201     29221     29241   29261                                     layer 1                                                                        IR absorptive                                                                           29202     29222     29242   29262                                     layer 2                                                                        IR absorptive                                                                           29203     29223     29243   29263                                     layer 3                                                                        IR absorptive                                                                           29204     29224     29244   29264                                     layer 4                                                                        IR absorptive                                                                           29205     29225     29245   29265                                     layer 5                                                                        IR absorptive                                                                           29206     29226     29246   29266                                     layer 6                                                                        IR absorptive                                                                           29207     29227     29247   29267                                     layer 7                                                                        IR absorptive                                                                           29208     29228     29248   29268                                     layer 8                                                                        IR absorptive                                                                           29209     29229     29249   29269                                     layer 9                                                                        IR absorptive                                                                           29210     29230     29250   29270                                     layer 10                                                                       IR absorptive                                                                           29211     29231     29251   29271                                     layer 11                                                                       IR absorptive                                                                           29212     29232     29252   29272                                     layer 12                                                                       IR absorptive                                                                           29213     29233     29253   29273                                     layer 13                                                                       IR absorptive                                                                           29214     29234     29254   29274                                     layer 14                                                                       IR absorptive                                                                           29215     29235     29255   29275                                     layer 15                                                                       IR absorptive                                                                           29216     29236     29256   29276                                     layer 16                                                                       IR absorptive                                                                           29217     29237     29257   29277                                     layer 17                                                                       IR absorptive                                                                           29218     29238     29258   29278                                     layer 18                                                                       IR absorptive                                                                           29219     29239     29259   29279                                     layer 19                                                                       IR absorptive                                                                           29220     29240     29260   29280                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 370                                    __________________________________________________________________________     Contact  Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                                                             Contact                                      Layer 1  Layer 2                                                                             Layer 3                                                                             Layer 4                                                                             Layer 6                                                                             Layer 7                                                                             Layer 8                                      __________________________________________________________________________     Drum                                                                               29301                                                                               29302                                                                               29303                                                                               29304                                                                               29305                                                                               29306                                                                               29307                                        No.  29308*                                                                              29309*                                                                              29310*                                                                              29311*                                                                              29312*                                                                              29313*                                                                              29314*                                      __________________________________________________________________________      *Charge injection inhibition layer andsurface layer followed Table 342 (b      Markless case: followed Table 342 (a)                                    

                                      TABLE 371                                    __________________________________________________________________________          Charge                                                                               Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                               Charge                                              injection                                                                            injection                                                                           injection                                                                           injection                                                                           injection                                                                            injection                                      Drum inhibition                                                                           inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                           inhibition                                     No.  layer 2                                                                              layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                             layer 7                                        __________________________________________________________________________     Contact                                                                             29401 29409                                                                               29417                                                                               29425                                                                               29433 29441                                          layer 1                                                                        Contact                                                                             29402 29410                                                                               29418                                                                               29426                                                                               29434 29442                                          layer 2                                                                        Contact                                                                             29403 29411                                                                               29419                                                                               29427                                                                               29435 29443                                          layer 3                                                                        Contact                                                                             29404 29412                                                                               29420                                                                               29428                                                                               29436 29444                                          layer 4                                                                        Contact                                                                             29405 29413                                                                               29421                                                                               29429                                                                               29437 29445                                          layer 5                                                                        Contact                                                                             29406 29414                                                                               29422                                                                               29430                                                                               29438 29446                                          layer 6                                                                        Contact                                                                             29407 29415                                                                               29423                                                                               29431                                                                               29439 29447                                          layer 7                                                                        Contact                                                                             29408 29416                                                                               29424                                                                               29432                                                                               29440 29448                                          layer 8                                                                        __________________________________________________________________________      *surface layer followed Table 342 (b)                                          markless case: followed Table 342 (a)                                    

                                      TABLE 372                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             29501                                                                               29509                                                                               29517                                                                               29525                                                                               29533                                                                               29541                                                                               29549                                       layer 1                                                                        Contact                                                                             29502                                                                               29510                                                                               29518                                                                               29526                                                                               29534                                                                               29542                                                                               29550                                       layer 2                                                                        Contact                                                                             29503                                                                               29511                                                                               29519                                                                               29527                                                                               29535                                                                               29543                                                                               29551                                       layer 3                                                                        Contact                                                                             29504                                                                               29512                                                                               29520                                                                               29528                                                                               29536                                                                               29544                                                                               29552                                       layer 4                                                                        Contact                                                                             29505                                                                               29513                                                                               29521                                                                               29529                                                                               29537                                                                               29545                                                                               29553                                       layer 5                                                                        Contact                                                                             29506                                                                               29514                                                                               29522                                                                               29530                                                                               29538                                                                               29546                                                                               29554                                       layer 6                                                                        Contact                                                                             29507                                                                               29515                                                                               29523                                                                               29531                                                                               29539                                                                               29547                                                                               29555                                       layer 7                                                                        Contact                                                                             29508                                                                               29516                                                                               29524                                                                               29532                                                                               29540                                                                               29548                                                                               29556                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 373                                    __________________________________________________________________________          Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                                                              Charge                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                                                           injection                                   Drum inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                                                          inhibition                                  No.  layer 1                                                                             layer 2                                                                             layer 3                                                                             layer 4                                                                             layer 5*                                                                            layer 6*                                                                            layer 7                                     __________________________________________________________________________     Contact                                                                             29601                                                                               29609                                                                               29617                                                                               29625                                                                               29633                                                                               29641                                                                               29649                                       layer 1                                                                        Contact                                                                             29602                                                                               29610                                                                               29618                                                                               29626                                                                               29634                                                                               29642                                                                               29650                                       layer 2                                                                        Contact                                                                             29603                                                                               29611                                                                               29619                                                                               29627                                                                               29635                                                                               29643                                                                               29651                                       layer 3                                                                        Contact                                                                             29604                                                                               29612                                                                               29620                                                                               29628                                                                               29636                                                                               29644                                                                               29652                                       layer 4                                                                        Contact                                                                             29605                                                                               29613                                                                               29621                                                                               29629                                                                               29637                                                                               29645                                                                               29653                                       layer 5                                                                        Contact                                                                             29606                                                                               29614                                                                               29622                                                                               29630                                                                               29638                                                                               29646                                                                               29654                                       layer 6                                                                        Contact                                                                             29607                                                                               29615                                                                               29623                                                                               29631                                                                               29639                                                                               29647                                                                               29655                                       layer 7                                                                        Contact                                                                             29608                                                                               29616                                                                               29624                                                                               29632                                                                               29640                                                                               29648                                                                               29656                                       layer 8                                                                        __________________________________________________________________________      *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 374                                                        ______________________________________                                                Charge     Charge   Charge                                                     injection  injection                                                                               injection                                                  inhibition inhibition                                                                              inhibition                                                 layer 4    layer 6* layer 7                                             ______________________________________                                         Drum     29701        29702    29703                                           No.                                                                            ______________________________________                                          *surface layer followed Table 18 (b)                                           markless case: followed Table 18 (a)                                     

                  TABLE 375                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   29801     29803     29805   29807                                     conductive                                                                     layer 5                                                                        Photo-   29802     29804     29806   29808                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer followed Table 18 (b)                                           markless case: followed Table 18 (a)                                     

                  TABLE 376                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   29901     29904     29907   29910                                     conductive                                                                     layer 4                                                                        Photo-   29902     29905     29908   29911                                     conductive                                                                     layer 5                                                                        Photo-   29903     29906     29909   29912                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                  TABLE 377                                                        ______________________________________                                                  Charge    Charge    Charge  Charge                                             injection injection injection                                                                              injection                                 Drum     inhibition                                                                               inhibition                                                                               inhibition                                                                             inhibition                                No.      layer 1   layer 4   layer 6*                                                                               layer 7                                   ______________________________________                                         Photo-   30001     30004     30007   30010                                     conductive                                                                     layer 4                                                                        Photo-   30002     30005     30008   30011                                     conductive                                                                     layer 5                                                                        Photo-   30003     30006     30009   30012                                     conductive                                                                     layer 6                                                                        ______________________________________                                          *surface layer B was used                                                      markless case: surface layer A was used                                  

                                      TABLE 378                                    __________________________________________________________________________                                     Substrate    Inner                                                                               Layer                                    Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                    Name of layer                                                                              flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                      __________________________________________________________________________     Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                          layer A     NH.sub.3      100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                      NH.sub.3      300                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                               Surface*                                                                            Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                          layer B     NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                                      NH.sub.3      100                                                              GeH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                               __________________________________________________________________________      *each of the surface layers A and B is individually used in accordance         with the kind of the lower layer                                         

                  TABLE 379                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30101     30121     30141   30161                                     layer 1                                                                        IR absorptive                                                                           30102     30122     30142   30162                                     layer 2                                                                        IR absorptive                                                                           30103     30123     30143   30163                                     layer 3                                                                        IR absorptive                                                                           30104     30124     30144   30164                                     layer 4                                                                        IR absorptive                                                                           30105     30125     30145   30165                                     layer 5                                                                        IR absorptive                                                                           30106     30126     30146   30166                                     layer 6                                                                        IR absorptive                                                                           30107     30127     30147   30167                                     layer 7                                                                        IR absorptive                                                                           30108     30128     30148   30168                                     layer 8                                                                        IR absorptive                                                                           30109     30129     30149   30169                                     layer 9                                                                        IR absorptive                                                                           30110     30130     30150   30170                                     layer 10                                                                       IR absorptive                                                                           30111     30131     30151   30171                                     layer 11                                                                       IR absorptive                                                                           30112     30132     30152   30172                                     layer 12                                                                       IR absorptive                                                                           30113     30133     30153   30173                                     layer 13                                                                       IR absorptive                                                                           30114     30134     30154   30174                                     layer 14                                                                       IR absorptive                                                                           30115     30135     30155   30175                                     layer 15                                                                       IR absorptive                                                                           30116     30136     30156   30176                                     layer 16                                                                       IR absorptive                                                                           30117     30137     30157   30177                                     layer 17                                                                       IR absorptive                                                                           30118     30138     30158   30178                                     layer 18                                                                       IR absorptive                                                                           30119     30139     30159   30179                                     layer 19                                                                       IR absorptive                                                                           30120     30140     30160   30180                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 380                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30201     30221     30241   30261                                     layer 1                                                                        IR absorptive                                                                           30202     30222     30242   30262                                     layer 2                                                                        IR absorptive                                                                           30203     30223     30243   30263                                     layer 3                                                                        IR absorptive                                                                           30204     30224     30244   30264                                     layer 4                                                                        IR absorptive                                                                           30205     30225     30245   30265                                     layer 5                                                                        IR absorptive                                                                           30206     30226     30246   30266                                     layer 6                                                                        IR absorptive                                                                           30207     30227     30247   30267                                     layer 7                                                                        IR absorptive                                                                           30208     30228     30248   30268                                     layer 8                                                                        IR absorptive                                                                           30209     30229     30249   30269                                     layer 9                                                                        IR absorptive                                                                           30210     30230     30250   30270                                     layer 10                                                                       IR absorptive                                                                           30211     30231     30251   30271                                     layer 11                                                                       IR absorptive                                                                           30212     30232     30252   30272                                     layer 12                                                                       IR absorptive                                                                           30213     30233     30253   30273                                     layer 13                                                                       IR absorptive                                                                           30214     30234     30254   30274                                     layer 14                                                                       IR absorptive                                                                           30215     30235     30255   30275                                     layer 15                                                                       IR absorptive                                                                           30216     30236     30256   30276                                     layer 16                                                                       IR absorptive                                                                           30217     30237     30257   30277                                     layer 17                                                                       IR absorptive                                                                           30218     30238     30258   30278                                     layer 18                                                                       IR absorptive                                                                           30219     30239     30259   30279                                     layer 19                                                                       IR absorptive                                                                           30220     30240     30260   30280                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 381                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30301     30321     30341   30361                                     layer 1                                                                        IR absorptive                                                                           30302     30322     30342   30362                                     layer 2                                                                        IR absorptive                                                                           30303     30323     30343   30363                                     layer 3                                                                        IR absorptive                                                                           30304     30324     30344   30364                                     layer 4                                                                        IR absorptive                                                                           30305     30325     30345   30365                                     layer 5                                                                        IR absorptive                                                                           30306     30326     30346   30366                                     layer 6                                                                        IR absorptive                                                                           30307     30327     30347   30367                                     layer 7                                                                        IR absorptive                                                                           30308     30328     30348   30368                                     layer 8                                                                        IR absorptive                                                                           30309     30329     30349   30369                                     layer 9                                                                        IR absorptive                                                                           30310     30330     30350   30370                                     layer 10                                                                       IR absorptive                                                                           30311     30331     30351   30371                                     layer 11                                                                       IR absorptive                                                                           30312     30332     30352   30372                                     layer 12                                                                       IR absorptive                                                                           30313     30333     30353   30373                                     layer 13                                                                       IR absorptive                                                                           30314     30334     30354   30374                                     layer 14                                                                       IR absorptive                                                                           30315     30335     30355   30375                                     layer 15                                                                       IR absorptive                                                                           30316     30336     30356   30376                                     layer 16                                                                       IR absorptive                                                                           30317     30337     30357   30377                                     layer 17                                                                       IR absorptive                                                                           30318     30338     30358   30378                                     layer 18                                                                       IR absorptive                                                                           30319     30339     30359   30379                                     layer 19                                                                       IR absorptive                                                                           30320     30340     30360   30380                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 382                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30401     30421     30441   30461                                     layer 1                                                                        IR absorptive                                                                           30402     30422     30442   30462                                     layer 2                                                                        IR absorptive                                                                           30403     30423     30443   30463                                     layer 3                                                                        IR absorptive                                                                           30404     30424     30444   30464                                     layer 4                                                                        IR absorptive                                                                           30405     30425     30445   30465                                     layer 5                                                                        IR absorptive                                                                           30406     30426     30446   30466                                     layer 6                                                                        IR absorptive                                                                           30407     30427     30447   30467                                     layer 7                                                                        IR absorptive                                                                           30408     30428     30448   30468                                     layer 8                                                                        IR absorptive                                                                           30409     30429     30449   30469                                     layer 9                                                                        IR absorptive                                                                           30410     30430     30450   30470                                     layer 10                                                                       IR absorptive                                                                           30411     30431     30451   30471                                     layer 11                                                                       IR absorptive                                                                           30412     30432     30452   30472                                     layer 12                                                                       IR absorptive                                                                           30413     30433     30453   30473                                     layer 13                                                                       IR absorptive                                                                           30414     30434     30454   30474                                     layer 14                                                                       IR absorptive                                                                           30415     30435     30455   30475                                     layer 15                                                                       IR absorptive                                                                           30416     30436     30456   30476                                     layer 16                                                                       IR absorptive                                                                           30417     30437     30457   30477                                     layer 17                                                                       IR absorptive                                                                           30418     30438     30458   30478                                     layer 18                                                                       IR absorptive                                                                           30419     30439     30459   30479                                     layer 19                                                                       IR absorptive                                                                           30420     30440     30460   30480                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 383                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30501     30521     30541   30561                                     layer 1                                                                        IR absorptive                                                                           30502     30522     30542   30562                                     layer 2                                                                        IR absorptive                                                                           30503     30523     30543   30563                                     layer 3                                                                        IR absorptive                                                                           30504     30524     30544   30564                                     layer 4                                                                        IR absorptive                                                                           30505     30525     30545   30565                                     layer 5                                                                        IR absorptive                                                                           30506     30526     30546   30566                                     layer 6                                                                        IR absorptive                                                                           30507     30527     30547   30567                                     layer 7                                                                        IR absorptive                                                                           30508     30528     30548   30568                                     layer 8                                                                        IR absorptive                                                                           30509     30529     30549   30569                                     layer 9                                                                        IR absorptive                                                                           30510     30530     30550   30570                                     layer 10                                                                       IR absorptive                                                                           30511     30531     30551   30571                                     layer 11                                                                       IR absorptive                                                                           30512     30532     30552   30572                                     layer 12                                                                       IR absorptive                                                                           30513     30533     30553   30573                                     layer 13                                                                       IR absorptive                                                                           30514     30534     30554   30574                                     layer 14                                                                       IR absorptive                                                                           30515     30535     30555   30575                                     layer 15                                                                       IR absorptive                                                                           30516     30536     30556   30576                                     layer 16                                                                       IR absorptive                                                                           30517     30537     30557   30577                                     layer 17                                                                       IR absorptive                                                                           30518     30538     30558   30578                                     layer 18                                                                       IR absorptive                                                                           30519     30539     30559   30579                                     layer 19                                                                       IR absorptive                                                                           30520     30540     30560   30580                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                  TABLE 384                                                        ______________________________________                                                  Photo-    Photo-    Photo-  Photo-                                    Drum     conductive                                                                               conductive                                                                               conductive                                                                             conductive                                No.      layer 1   layer 4   layer 5*                                                                               layer 7                                   ______________________________________                                         IR absorptive                                                                           30601     30621     30641   30661                                     layer 1                                                                        IR absorptive                                                                           30602     30622     30642   30662                                     layer 2                                                                        IR absorptive                                                                           30603     30623     30643   30663                                     layer 3                                                                        IR absorptive                                                                           30604     30624     30644   30664                                     layer 4                                                                        IR absorptive                                                                           30605     30625     30645   30665                                     layer 5                                                                        IR absorptive                                                                           30606     30626     30646   30666                                     layer 6                                                                        IR absorptive                                                                           30607     30627     30647   30667                                     layer 7                                                                        IR absorptive                                                                           30608     30628     30648   30668                                     layer 8                                                                        IR absorptive                                                                           30609     30629     30649   30669                                     layer 9                                                                        IR absorptive                                                                           30610     30630     30650   30670                                     layer 10                                                                       IR absorptive                                                                           30611     30631     30651   30671                                     layer 11                                                                       IR absorptive                                                                           30612     30632     30652   30672                                     layer 12                                                                       IR absorptive                                                                           30613     30633     30653   30673                                     layer 13                                                                       IR absorptive                                                                           30614     30634     30654   30674                                     layer 14                                                                       IR absorptive                                                                           30615     30635     30655   30675                                     layer 15                                                                       IR absorptive                                                                           30616     30636     30656   30676                                     layer 16                                                                       IR absorptive                                                                           30617     30637     30657   30677                                     layer 17                                                                       IR absorptive                                                                           30618     30638     30658   30678                                     layer 18                                                                       IR absorptive                                                                           30619     30639     30659   30679                                     layer 19                                                                       IR absorptive                                                                           30620     30640     30660   30680                                     layer 20                                                                       ______________________________________                                          *: surface layer B was used                                                    markless case: surface layer A was used                                  

                                      TABLE 385                                    __________________________________________________________________________                                      Substrate    Inner                                                                               Layer                                  Gas used and its      temperature                                                                           RF power                                                                             pressure                                                                            thickness                   Drum No.   flow rate (SCCM)      (°C.)                                                                          (W)   (Torr)                                                                              (μm)                     __________________________________________________________________________     30701                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                   30702                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      300                                                   30703                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              -150 V                                                           the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              +100 V                                                           the cylinder                                                        __________________________________________________________________________

                                      TABLE 386                                    __________________________________________________________________________                            Substrate              Inner                                                                               Layer                                  Gas used and its                                                                           temperature      RF power                                                                             pressure                                                                            thickness                   Drum No.   flow rate (SCCM)                                                                           (°C.)     (W)   (Torr)                                                                              (μm)                     __________________________________________________________________________     30801                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                   30802                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      300                                                   30803                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              -150 V                                                           the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              +100 V                                                           the cylinder                                                        __________________________________________________________________________

                                      TABLE 387                                    __________________________________________________________________________                                      Substrate    Inner                                                                               Layer                                  Gas used and its      temperature                                                                           RF power                                                                             pressure                                                                            thickness                   Drum No.   flow rate (SCCM)      (°C.)                                                                          (W)   (Torr)                                                                              (μm)                     __________________________________________________________________________     30901                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                   30902                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      100                                                       Upper layer                                                                           B.sub.2 H.sub.6 /He (20%)                                                                    500     250    100   0.40 0.3                                    H.sub.2       100                                                              SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               50   ppm                                                         NH.sub.3      300                                                   30903                                                                              Lower layer                                                                           B.sub.2 H.sub.6 /Ar (20%)                                                                    500     250    200   0.35 0.3                                    SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              -150 V                                                           the cylinder                                                            Upper layer                                                                           B.sub.2 H.sub.6 /He (20%) 500                                                                     250                                                                               100    0.35  0.3                                         SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100  ppm                                                         NH.sub.3      100                                                              Bias voltage of                                                                              +100 V                                                           the cylinder                                                        __________________________________________________________________________

                                      TABLE 388                                    __________________________________________________________________________                                Substrate    Inner                                                                               Layer                             Name of                                                                               Gas used and its    temperature                                                                           RF power                                                                             pressure                                                                            thickness                         layer  flow rate (SCCM)    (°C.)                                                                          (W)   (Torr)                                                                              (μm)                           __________________________________________________________________________     Charge SiH.sub.4     100   250    150   0.35 3                                 injection                                                                             H.sub.2       100                                                       inhibition                                                                            B.sub.2 H.sub.6 (against SiH.sub.4)                                                          1000                                                                              ppm                                                    layer  NO            10                                                        Photo- SiH.sub.4     200   250    300   0.40 20                                conductive                                                                            H.sub.2       200                                                       layer                                                                          Inter- SiH.sub.4     10    250    150   0.35 0.3                               mediate                                                                               CH.sub.4      400                                                       layer                                                                          Surface                                                                               B.sub.2 H.sub.6 /Ar (20%)                                                                    500   250    200   0.35 0.3                               layer  NH.sub.3      100                                                       (lower layer)                                                                         SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    Surface                                                                               B.sub.2 H.sub.6 /He (20%)                                                                    500   250    100   0.35 0.3                               layer  NH.sub.3      100                                                       (upper layer)                                                                         SiH.sub.4 (against B.sub.2 H.sub.6 + NH.sub.3)                                               100                                                                               ppm                                                    __________________________________________________________________________ 

What we claim is:
 1. An improved light receiving member for use in electrophotography comprising a substrate and a light receiving layer having at least a 3 to 100 μm thick photoconductive layer comprising an amorphous material containing silicon atoms as the matrix and at least one kind of atom selected from the group consisting of hydrogen and halogen in a total amount of 1 to 40 atomic % and a 0.003 to 30 μm thick surface layer being disposed in this order from the side of the substrate, characterized in that said surface layer comprises a non-signle-crystal material consisting essentially of tetrahedrally bonded boron nitride and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 2. The light receiving member according to claim 1, wherein the surface layer contains a p-type dopant selected from the group consisting of Ge, Zn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 3. The light receiving member according to claim 1, wherein the surface layer contains an n-type dopant selected from the group consisting of Si, Sn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 4. The light receiving member according to claim 1, wherein the light receiving layer further contains one or more constituent layers.
 5. The light receiving member according to claim 4, wherein the light receiving layer contains a charge injection inhibition layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from group consisting of hydrogen and halogen, and an element selected from the group consisting of Group III and V elements of the Periodic Table.
 6. The light receiving member according to claim 4, wherein the light receiving layer contains a long wavelength light absorptive layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of germanium and tin, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 7. The light receiving member according to claim 4, wherein the light receiving layer contains an adhesiveness enhancing contact layer between the photoconductive layer and the substrate or between the photoconductive layer and the layer thereunder, which comprises a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of oxygen, carbon and nitrogen, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 8. The light receiving member according to claim 4, wherein the light receiving layer contains an intermediate layer between the photoconductive layer and the surface layer, which comprises a non-single-crystal material containing silicon atoms as the matrix, carbon atoms and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 9. An improved light receiving member for use in electrophotography comprising a substrate and a light receiving layer having at least a 3 to 100 μm thick photoconductive layer comprising an amorphous material containing silicon atoms as the matrix and at least one kind of atom selected from the group consisting of hydrogen and halogen in a total amount of 1 to 40 atomic % and a 0.003 to 30 μm thick surface layer being disposed in this order from the side of the substrate, characterized in that said surface layer comprises a non-single-crystal material containing tetrahedrally bonded boron nitride and trihedrally bonded boron nitride in mingled state wherein the weight ratio of tetrahedrally bonded boron nitride to trihedrally bonded boron nitride is at least about 1:1 and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 10. The light receiving member according to claim 9, wherein the surface layer contains a p-type dopant selected from the group consisting of Ge, Zn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 11. The light receiving member according to claim 9, wherein the surface layer contains an n-type dopant selected from the group consisting of Si, Sn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 12. The light receiving member according to claim 9, wherein the light receiving layer further contains one or more constituent layers.
 13. The light receiving member according to claim 12, wherein the light receiving layer contains a charge injection inhibition layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of hydrogen and halogen, and an element selected from the group consisting of Group III and V elements of the Periodic Table.
 14. The light receiving member according to claim 12, wherein the light receiving layer contains a long wavelength light absorptive layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of germanium and tin, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 15. The light receiving member according to claim 12, wherein the light receiving layer contains an adhesiveness enhancing contact layer between the photoconductive layer and the substrate or between the photoconductive layer and the layer thereunder, which comprises a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of oxygen, carbon and nitrogen, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 16. The light receiving member according to claim 12, wherein the light receiving layer contains an intermediate layer between the photoconductive layer and the surface layer, which comprises a non-single-crystal material containing silicon atoms as the matrix, carbon atoms and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 17. An improved light receiving member for use in electrophotography comprising a substrate and a light receiving layer having at least a 3 to 100 μm thick photoconductive layer comprising an amorphous material containing silicon atoms as the matrix and at least one kind of atom selected from the group consisting of hydrogen and halogen in a total amount of 1 to 40 atomic % and a 0.003 to 30 μm thick surface layer being disposed in this order from the side of the substrate, characterized in that said surface layer is constituted by a lower layer and an upper layer: said lower layer comprising a non-single-crystal material containing tetrahedrally bonded boron nitride and at least one kind of atom selected from the group consisting of hydrogen and halogen and said upper layer comprising a non-single-crystal material containing tetrahedrally bonded boron nitride and trihedrally bonded boron in mingled state wherein the weight ratio of tetrahedrally bonded boron nitride to trihedrally bonded boron nitride is at least about 1:1 and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 18. The light receiving member according to claim 17, wherein the surface layer contains a p-type dopant selected from the group consisting of Ge, Zn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 19. The light receiving member according to claim 17, wherein the surface layer contains an n-type dopant selected from the group consisting of Si, Sn and a mixture thereof in an amount of less than 1×10³ atomic ppm.
 20. The light receiving member according to claim 17, wherein the light receiving layer further contains one or more constituent layers.
 21. The light receiving member according to claim 20, wherein the light receiving layer contains a charge injection inhibition layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of hydrogen and halogen, and an element selected from the group consisting of Group III and V elements of the Periodic Table.
 22. The light receiving member according to claim 20, wherein the light receiving layer contains a long wavelength light absorptive layer comprising a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected from the group consisting of germanium and tin, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 23. The light receiving member according to claim 20, wherein the light receiving layer contains an adhesiveness enhancing contact layer between the photoconductive layer and the substrate or between the photoconductive layer and the substrate or between the photoconductive layer and the layer thereunder, which comprises a non-single-crystal material containing silicon atoms as the matrix, at least one kind of atom selected for the group consisting of oxygen, carbon and nitrogen, and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 24. The light receiving member according to claim 20, wherein the light receiving layer contains an intermediate layer between the photoconductive layer and the surface layer, which comprises a non-single-crystal material containing silicon atoms as the matrix, carbon atoms and at least one kind of atom selected from the group consisting of hydrogen and halogen.
 25. An electrophotographic process comprising the steps of:(a) applying an electric field to the light receiving member of claim 1; and (b) applying an electromagnetic wave to said light receiving member thereby forming an electrostatic image.
 26. An electrophotographic process comprising the steps of:(a) applying an electric field to the light receiving member of claim 9; and (b) applying an electromagnetic wave to said light receiving member thereby forming an electrostatic image.
 27. An electrophotographic process comprising the comprising the steps of:(a) applying an electric field to the light receiving member of claim 17; and (b) applying an electromagnetic wave to said light receiving member thereby forming an electrostatic image. 